Patents by Inventor Junichi Takeyama
Junichi Takeyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7148094Abstract: A semiconductor device is disclosed. The semiconductor device has a crystalline silicon film as an active layer region. The crystalline silicon film has needle-like or columnar crystals oriented parallel to the substrate and having a crystal growth direction of (111) axis. A method for preparing the semiconductor device comprises steps of adding a catalytic element to an amorphous silicon film; and heating the amorphous silicon film containing the catalytic element at a low temperature to crystallize the silicon film.Type: GrantFiled: March 25, 2004Date of Patent: December 12, 2006Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hongyong Zhang, Toru Takayama, Yasuhiko Takemura, Akiharu Miyanaga, Hisashi Ohtani, Junichi Takeyama
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Publication number: 20040180477Abstract: A semiconductor device is disclosed. The semiconductor device has a crystalline silicon film as an active layer region. The crystalline silicon film has needle-like or columnar crystals oriented parallel to the substrate and having a crystal growth direction of (111) axis. A method for preparing the semiconductor device comprises steps of adding a catalytic element to an amorphous silicon film; and heating the amorphous silicon film containing the catalytic element at a low temperature to crystallize the silicon film.Type: ApplicationFiled: March 25, 2004Publication date: September 16, 2004Applicant: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hongyong Zhang, Toru Takayama, Yasuhiko Takemura, Akiharu Miyanaga, Hisashi Ohtani, Junichi Takeyama
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Patent number: 6756657Abstract: A semiconductor device is disclosed. The semiconductor device has a crystalline silicon film as an active layer region. The crystalline silicon film has needle-like or columnar crystals oriented parallel to the substrate and having a crystal growth direction of (111) axis. A method for preparing the semiconductor device comprises steps of adding a catalytic element to an amorphous silicon film; and heating the amorphous silicon film containing the catalytic element at a low temperature to crystallize the silicon film.Type: GrantFiled: January 28, 1999Date of Patent: June 29, 2004Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hongyong Zhang, Toru Takayama, Yasuhiko Takemura, Akiharu Miyanaga, Hisashi Ohtani, Junichi Takeyama
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Patent number: 6730549Abstract: A semiconductor device is disclosed. The semiconductor device has a crystalline silicon film as an active layer region. The crystalline silicon film has needle-like or columnar crystals oriented parallel to the substrate and having a crystal growth direction of (111) axis. A method for preparing the semiconductor device comprises steps of adding a catalytic element to an amorphous silicon film; and heating the amorphous silicon film containing the catalytic element at a low temperature to crystallize the silicon film.Type: GrantFiled: December 29, 1998Date of Patent: May 4, 2004Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hongyong Zhang, Toru Takayama, Yasuhiko Takemura, Akiharu Miyanaga, Hisashi Ohtani, Junichi Takeyama
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Patent number: 6417031Abstract: A method of manufacturing a semiconductor device which has a crystalline silicon film comprises the steps of forming crystal nuclei in a surface region of an amorphous silicon film and then growing the crystals from the nuclei by a laser light. Typically the crystal nuclei are silicon crystals or metal silicides having an equivalent structure as silicon crystal.Type: GrantFiled: April 24, 2001Date of Patent: July 9, 2002Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hisashi Ohtani, Akiharu Miyanaga, Junichi Takeyama
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Publication number: 20010023092Abstract: A method of manufacturing a semiconductor device which has a crystalline silicon film comprises the steps of forming crystal nuclei in a surface region of an amorphous silicon film and then growing the crystals from the nuclei by a laser light. Typically the crystal nuclei are silicon crystals or metal suicides having an equivalent structure as silicon crystal.Type: ApplicationFiled: April 24, 2001Publication date: September 20, 2001Inventors: Hisashi Ohtani, Akiharu Miyanaga, Junichi Takeyama
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Patent number: 6232156Abstract: A method of manufacturing a semiconductor device which has a crystalline silicon film comprises the steps of forming crystal nuclei in a surface region of an amorphous silicon film and then growing the crystals from the nuclei by a laser light. Typically the crystal nuclei are silicon crystals or metal silicides having an equivalent structure as silicon crystal.Type: GrantFiled: April 14, 1998Date of Patent: May 15, 2001Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hisashi Ohtani, Akiharu Miyanaga, Junichi Takeyama
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Patent number: 5904770Abstract: A method of manufacturing a semiconductor device which has a crystalline silicon film comprises the steps of forming crystal nuclei in a surface region of an amorphous silicon film and then growing the crystals from the nuclei by a laser light. Typically the crystal nuclei are silicon crystals or metal silicides having an equivalent structure as silicon crystal.Type: GrantFiled: July 29, 1996Date of Patent: May 18, 1999Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hisashi Ohtani, Akiharu Miyanaga, Junichi Takeyama
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Patent number: 5895933Abstract: A semiconductor device is disclosed. The semiconductor device has a crystalline silicon film as an active layer region. The crystalline silicon film has needle-like or columnar crystals oriented parallel to the substrate and having a crystal growth direction of (111) axis. A method for preparing the semiconductor device comprises steps of adding a catalytic element to an amorphous silicon film; and heating the amorphous silicon film containing the catalytic element at a low temperature to crystallize the silicon film.Type: GrantFiled: June 3, 1997Date of Patent: April 20, 1999Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hongyong Zhang, Yasuhiko Takemura, Toru Takayama, Akiharu Miyanaga, Hisashi Ohtani, Junichi Takeyama
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Patent number: 5882960Abstract: A semiconductor device is disclosed. The semiconductor device has a crystalline silicon film as an active layer region. The crystalline silicon film has needle-like or columnar crystals oriented parallel to the substrate and having a crystal growth direction of (111) axis. A method for preparing the semiconductor device comprises steps of adding a catalytic element to an amorphous silicon film; and heating the amorphous silicon film containing the catalytic element at a low temperature to crystallize the silicon film.Type: GrantFiled: August 15, 1997Date of Patent: March 16, 1999Assignee: Semiconductor Energy Laboratory Co., LtdInventors: Hongyong Zhang, Toru Takayama, Yasuhiko Takemura, Akiharu Miyanaga, Hisashi Ohtani, Junichi Takeyama
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Patent number: 5585291Abstract: A method for manufacturing a semiconductor device having a crystalline silicon semiconductor layer comprises the steps of heat crystallizing an amorphous silicon semiconductor layer at a relatively low temperature because of the use of a crystallization promoting material such as Ni, Pd, Pt, Cu, Ag, Au, In, Sn, Pb, P, As, and Sb. The crystallization promoting material is introduced by mixing it within a liquid precursor material for forming silicon oxide and coating the precursor material onto the amorphous silicon film. Thus, it is possible to add the crystallization promoting material into the amorphous silicon film at a minimum density.Type: GrantFiled: November 29, 1994Date of Patent: December 17, 1996Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hisashi Ohtani, Akiharu Miyanaga, Junichi Takeyama
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Patent number: 5185179Abstract: Carbonaceous films are coated on a surface by chemical vapor reation. In advance of the deposition of carbonaceous film, a silicon nitride film as coated on the surface to prevent interdiffusion between the carbonaceous film and the underlying surface.Type: GrantFiled: October 5, 1989Date of Patent: February 9, 1993Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Shigenori Hayashi, Noriya Ishida, Mari Sasaki, Junichi Takeyama, Kenji Itou, Masahiro Kojima, Masaya Kadono
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Patent number: 5079031Abstract: An improved apparatus and method for depositing thin films on a substrate. The apparatus utilizes two types of energy input. A pair of electrodes are provided in a reaction chamber and supplied with first AC electric energy at 1 to 100 MHz for generating a plasma gas in a reaction chamber therebetween. The substrate is mounted on a substrate holder to which second electric energy is supplied.Type: GrantFiled: March 17, 1989Date of Patent: January 7, 1992Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Shinji Imatou, Noriya Ishida, Mari Sasaki, Mitsunori Sakama, Takeshi Fukada, Naoki Hirose, Mitsunori Tsuchiya, Atsushi Kawano, Kazuhisa Nakashita, Junichi Takeyama, Toshiji Hamatani
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Patent number: 5059502Abstract: An electrophotographic photoconductor comprises an electroconductive substrate, an organic photoconductive layer formed on the electroconductive substrate, and a protective layer formed on the organic photoconductive layer, comprising carbon or a carbon-based material as its main component, in which the difference in the Vickers hardness between the organic photoconductive layer and the protective layer is 2500 Kg/mm.sup.2 or less, and the oxygen concentration at the interface or in the vicinity of the interface between the organic photoconductive layer and the protective layer is 1 atom % or less.Type: GrantFiled: November 13, 1989Date of Patent: October 22, 1991Assignees: Ricoh Company, Ltd., Semiconductor Energy Laboratory Company Co., Ltd.Inventors: Narihito Kojima, Hiroshi Nagame, Mitsuru Seto, Shunpei Yamazaki, Shigenori Hayashi, Noriya Ishida, Naoki Hirose, Mari Sasaki, Junichi Takeyama