Patents by Inventor Junichi Honda
Junichi Honda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7673512Abstract: An angular velocity sensor includes a base portion, three arm portions that extend as one piece from the base portion to an approximately same direction, a piezoelectric film formed on one surface of each of the arm portions, drive electrodes for excitation formed on the piezoelectric films of at least two outer arm portions, and detection electrodes for angular velocity detection formed on the piezoelectric film of at least a center arm portion. Among the three arm portions, the two outer arm portions are excited in phase, and the center arm portion is excited in opposite phase with the two outer arm portions. The drive electrodes excite the arm portions in a first direction vertical to surfaces on which the piezoelectric films are formed. The detection electrodes detect a vibration in a second direction parallel to the surfaces on which the piezoelectric films of the arm portions are formed.Type: GrantFiled: October 30, 2007Date of Patent: March 9, 2010Assignee: Sony CorporationInventors: Kazuo Takahashi, Junichi Honda, Teruo Inaguma
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Patent number: 7654139Abstract: To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer.Type: GrantFiled: February 23, 2006Date of Patent: February 2, 2010Assignee: Sony CorporationInventors: Shigeto Watanabe, Junichi Honda, Shin Sasaki, Kazuo Takahashi, Teruo Inaguma, Koji Suzuki, Manabu Aizawa
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Publication number: 20100000322Abstract: Disclosed is an angular velocity sensor. The angular velocity sensor includes a first layer, a piezoelectric layer, and a second layer. The first layer has a first main surface and a second main surface, and includes a vibrator portion and a base portion that supports the vibrator portion. The piezoelectric layer is formed on the first main surface of the first layer. The second layer is integrally bonded to the base portion on a side of the second main surface of the first layer.Type: ApplicationFiled: June 25, 2009Publication date: January 7, 2010Applicant: SONY CORPORATIONInventors: Junichi Honda, Teruo Inaguma, Tetsuya Shibayama
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Publication number: 20090320593Abstract: A vibration type gyro sensor according to the present invention includes vibrating elements 1X and 1Y which detect angular velocities, a support substrate 2 which is electrically connected to the vibrating elements 1X and 1Y and which supports the vibrating elements 1X and 1Y, a relay substrate 4 which is electrically connected to the support substrate 2 and which includes external connection terminals 3, and buffer members 5 which are disposed between the support substrate 2 and the relay substrate 4 and which suppress transmission of strain and vibration between the support substrate 2 and the relay substrate 4. The vibration type gyro sensor is capable of stabilizing vibration characteristics without being influenced by strain and vibration.Type: ApplicationFiled: June 29, 2007Publication date: December 31, 2009Applicant: SONY CORPORATIONInventors: Eiji Nakashio, Shigeto Watanabe, Shin Sasaki, Teruo Inaguma, Junichi Honda, Kazuo Kurihara, Yuji Shishido, Tomoyuki Takahashi
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Patent number: 7583012Abstract: There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.Type: GrantFiled: March 3, 2006Date of Patent: September 1, 2009Assignee: Sony CorporationInventors: Eiji Nakashio, Junichi Honda, Takashi Tamura, Koji Suzuki, Teruo Inaguma, Manabu Aizawa, Kazuo Takahashi, Tadashi Sakurai
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Publication number: 20090174292Abstract: A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.Type: ApplicationFiled: May 7, 2008Publication date: July 9, 2009Applicant: SONY CORPORATIONInventors: Kazuo Takahashi, Teruo Inaguma, Junichi Honda, Koji Suzuki, Shigeto Watanabe, Shin Sasaki, Eiji Nakashio, Manabu Aizawa
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Publication number: 20080257044Abstract: To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer.Type: ApplicationFiled: February 23, 2006Publication date: October 23, 2008Inventors: Shigeto Watanabe, Junichi Honda, Shin Sasaki, Kazuo Takahashi, Teruo Inaguma, Koji Suzuki, Manabu Aizawa
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Publication number: 20080222865Abstract: A piezoelectric element with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film, and a method of forming same. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film has a predetermined thickness and is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization.Type: ApplicationFiled: May 19, 2008Publication date: September 18, 2008Applicant: SONY CORPORATIONInventors: Eiji Nakashio, Junichi Honda, Takashi Tamura, Koji Suzuki, Teruo Inaguma, Manabu Aizawa, Kazuo Takahashi, Tadashi Sakurai
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Patent number: 7401516Abstract: A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.Type: GrantFiled: April 12, 2007Date of Patent: July 22, 2008Assignee: Sony CorporationInventors: Teruo Inaguma, Junichi Honda, Takashi Tamura, Kazuo Takahashi
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Patent number: 7400078Abstract: A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.Type: GrantFiled: March 3, 2006Date of Patent: July 15, 2008Assignee: Sony CorporationInventors: Kazuo Takahashi, Teruo Inaguma, Junichi Honda, Koji Suzuki, Shigeto Watanabe, Shin Sasaki, Eiji Nakashio, Manabu Aizawa
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Publication number: 20080105052Abstract: An angular velocity sensor includes a base portion, three arm portions that extend as one piece from the base portion to an approximately same direction, a piezoelectric film formed on one surface of each of the arm portions, drive electrodes for excitation formed on the piezoelectric films of at least two outer arm portions, and detection electrodes for angular velocity detection formed on the piezoelectric film of at least a center arm portion. Among the three arm portions, the two outer arm portions are excited in phase, and the center arm portion is excited in opposite phase with the two outer arm portions. The drive electrodes excite the arm portions in a first direction vertical to surfaces on which the piezoelectric films are formed. The detection electrodes detect a vibration in a second direction parallel to the surfaces on which the piezoelectric films of the arm portions are formed.Type: ApplicationFiled: October 30, 2007Publication date: May 8, 2008Applicant: Sony CorporationInventors: Kazuo Takahashi, Junichi Honda, Teruo Inaguma
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Patent number: 7291511Abstract: A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.Type: GrantFiled: February 25, 2005Date of Patent: November 6, 2007Assignee: Sony CorporationInventors: Teruo Inaguma, Junichi Honda, Takashi Tamura, Kazuo Takahashi
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Patent number: 7263884Abstract: Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5<(W0/W)<1 is to be met.Type: GrantFiled: March 24, 2005Date of Patent: September 4, 2007Assignee: Sony CorporationInventors: Kazuo Takahashi, Takashi Tamura, Junichi Honda, Teruo Inaguma
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Publication number: 20070180910Abstract: A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.Type: ApplicationFiled: April 12, 2007Publication date: August 9, 2007Applicant: SONY CORPORATIONInventors: Teruo Inaguma, Junichi Honda, Takashi Tamura, Kazuo Takahashi
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Publication number: 20060202591Abstract: A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.Type: ApplicationFiled: February 27, 2006Publication date: September 14, 2006Inventors: Teruo Inaguma, Junichi Honda, Koji Suzuki, Kazuo Takahashi, Eiji Nakashio
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Publication number: 20060197415Abstract: There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.Type: ApplicationFiled: March 3, 2006Publication date: September 7, 2006Inventors: Eiji Nakashio, Junichi Honda, Takashi Tamura, Koji Suzuki, Teruo Inaguma, Manabu Aizawa, Kazuo Takahashi, Tadashi Sakurai
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Publication number: 20060197414Abstract: A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.Type: ApplicationFiled: March 3, 2006Publication date: September 7, 2006Inventors: Kazuo Takahashi, Teruo Inaguma, Junichi Honda, Koji Suzuki, Shigeto Watanabe, Shin Sasaki, Eiji Nakashio, Manabu Aizawa
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Publication number: 20050241395Abstract: Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5<(W0/W)<1 is to be met.Type: ApplicationFiled: March 24, 2005Publication date: November 3, 2005Inventors: Kazuo Takahashi, Takashi Tamura, Junichi Honda, Teruo Inaguma
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Publication number: 20050193817Abstract: A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.Type: ApplicationFiled: February 25, 2005Publication date: September 8, 2005Inventors: Teruo Inaguma, Junichi Honda, Takashi Tamura, Kazuo Takahashi
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Patent number: 6510023Abstract: A magnetic head forms a closed magnetic circuit with a magnetic core and has a gap in the closed magnetic circuit. At least a part of the magnetic core is composed of soft magnetic laminated films made by laminating soft magnetic thin film layers and noble metal layers. The soft magnetic thin film layers are exhibited by a composition formula of FeaSibTacRudGaeNf (where “a”, “b”, “c”, “d”, “e” and “f” in the formula indicate compositions of respective elements by the atomic percent), and ranges of the compositions are: 62 atomic percent<a<75 atomic percent; 7 atomic percent<b<18 atomic percent; 3 atomic percent<c<10 atomic percent; 0 atomic percent≦d<10 atomic percent; 0 atomic percent≦e<6 atomic percent; 5 atomic percent<f<12 atomic percent; and b+c>13 atomic percent. The noble metal layers contain at least a kind of Pt, Au, Ag and Pd.Type: GrantFiled: November 6, 2000Date of Patent: January 21, 2003Assignee: Sony CorporationInventors: Yoshihiko Inoue, Junichi Honda, Fusashige Tokutake, Atsushi Suzuki