Patents by Inventor Julll Lee

Julll Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate support assembly and substrate processing device including the same
    Patent number: 11664267
    Abstract: A substrate support assembly arranged in a chamber includes: a support plate including a first surface on which a substrate is seated; a driver configured to tilt the support plate such that the first surface is inclined with respect to a reference surface by a lower inclination angle; and a controller configured to control the driver such that the lower inclination angle is adjusted based on an upper inclination angle formed by the inclination of the gas supplier coupled to the upper surface of the chamber with respect to the reference surface.
    Type: Grant
    Filed: July 7, 2020
    Date of Patent: May 30, 2023
    Assignee: ASM IP Holding B.V.
    Inventors: JaeMin Roh, Julll Lee, GunYong Park
  • Substrate processing apparatus and substrate processing method
    Patent number: 11251068
    Abstract: A substrate processing apparatus capable of improving thin film uniformity on a substrate by controlling the position of a substrate supporting apparatus includes a plurality of reactors, wherein each of the reactors includes a substrate supporting apparatus; a ring surrounding the substrate supporting apparatus; and an alignment device for moving the substrate supporting apparatus, wherein the ring is installed such that one surface of the ring comes in contact with the substrate supporting apparatus as the substrate supporting apparatus moves and the ring is movable by a pushing force of the substrate supporting apparatus.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: February 15, 2022
    Assignee: ASM IP Holding B.V.
    Inventors: JaeMin Roh, DaeYoun Kim, Julll Lee, ChangMin Lee
  • Exhaust flow control ring for semiconductor deposition apparatus
    Patent number: D876504
    Type: Grant
    Filed: May 15, 2017
    Date of Patent: February 25, 2020
    Assignee: ASM IP Holding B.V.
    Inventors: Julll Lee, Sung Hoon Jun, Dong Rak Jung, Seung Wook Kim