Abstract: A method of fabricating an electrostatic actuator with an intrinsic stress gradient is provided. An electrode is formed on a substrate and a support layer is formed over the electrode. A metal layer is deposited onto the support layer via a deposition process. Deposition process conditions are varied in order to induce a stress gradient into the metal layer. The intrinsic stress in the metal layer increases in the direction from the bottom to the top of the metal layer. The support layer under the electrode is removed to release the electrostatic actuator.

Abstract: A method of fabricating an electrostatic actuator with an intrinsic stress gradient is provided. An electrode is formed on a substrate and a support layer is formed over the electrode. A metal layer is deposited onto the support layer via a deposition process. Deposition process conditions are varied in order to induce a stress gradient into the metal layer. The intrinsic stress in the metal layer increases in the direction from the bottom to the top of the metal layer. The support layer under the electrode is removed to release the electrostatic actuator.

Abstract: An electrostatic actuator with an intrinsic stress gradient is provided. The electrostatic actuator comprises an electrode and an electrostatically actuated beam fixed at one end relative to the electrode. The electrostatically actuated beam further includes a metal layer made substantially of a single metal with an induced stress gradient therein. The stress gradient in the metal layer determines the initial curvature of the beam. Upon electrostatic actuation of the beam, the beam is deflected from its initial curvature relative to the electrode. In one embodiment, the electrostatically actuated beam is used as a top movable electrode of an electrostatically actuated variable capacitor. The capacitance of the electrostatically actuated capacitor is changed upon electrostatic actuation of the beam.

Abstract: A holding spring arrangement for a spot-type disc brake, in particular an integrated disc brake for automotive vehicles, wherein a brake carrier of the disc brake is integrated into the steering knuckle of the vehicle, and the holding spring includes at least one spring arm which extends generally in a circumferential direction and clamps the housing of the disc brake and the brake carrier to one another in a radial direction. To largely prevent tilting of the outward brake pad, according to the present invention, a holding element is provided for mounting the housing holding spring on the brake pad, which holding element is particularly made of sheet metal and supported on a part of the brake housing.

Abstract: It is frequently important for the piston of a hydraulic piston-and-cylinder assembly, in particular the brake piston of a disc brake, which is slidably arranged within a cylinder bore to ensure a true-to-size mounting position of the piston inside the cylinder bore. Especially in the case of brake pistons of a disc brake, this determines the efficiency of provisions on the brake piston for reducing the occurrence of brake noises. According to the present invention, a key-type accommodation is provided on the piston which permits engagement by a matingly configured mounting means or mounting tool and, thus, renders possible the defined positioning of the piston within a cylinder bore.

Abstract: A brake cable fixing device for the expanding lock of a parking brake is described making possible an easy installation of a brake cable. A tapered cable end nipple of the brake cable is guided during installation by a funnel-shaped entry space, constituted by the outer edges of the fork of an actuating lever and by an elastic leg of a securing element positioned on a forked pressure bracket. Insertion of the cable and nipple deflects the elastic leg of the securing element, allowing the end nipple to pass by, and the restoring force of the elastic leg urges the cable end nipple into position in the fork of the actuating lever. The securing element is described as a spring clasp, having a pair of spring legs connected at a vertex, one spring leg constituting the elastic leg, the other spring leg engaging the endwall of the pressure bracket to mount the securing element thereto.