Abstract: To provide a fluid control apparatus capable of reducing the space, while reducing the cost. A fluid control apparatus has a fluid controlling unit and a fluid introducing unit. The fluid introducing unit is divided into three parts: a first and a second inlet-side shutoff/open parts disposed on the inlet side, each made up of 2×N/2, disposed between the first and second inlet-side shutoff/open parts and the fluid controlling unit.

Abstract: There is provided a plasma processing apparatus including a susceptor, having a substrate mounting portion for mounting thereon a substrate; a focus ring including an outer ring and an inner ring; a dielectric ring; a dielectric constant varying device for varying a dielectric constant of the dielectric ring; a grounding body positioned at an outside of the dielectric ring with a gap from a bottom surface of the focus ring; and a controller for controlling a top surface electric potential of the focus ring by controlling a current flowing from the susceptor to the substrate.

Abstract: There is provided a plasma processing apparatus including a susceptor 114, having a substrate mounting portion for mounting thereon a substrate, to which a high frequency power is applied; a focus ring 210, disposed to surround the substrate mounted on the substrate mounting portion, including an outer ring 214 having a top surface higher than a top surface of the substrate and an inner ring 212 extending inwardly from the outer ring so as to allow at least a part of the inner ring to be positioned below a periphery of the substrate, the outer ring and the inner ring being formed as a single member; a dielectric ring 220 positioned between the focus ring and the susceptor; a dielectric constant varying device 250 for varying a dielectric constant of the dielectric ring.

Abstract: A cowling structure includes a head pipe mounted to the front of a body frame, a steering gear held such that it is capable of pivoting about the axis of the head pipe, side cowls each arranged at the transverse outside of the body frame, together with an opening so formed in each side cowl that it communicates with the transverse outside and inside of each side cowl. When viewed in a side view, the side cowls are lengthened up to the fore of the head pipe, and the opening is in such a position that it is level with the head pipe and overlaps with the steering gear in the fore of the head pipe. Such cowling structure permits less damages to the external appearance while providing the improvement in the lightness of banking at the time in the early stage of turning of a vehicle body.

Abstract: A cowling structure for a saddle-ride type vehicle for cooling an engine and providing a windshield for a rider. The cowling structure includes a seat for a rider to sit thereon, the seat is arranged behind and above an engine suspended from a vehicle body frame. An under cowl covers at least part of a lower portion of the engine. The under cowl is formed to cover at least part of a side surface of the engine. A guide portion is provided in an upper portion of the under cowl, the guide portion extending inward in a vehicle width direction and toward the side surface of the engine. An opening is provided in front of the guide portion, the opening introducing a flow of air into the under cowl. The guide portion has a slope surface which slopes downward from the front to the rear of the vehicle.

Abstract: A plasma processing method is arranged to supply a predetermined process gas into a plasma generation space in which a target substrate is placed, and turn the process gas into plasma. The substrate is subjected to a predetermined plasma process by this plasma. The spatial distribution of density of the plasma and the spatial distribution of density of radicals in the plasma are controlled independently of each other relative to the substrate by a facing portion opposite the substrate to form a predetermined process state over the entire target surface of the substrate.

Abstract: A rear portion structure (100) of a motorcycle (1) comprises a chassis frame (5); a rear wheel (17) positioned below the rear portion of the chassis frame (5); a fender main body portion (110) anchored to the rear portion of the chassis frame (5) and positioned above the rear wheel (17); a fender hanging portion (120) configured separately from the fender main body portion (110) and covering at least a portion of the rear wheel (17); and a support stay (130) anchored to the rear end portion of the chassis frame (5) (rear end frame portion (5a), extending aft approximately horizontally from the rear end portion, and supporting the fender hanging portion (120).

Abstract: A reduction gear device includes a first reduction mechanism and a second reduction mechanism. The second reduction mechanism includes a crankshaft, an external gear and an internal gear. One of the internal gear and the external gear is fixed to a base part side member of a robot arm of an industrial robot, and the other of the internal gear and the external gear is fixed to an anterior end side member of the robot arm of the industrial robot. An inner diameter D of the internal gear is 140 mm?D?200 mm, torque T transmitted to the anterior end side member is 650 Nm?T?1960 Nm, and the number of teeth N of the internal gear is less than 40 times the difference in the number of teeth between the internal gear and the external gear.

Abstract: A rear portion structure (100) of a motorcycle (1) comprises a chassis frame (5); a rear wheel (17) positioned below the rear portion of the chassis frame (5); a fender main body portion (110) anchored to the rear portion of the chassis frame (5) and positioned above the rear wheel (17); a fender hanging portion (120) configured separately from the fender main body portion (110) and covering at least a portion of the rear wheel (17); and a support stay (130) anchored to the rear end portion of the chassis frame (5) (rear end frame portion (5a), extending aft approximately horizontally from the rear end portion, and supporting the fender hanging portion (120).

Abstract: A cowling structure includes a head pipe mounted to the front of a body frame, a steering gear held such that it is capable of pivoting about the axis of the head pipe, side cowls each arranged at the transverse outside of the body frame, together with an opening so formed in each side cowl that it communicates with the transverse outside and inside of each side cowl. When viewed in a side view, the side cowls are lengthened up to the fore of the head pipe, and the opening is in such a position that it is level with the head pipe and overlaps with the steering gear in the fore of the head pipe. Such cowling structure permits less damages to the external appearance while providing the improvement in the lightness of banking at the time in the early stage of turning of a vehicle body.

Abstract: There is provided a plasma processing apparatus including a susceptor 114, having a substrate mounting portion for mounting thereon a substrate, to which a high frequency power is applied; a focus ring 210, disposed to surround the substrate mounted on the substrate mounting portion, including an outer ring 214 having a top surface higher than a top surface of the substrate and an inner ring 212 extending inwardly from the outer ring so as to allow at least a part of the inner ring to be positioned below a periphery of the substrate, the outer ring and the inner ring being formed as a single member; a dielectric ring 220 positioned between the focus ring and the susceptor; a dielectric constant varying device 250 for varying a dielectric constant of the dielectric ring.

Abstract: A plasma processing apparatus having a focus ring, enables the efficiency of cooling of the focus ring to be greatly improved, while preventing an increase in cost thereof. The plasma processing apparatus is comprised of a susceptor which has an electrostatic chuck and the focus ring. A wafer W to be subjected to plasma processing is mounted on the electrostatic chuck. The focus ring has a dielectric material portion and a conductive material portion. The dielectric material portion forms a contact portion disposed in contact with the electrostatic chuck. The conductive material portion faces the electrostatic chuck with the dielectric material portion therebetween.

Abstract: To provide a fluid control apparatus capable of reducing the space, while reducing the cost. A fluid control apparatus 1 has a fluid controlling unit 2 and a fluid introducing unit 3. The fluid introducing unit 3 is divided into three parts: a first and a second inlet-side shutoff/open parts 5, 6 disposed on the inlet side, each made up of 2×N/2 on-off valves 23, and a fluid controlling unit-side shutoff/open part 7 made up of 4×M on-off valves 23, disposed between the first and second inlet-side shutoff/open parts 5, 6 and the fluid controlling unit 2.

Abstract: A plasma processing method is arranged to supply a predetermined process gas into a plasma generation space in which a target substrate is placed, and turn the process gas into plasma. The substrate is subjected to a predetermined plasma process by this plasma. The spatial distribution of density of the plasma and the spatial distribution of density of radicals in the plasma are controlled independently of each other relative to the substrate by a facing portion opposite the substrate to form a predetermined process state over the entire target surface of the substrate.

Abstract: A cowling structure for a saddle-ride type vehicle for cooling an engine and providing a windshield for a rider. The cowling structure includes a seat for a rider to sit thereon, the seat is arranged behind and above an engine suspended from a vehicle body frame. An under cowl covers at least part of a lower portion of the engine. The under cowl is formed to cover at least part of a side surface of the engine. A guide portion is provided in an upper portion of the under cowl, the guide portion extending inward in a vehicle width direction and toward the side surface of the engine. An opening is provided in front of the guide portion, the opening introducing a flow of air into the under cowl. The guide portion has a slope surface which slopes downward from the front to the rear of the vehicle.

Abstract: An eccentrically oscillating speed reducer 100 includes a case 110 having inner teeth 110a, a plurality of crankshafts having outer teeth, outer teeth gears 131 and 132 having outer teeth 131a and 132a brought in mesh with the inner teeth 110a of the case 110 and eccentrically moved by the crankshafts, a carrier 140 rotatably supporting the crankshafts and rotated to move relative to the case 110 by the crankshafts, and a cylindrical gear 180 brought in mesh with the outer teeth of the crankshafts for transmitting a power inputted to one crankshaft 121 of the plurality of crankshafts to remaining crankshafts, and the cylindrical gear 180 is rotatably supported by sliding friction.