Patents by Inventor Junhan Yuh

Junhan Yuh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma resistant ceramic coated conductive article
    Patent number: 9394615
    Abstract: To manufacture a ceramic coated article, at least one surface of a conductive article is roughened to a roughness of approximately 100 micro-inches (?in) to approximately 300 ?in. The conductive article may then be heated and coated with a ceramic coating comprising a yttrium containing oxide to a thickness of approximately 10-40 mil.
    Type: Grant
    Filed: November 28, 2012
    Date of Patent: July 19, 2016
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo, Ren-Guan Duan, Hamid Noorbakhsh, Junhan Yuh, Dmitry Lubomirsky
  • PLASMA RESISTANT CERAMIC COATED CONDUCTIVE ARTICLE
    Publication number: 20130284373
    Abstract: To manufacture a ceramic coated article, at least one surface of a conductive article is roughened to a roughness of approximately 100 micro-inches (?in) to approximately 300 ?in. The conductive article may then be heated and coated with a ceramic coating comprising a yttrium containing oxide to a thickness of approximately 10-40 mil.
    Type: Application
    Filed: November 28, 2012
    Publication date: October 31, 2013
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo, Ren-Guan Duan, Hamid Noobakhsh, Junhan Yuh, Dmitry Lubomirsky