Abstract: A through hole forming method includes forming a plurality of small holes in a first substrate surface of a substrate including the first substrate surface and a second substrate surface as a back surface of the first substrate surface, forming a thermally oxidized film by thermally oxidizing partition walls between the adjacent small holes and bottoms of the small holes, and removing the thermally oxidized film.

Abstract: A processing method of a substrate which includes: a first bonding step which bonds a ring-shaped first support member to a first surface of the substrate along the outer periphery of the substrate; a first processing step which processes the substrate; and a first separating step which separates the first support member from the substrate by separation at the bonded position.

Abstract: A silicon device has a flat panel shape which is a polygon in a plan view, and at least one corner of the polygon includes two sides adjacent to each other out of plural sides of the polygon and a corner curve portion connected to the two sides so as to connect the two sides.

Abstract: Disclosed is a travel-time prediction apparatus that is capable of making a mid-term prediction of travel time accurately by combining present conditions and statistical information. The apparatus includes a travel-time transition pattern database storing travel-time transition patterns obtained by statistically processing past time-series data of each road link according to type of data. Upon accepting a travel-time transition pattern corresponding to a specified link and day type from the database, the apparatus calculates conversion parameters of a travel-time transition pattern for which an error between the travel-time transition pattern and a sequentially input travel-time time-series data will be reduced, and then makes a prediction using a prediction function obtained by converting the travel-time transition pattern by the calculated conversion parameters. The calculated predicted value and the conversion parameters are distributed as traffic information.

Abstract: When the temperature of an engine and a main battery is low at the time of activating a vehicle system, an ECU starts the engine in advance and outputs a running permission signal after completion of engine startup. At this stage, the ECU suspends a defect diagnosis operation on a subsidiary load and feedback-controls the DC/DC converter by setting the voltage control value to a level lower than the output voltage from the subsidiary battery and at least the lower limit of the operating voltage of the ECU. The ECU feedback-controls the DC/DC converter by setting the voltage control value to a level of at least the output voltage of the subsidiary battery in response to completion of engine start-up. Then, the suspension of the defect diagnosis operation on the subsidiary load is canceled and a running permission signal is output.

Abstract: A sliding contact material containing 40 to 60% by weight of Au, 15 to 25% by weight of Pd, and Sn and In as essential elements, the total amount of Sn and In being 1 to 4% by weight and the balance being Ag, and a sliding contact material containing 40 to 60% by weight of Au, 15 to 25% by weight of Pd, and Zn, the amount of Zn being 0.1 to 5% by weight and the balance being Ag. The sliding contact material is insusceptible to the interaction with grease essential for the use of such contact materials, and has stable contact resistance, and therefore can be used for a long time.

Abstract: A network device that transfers frames by repeating, in a constant cycle, a reserved transfer interval that is a time band, in which a frame is transferred with a reservation, and a free transfer interval that is a time band, in which a frame is freely transferred, includes: a BPDU generation unit that generates a first BPDU; and a BPDU transmission instruction unit that instructs to arrange the first BPDU in the reserved transfer interval and transmit the first BPDU to a first other network device.

Abstract: In a network system of this invention including a plurality of network devices that transfer frames by repeating, in a constant cycle, a reserved transfer interval that is a time band, in which a frame is transferred with a reservation and a free transfer interval that is a time band, in which a frame is freely transferred, a relay network device that links a first network device that is a transmission source of a frame and a second network device that is a transmission destination of the frame and the first network device execute a reservation processing such that the same time band within the reserved transfer interval is reserved and transfer the frame from the first network device to the second network device on the basis of the reservation result.

Abstract: A loop communication system includes a plurality of communication devices, each of which holds an identification data assigned to the communication device, and has a single port used for transmission and reception of a data packet for a transmission data, and which are connected by using the ports to constitute a port synchronization type network of a loop structure. The data packet from each of the plurality of communication devices is transferred on the network of the loop structure in one direction.

Abstract: A network device of is a network device that transfers frames by repeating, in a constant cycle, a reserved transfer interval and a free transfer interval. The network device includes a transmission port, a cycle timer, a mode switching control unit that monitors a transfer state of the transmission port and selects a store-and-forward system when the transmission port is in the transfer process and selects a cut-through system when the transmission port is not in the transfer process, and a transfer prohibition control unit that selects the cut-through system as a transfer system when a non-reserved frame is transmitted and switches a transfer method of the non-reserved frame to the store-and-forward system when a reserved transfer interval is established, with reference to the cycle timer.

Abstract: A network device that arranges and transfers in an initial period of a cycle a synchronization frame that synchronizes network devices within a network includes: a cycle timer that measures a time within the cycle and a synchronization management unit that suspends frame transmission for a predetermined period till a start of the next cycle in each cycle, on the basis of information from a cycle timer.

Abstract: A communication system carrying out an isochronous transfer, includes a cycle master node and nodes connected with each other through a system bus. The cycle master node sets a cycle time of the isochronous transfer and transfers a cycle start packet onto the system bus for every the cycle time. Each of the nodes transfers an isochronous packet onto the system bus in response to the cycle start packet.

Abstract: A method for manufacturing a nozzle plate includes: forming on a first surface of a silicon substrate a film to be a dry etching mask used to form a depression that becomes a first nozzle portion on a droplet discharge side of the silicon substrate, and dry etching the silicon substrate using the film to form the depression to be the first nozzle portion; sequentially forming a first liquid-resistant protective film having liquid resistance and etching resistance and a liquid repellent layer having liquid repellency over the whole of the first surface of the silicon substrate after removing the film used as the dry etching mask, the whole of the first surface including an inner wall of the depression; bonding a support substrate to the first surface of the silicon substrate, and reducing the silicon substrate to a desired thickness from a second surface side opposite from the support substrate; dry etching the silicon substrate from the second surface side until a bottom of the depression to be the first nozz

Abstract: Improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment. A ceramic coating member for a semiconductor processing apparatus comprises a porous layer made of an oxide of an element in Group IIIb of the Periodic Table coated directed or through an undercoat on the surface of the substrate of a metal or non-metal and a secondary recrystallized layer of the oxide formed on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.

Abstract: When the temperature of an engine and a main battery is low at the time of activating a vehicle system, an ECU starts the engine in advance and outputs a running permission signal after completion of engine startup. At this stage, the ECU suspends a defect diagnosis operation on a subsidiary load and feedback-controls the DC/DC converter by setting the voltage control value to a level lower than the output voltage from the subsidiary battery and at least the lower limit of the operating voltage of the ECU. The ECU feedback-controls the DC/DC converter by setting the voltage control value to a level of at least the output voltage of the subsidiary battery in response to completion of engine start-up. Then, the suspension of the defect diagnosis operation on the subsidiary load is canceled and a running permission signal is output.

Abstract: Provided are a hydrogenation catalyst for carbonyl groups which can produce an unsaturated alcohol by hydrogenating an unsaturated carbonyl compound with high selectivity by a simple process at low cost, a method of efficiently producing the hydrogenation catalyst, and a practical method of producing an unsaturated alcohol by using the hydrogenation catalyst. In the present invention, the hydrogenation catalyst is obtained by carrying a noble metal such as ruthenium as a catalyst component onto a carrier which is composed of an oxygen-containing gallium compound. Gallium oxyhydroxide, gallium oxide, gallium phosphate or the like can be used as the gallium compound, and a hydrogenation catalyst including the gallium compound carrier carrying 0.1 to 10% by weight of ruthenium is used suitably.

Abstract: A disk brake has a mount and a pad. The pad has a guide portion and outer and inner push bearing portions on a disk rotor rotation outlet side. The mount has a support portion to support the guide portion movably in a rotor axial direction. The outer and inner push bearing portions are provided on each position outwardly or inwardly of the rotor rotation outlet side guide portion in the radial direction of the rotor, and project toward the mount in the radial direction of the rotor to abut against the mount. The outer push bearing portion has an abutment surface to abut against the mount on a tangent to an outer peripheral side in a central position of the outer peripheral side of a friction surface of the pad radially outwardly in the radial direction of the rotor, or in a position outwardly of the tangent.

Abstract: Producing a ceramic coating member for a semiconductor processing apparatus with a purpose of improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment and as a means for solution, forming a porous layer by irradiating an oxide of an element in Group IIIa of the Periodic Table to be coated directly or through an undercoat on the surface of the substrate of a metal or non-metal and further forming a secondary recrystallized layer of the oxide on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.

Abstract: For the purpose of solving problems inherent to a plasma spray coating of white base Al2O3—Y2O3 composite oxide, i.e. drawbacks that the corrosion resistance, heat resistance and abrasion resistance are poor and the light reflectance is high because the coating is porous and weak in the bonding force among particles, a spray coating member having an excellent heat emission property and the like is proposed wherein a surface of a substrate is covered with a spray coating of a colored composite oxide made of a low luminosity, achromatic or chromatic Al2O3—Y2O3.

Abstract: An electrostatic chuck member comprises an electrode layer and an electric insulating layer, wherein a spray coating layer of an oxide of a Group 3A element in the Periodic Table is formed as an outermost layer of the member and a surface of the spray coating layer is rendered into a densified re-melting layer having an average surface roughness (Ra) Of 0.8-3.0 ?m.