Abstract: A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at least one plasma treatment in which at least one interior wall of the transport box is subjected to a plasma of a treatment gas at a gas pressure lower than 10000 pascals.

Abstract: The invention concerns a detection method for checking sealed product packages for leaks, characterized in that it comprises the following steps: at least one previously sealed product (2) is placed in an air, nitrogen, or oxygen atmosphere, in a chamber (3) (step 101), the pressure in the chamber (3) is lowered to a secondary vacuum pressure below 10?1 mbar and, while continuing the secondary vacuum pumping of the chamber (3), the gases contained in the chamber are ionized to monitor the change in the chamber (3) of the concentration of at least one gaseous species of the gas volume contained within the sealed product (2) chosen from among nitrogen, oxygen, or argon, by analysis by optical emission or mass spectrometry (step 102).

Abstract: A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at least one plasma treatment in which at least one interior wall of the transport box is subjected to a plasma of a treatment gas at a gas pressure lower than 10000 pascals.

Abstract: A device for pumping and treating gases is disclosed. The device features a stator having a plurality of pumping stages connected in series one after another between a suction side and a delivery side by the inter-stage ducts. The device also includes an inner tube and a blind outer tube, the tubes inserted one inside the other and made of ceramic material, the inner tube connected to the delivery side of the rotor housing of a pumping stage and the outer tube connected to the stator and communicating with at least one inter-stage duct formed in the stator, the tubes defining a path for the pumped gases. The device also includes a plasma source located outside the stator to generate a plasma in the path of the pumped gases.

Abstract: The invention concerns a detection method for checking sealed product packages for leaks, characterised in that it comprises the following steps: at least one previously sealed product (2) is placed in an air, nitrogen, or oxygen atmosphere, in a chamber (3) (step 101), the pressure in the chamber (3) is lowered to a secondary vacuum pressure below 10?1 mbar and, while continuing the secondary vacuum pumping of the chamber (3), the gases contained in the chamber are ionised to monitor the change in the chamber (3) of the concentration of at least one gaseous species of the gas volume contained within the sealed product (2) chosen from among nitrogen, oxygen, or argon, by analysis by optical emission or mass spectrometry (step 102).

Abstract: A device for pumping and treating gases is disclosed. The device features a stator having a plurality of pumping stages connected in series one after another between a suction side and a delivery side by the inter-stage ducts. The device also includes an inner tube and a blind outer tube, the tubes inserted one inside the other and made of ceramic material, the inner tube connected to the delivery side of the rotor housing of a pumping stage and the outer tube connected to the stator and communicating with at least one inter-stage duct formed in the stator, the tubes defining a path for the pumped gases. The device also includes a plasma source located outside the stator to generate a plasma in the path of the pumped gases.