Patents by Inventor Junro Iwakiri

Junro Iwakiri has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Liquid coating device
    Patent number: 5127362
    Abstract: A liquid coating device for coating a solution on a substrate to form a film includes a chuck for rotatably supporting the substrate, a nozzle for supplying the solution on the substrate, a heater provided in the nozzle for changing a temperature of the solution, a sensor for measuring a temperature of an ambient atmosphere of the substrate, and a controller for controlling the heater according the measured temperature. Thus, a solution having a temperature corresponding to the temperature of the ambient atmosphere is supplied from the nozzle to the substrate.
    Type: Grant
    Filed: May 21, 1990
    Date of Patent: July 7, 1992
    Assignees: Tokyo Electron Limited, Tokyo Electron Kyushu Limited
    Inventors: Haruo Iwatsu, Yasuhiro Sakamoto, Junro Iwakiri