Patents by Inventor Julien Maurice Marcel Michelon

Julien Maurice Marcel Michelon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Moisture sensor
    Patent number: 8079248
    Abstract: A moisture sensor includes interdigitated first and second electrodes formed in trenches A porous low-k dielectric is provided between the electrodes. The electrodes are of Cu surrounded by a barrier layer to protect the Cu from corrosion. TiN may be used as barrier layer and selectively deposited barrier material such as CoWB, MoWB or NiMoP as barrier layer.
    Type: Grant
    Filed: October 24, 2006
    Date of Patent: December 20, 2011
    Assignee: NXP B.V.
    Inventors: Romano Hoofman, Julien Maurice Marcel Michelon
  • Moisture Sensor
    Publication number: 20080316673
    Abstract: A moisture sensor includes interdigitated first and second electrodes formed in trenches 26. A porous low-k dielectric 20 is provided between the electrodes. The electrodes are of Cu 30 surrounded by a barrier layer 28,32 to protect the Cu from corrosion. TiN may be used as barrier layer 28 and selectively deposited barrier material such as CoWB, MoWB or NiMoP as barrier layer 32.
    Type: Application
    Filed: October 24, 2006
    Publication date: December 25, 2008
    Applicant: NXP B.V.
    Inventors: Romano Hoofman, Julien Maurice Marcel Michelon