Patents by Inventor Juliet A. M. Snook

Juliet A. M. Snook has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Developer-soluble metal alkoxide coatings for microelectronic applications
    Patent number: 6740469
    Abstract: Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers of the composition include recurring units having the formula where X is a light-attenuating moiety, M is a metal, and each R is individually selected from the group consisting of hydrogen, alkyls, aryls, alkoxys, and phenoxys. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.
    Type: Grant
    Filed: June 25, 2002
    Date of Patent: May 25, 2004
    Assignee: Brewer Science Inc.
    Inventors: Vandana Krishnamurthy, Charles J. Neef, Juliet A. M. Snook
  • Developer-soluble metal alkoxide coatings for microelectronic applications
    Publication number: 20030235786
    Abstract: Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system.
    Type: Application
    Filed: June 25, 2002
    Publication date: December 25, 2003
    Applicant: BREWER SCIENCE, INC.
    Inventors: Vandana Krishnamurthy, Charles J. Neef, Juliet A.M. Snook