Abstract: A scanning micromirror system includes a base having an axis passing therethrough, a plurality of support flexures coupled to the base, and a platform coupled to the base by the plurality of support flexures. The platform has a first side and a second side opposing the first side and is operable to oscillate about the axis. The scanning micromirror system also includes a stress relief layer positioned on the first side of the platform and a reflector positioned on the first side of the platform. The stress relief layer is positioned between the reflector and the platform.

Abstract: Described are scanning micromirror devices, methods of making scanning micromirror devices, two-dimensional optical scanning systems that incorporate scanning micromirror devices, and methods of projecting light and images using two-dimensional optical scanning systems. The disclosed two-dimensional optical scanning systems can incorporate a first scanning micromirror device oscillating at a relatively higher frequency, which directs reflected light onto a second scanning micromirror device oscillating at a relatively lower frequency, which directs reflected light for projection.

Abstract: Described herein are methods and display systems for enhanced eye tracking for display systems, such as augmented or virtual reality display systems. The display systems may include: a light source configured to output light and a moveable diffractive grating configured to reflect light from the light source, the reflected light forming a light pattern on the eye of the user; a plurality of light detectors to detect light reflected from the eye; and one or more processors. The display system changes the orientation of the diffractive grating, such that the light pattern reflected from the diffractive grating is scanned along an axis across the eye. Light intensity patterns are obtained via the light detectors, with a light intensity pattern representing a light detector signal obtained by detecting light reflected off of the eye as the light pattern is scanned across the eye.

Abstract: Described are two-dimensional scanning micromirror devices, scanning image display systems that incorporate a two-dimensional scanning micromirror device, and methods of projecting light using two-dimensional scanning micromirror devices. The disclosed two-dimensional scanning micromirror devices can be driven at or near the resonant oscillation frequency of the micromirror structure, which can result in lower power operation. In addition, by driving the micromirror structure at multiple different frequencies, the reflected light can be directed along a non-sinusoidal path, which can improve a tilt angle of the projected light compared with reflected light directed along a sinusoidal path.

Abstract: According to the present invention there is provided a device comprising a MEMS die and, a single magnet, wherein the MEMS die cooperates with the magnet, such that the MEMS die is submerged in a magnetic field provided by the magnet; wherein the magnet is a single multi-pole magnet.

Abstract: A reflective device comprising, a comprising, a movable element which comprises a reflective surface, wherein the movable element can oscillate about at least one oscillation axis to scan light; one or more holder elements which co-operate with the movable element to hold the movable element in a manner which will allow the movable element to oscillate about the at least one oscillation axis to scan light, wherein the one or more holder elements are configured to define a region which can receive at least a portion of the movable element as the movable element oscillates when the reflective device is mounted on a surface; a magnetic element which is secured to a fixed part of the reflective device; one or more electrically conductive means positioned on the movable element so that one or more electrically conductive means can operatively co-operate with a magnetic field provided by the magnetic element to effect oscillation of the moveable element, wherein the one or more electrically conductive means are com

Abstract: Described are scanning micromirror devices, methods of making scanning micromirror devices, two-dimensional optical scanning systems that incorporate scanning micromirror devices, and methods of projecting light and images using two-dimensional optical scanning systems. The disclosed two-dimensional optical scanning systems can incorporate a first scanning micromirror device oscillating at a relatively higher frequency, which directs reflected light onto a second scanning micromirror device oscillating at a relatively lower frequency, which directs reflected light for projection.

Abstract: Described herein are methods and display systems for enhanced eye tracking for display systems, such as augmented or virtual reality display systems. The display systems may include: a light source configured to output light and a moveable diffractive grating configured to reflect light from the light source, the reflected light forming a light pattern on the eye of the user; a plurality of light detectors to detect light reflected from the eye; and one or more processors. The display system changes the orientation of the diffractive grating, such that the light pattern reflected from the diffractive grating is scanned along an axis across the eye. Light intensity patterns are obtained via the light detectors, with a light intensity pattern representing a light detector signal obtained by detecting light reflected off of the eye as the light pattern is scanned across the eye.

Abstract: Electro-mechanical designs for MEMS scanning mirrors are described. In various embodiments, a driving coil may be situated on a reflective portion of a MEMS mirror. In some embodiments, a sensing coil may be situated partially or entirely on an outer frame portion of the MEMS mirror. Other embodiments are described and claimed.

Abstract: Electro-mechanical designs for MEMS scanning mirrors are described. In various embodiments, a driving coil may be situated on a reflective portion of a MEMS mirror. In some embodiments, a sensing coil may be situated partially or entirely on an outer frame portion of the MEMS mirror. Other embodiments are described and claimed.

Abstract: A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.

Abstract: A reflective device including a movable element which has a reflective surface, wherein the movable element can oscillate about at least one oscillation axis to scan light; one or more holder elements which co-operate with the movable element to hold the movable element in a manner which will allow the movable element to oscillate about the at least one oscillation axis to scan light, wherein the one or more holder elements are configured to define a region which can receive at least a portion of the movable element as the movable element oscillates when the reflective device is mounted on a surface; a magnetic element which is secured to a fixed part of the reflective device; one or more electrically conductive means positioned on the movable element so that one or more electrically conductive means can operatively co-operate with a magnetic field provided by the magnetic element to effect oscillation of the moveable element, wherein the one or more electrically conductive means are completely embedded in th

Abstract: A reflective device comprising, a comprising, a movable element which comprises a reflective surface, wherein the movable element can oscillate about at least one oscillation axis to scan light; one or more holder elements which co-operate with the movable element to hold the movable element in a manner which will allow the movable element to oscillate about the at least one oscillation axis to scan light, wherein the one or more holder elements are configured to define a region which can receive at least a portion of the movable element as the movable element oscillates when the reflective device is mounted on a surface; a magnetic element which is secured to a fixed part of the reflective device; one or more electrically conductive means positioned on the movable element so that one or more electrically conductive means can operatively co-operate with a magnetic field provided by the magnetic element to effect oscillation of the moveable element, wherein the one or more electrically conductive means are com

Abstract: A projection apparatus, comprising one or more light sources, wherein the one or more light sources are arranged to collectively provide a light signal which comprises multiple wavelengths, wherein the projection apparatus further comprises an optical filter configured to filter the light signal provided by the one or more light sources, so that two or more images may be projected simultaneously by the projection apparatus, each image being projected to a different position. There is further provided a scanning device which uses the afore-mentioned projection apparatus.

Abstract: According to the present invention there is provided a device comprising a MEMS die and, a single magnet, wherein the MEMS die cooperates with the magnet, such that the MEMS die is submerged in a magnetic field provided by the magnet; wherein the magnet is a single multi-pole magnet

Abstract: According to the present invention there is provided a MEMS device comprising, a mirror which is connected to a fixed portion by means of a first and second torsional arm, each of the first and second torsional arms are configured such that they can twist about torsional axes so as to oscillate the mirror about a first oscillation axes, and wherein the first and second torsional arms are each configured to have two or more meanders and wherein the first and second torsional arms are arranged symmetrically relative to the first oscillation axis.

Abstract: A projection apparatus, comprising one or more light sources, wherein the one or more light sources are arranged to collectively provide a light signal which comprises multiple wavelengths, wherein the projection apparatus further comprises an optical filter configured to filter the light signal provided by the one or more light sources, so that two or more images may be projected simultaneously by the projection apparatus, each image being projected to a different position. There is further provided a scanning device which uses the afore-mentioned projection apparatus.

Abstract: A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.

Abstract: Electro-mechanical designs for MEMS scanning mirrors are described. In various embodiments, a driving coil may be situated on a reflective portion of a MEMS mirror. In some embodiments, a sensing coil may be situated partially or entirely on an outer frame portion of the MEMS mirror. Other embodiments are described and claimed.

Abstract: According to the present invention there is provided a device comprising a MEMS die and, a single magnet, wherein the MEMS die cooperates with the magnet, such that the MEMS die is submerged in a magnetic field provided by the magnet; wherein the magnet is a single multi-pole magnet.