Patents by Inventor Juha Allan Kustaa-Adolf Poutiainen

Juha Allan Kustaa-Adolf Poutiainen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatuses and methods for deposition of material on surfaces
    Patent number: 8211235
    Abstract: An apparatus for depositing conformal thin films by sequential self saturating chemical reactions on heated surfaces is disclosed. The apparatus comprises a movable single or dual-lid system that has a substrate holder attached to a reaction chamber lid. In other embodiments, the apparatus comprises an exhaust flow plug, a gas distribution insert, a local heater or a minibatch system. Various methods suitable for ALD (Atomic Layer Deposition) are also enclosed.
    Type: Grant
    Filed: March 4, 2005
    Date of Patent: July 3, 2012
    Assignee: Picosun Oy
    Inventors: Sven Lindfors, Juha Allan Kustaa-Adolf Poutiainen