Patents by Inventor Kaigham J. Gabriel
Kaigham J. Gabriel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8203190Abstract: A MEMS device includes a chip carrier having an acoustic port extending from a first surface to a second surface of the chip carrier, a MEMS die disposed on the chip carrier to cover the acoustic port at the first surface of the chip carrier, and an enclosure bonded to the chip carrier and encapsulating the MEMS die.Type: GrantFiled: June 28, 2010Date of Patent: June 19, 2012Assignee: Akustica, Inc.Inventors: Jason P. Goodelle, Kaigham J. Gabriel
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Patent number: 8094980Abstract: Provided is a micro-electromechanical-system (MEMS) device including a substrate; at least one semiconductor layer provided on the substrate; a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer; a support structure attached to the substrate; at least one elastic device attached to the support structure; a proof-mass suspended by the at least one elastic device and free to move in at least one of the x-, y-, and z-directions; at least one top electrode provided on the at least one elastic device; and at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes, wherein the drive/sense circuitry, proof-mass, supporting structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer.Type: GrantFiled: January 4, 2010Date of Patent: January 10, 2012Assignee: Akustica, Inc.Inventors: Brett M. Diamond, Matthew A. Zeleznik, Jan E. Vandemeer, Kaigham J. Gabriel
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Publication number: 20100264499Abstract: A MEMS device includes a chip carrier having an acoustic port extending from a first surface to a second surface of the chip carrier, a MEMS die disposed on the chip carrier to cover the acoustic port at the first surface of the chip carrier, and an enclosure bonded to the chip carrier and encapsulating the MEMS die.Type: ApplicationFiled: June 28, 2010Publication date: October 21, 2010Inventors: Jason P. Goodelle, Kaigham J. Gabriel
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Patent number: 7763488Abstract: A MEMS device includes a chip carrier having an acoustic port extending from a first surface to a second surface of the chip carrier, a MEMS die disposed on the chip carrier to cover the acoustic port at the first surface of the chip carrier, and an enclosure bonded to the chip carrier and encapsulating the MEMS die.Type: GrantFiled: June 5, 2006Date of Patent: July 27, 2010Assignee: Akustica, Inc.Inventors: Jason P. Goodelle, Kaigham J. Gabriel
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Publication number: 20100147076Abstract: Provided is a micro-electromechanical-system (MEMS) device including a substrate; at least one semiconductor layer provided on the substrate; a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer; a support structure attached to the substrate; at least one elastic device attached to the support structure; a proof-mass suspended by the at least one elastic device and free to move in at least one of the x-, y-, and z-directions; at least one top electrode provided on the at least one elastic device; and at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes, wherein the drive/sense circuitry, proof-mass, supporting structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer.Type: ApplicationFiled: January 4, 2010Publication date: June 17, 2010Inventors: Brett M. Diamond, Matthew A. Zeleznik, Jan E. Vandemeer, Kaigham J. Gabriel
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Patent number: 7640805Abstract: Provided is a micro-electromechanical-system (MEMS) device including a substrate; at least one semiconductor layer provided on the substrate; a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer; a support structure attached to the substrate; at least one elastic device attached to the support structure; a proof-mass suspended by the at least one elastic device and free to move in at least one of the x-, y-, and z-directions; at least one top electrode provided on the at least one elastic device; and at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes, wherein the drive/sense circuitry, proof-mass, supporting structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer.Type: GrantFiled: December 18, 2006Date of Patent: January 5, 2010Assignee: Akustica, Inc.Inventors: Brett M. Diamond, Matthew A. Zeleznik, Jan E. Vandemeer, Kaigham J. Gabriel
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Publication number: 20080142914Abstract: Provided is a micro-electromechanical-system (MEMS) device including a substrate; at least one semiconductor layer provided on the substrate; a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer; a support structure attached to the substrate; at least one elastic device attached to the support structure; a proof-mass suspended by the at least one elastic device and free to move in at least one of the x-, y-, and z-directions; at least one top electrode provided on the at least one elastic device; and at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes, wherein the drive/sense circuitry, proof-mass, supporting structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer.Type: ApplicationFiled: December 18, 2006Publication date: June 19, 2008Inventors: Brett M. Diamond, Matthew A. Zeleznik, Jan E. Vandemeer, Kaigham J. Gabriel
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Publication number: 20070278601Abstract: A MEMS device includes a chip carrier having an acoustic port extending from a first surface to a second surface of the chip carrier, a MEMS die disposed on the chip carrier to cover the acoustic port at the first surface of the chip carrier, and an enclosure bonded to the chip carrier and encapsulating the MEMS die.Type: ApplicationFiled: June 5, 2006Publication date: December 6, 2007Inventors: Jason P. Goodelle, Kaigham J. Gabriel
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Patent number: 7223366Abstract: A micro-electro-mechanical system (MEMS) device is described having a membrane which can be induced to resonate and the frequency of its resonance can be monitored. Chemical moieties can be attached to the membrane, and these moieties can be selected such that they have an affinity for molecules of interest, especially biological molecules of interest. When molecules of interest bind to the moieties they increase the mass of the membrane and thereby change the frequency of the membrane's resonance. By monitoring the resonance one can obtain an indication of the presence of the molecules of interest and in some circumstances an indication of the approximate concentration of these molecules. In addition, several types of moieties having affinities for several different molecules of interest can be placed on the membrane in such a way that the sensor can detect the presence of several different types of molecules of interest and distinguish which ones may be present and which ones may be absent.Type: GrantFiled: November 6, 2003Date of Patent: May 29, 2007Assignee: Carnegie Mellon UniversityInventors: Steinar Hauan, John J. Neumann, Jr., Todd M. Przybycien, Michael Bartkovsky, Kaigham J. Gabriel
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Patent number: 7215527Abstract: An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS (microelectromechanical systems) semiconductor fabrication process. The curling of the diaphragm during fabrication is reduced by depositing the micromachined membrane for the diaphragm in a serpentine-spring configuration with alternating longer and shorter arms. As a microspeaker, the acoustic transducer of the present invention converts a digital audio input signal directly into a sound wave, resulting in a very high quality sound reproduction at a lower cost of production in comparison to conventional acoustic transducers. The micromachined diaphragm may also be used in microphone applications.Type: GrantFiled: September 20, 2004Date of Patent: May 8, 2007Assignee: Carnegie Mellon UniversityInventors: John J. Neumann, Jr., Kaigham J. Gabriel
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Patent number: 7202101Abstract: The present invention is directed to a structure comprised of alternating layers of metal and sacrificial material built up using standard CMOS processing techniques, a process for building such a structure, a process for fabricating devices from such a structure, and the devices fabricated from such a structure. In one embodiment, a first metal layer is carried by a substrate. A first sacrificial layer is carried by the first metal layer. A second metal layer is carried by the sacrificial layer. The second metal layer has a portion forming a micro-machined metal mesh. When the portion of the first sacrificial layer in the area of the micro-machined metal mesh is removed, the micro-machined metal mesh is released and suspended above the first metal layer a height determined by the thickness of the first sacrificial layer. The structure may be varied by providing a base layer of sacrificial material between the surface of the substrate and the first metal layer.Type: GrantFiled: July 30, 2004Date of Patent: April 10, 2007Assignee: Akustica, Inc.Inventors: Kaigham J. Gabriel, Xu Zhu
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Patent number: 7130802Abstract: The present invention provides a process and a system for matching buyers and sellers of goods and/or services for a project. The invention enables a buyer to specify a project in terms of physical, functional, temporal, financial, and/or transactional parameters (102) which are then automatically converted, by the present invention, into at least one request for goods/services (104) needed to complete the project. The requests are suitably provided to at least one seller, who may be pre-identified by the buyer as a preferred seller. Upon receiving a request, the seller may submit a response to the request, as desired. Additionally, the invention provides a forum for the negotiation of any agreemments and the formation of contracts to provide the requested, or alternative goods/services (106).Type: GrantFiled: October 2, 2000Date of Patent: October 31, 2006Assignee: NineSigma, Inc.Inventors: Mehran Mehregany, Kaigham J. Gabriel
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Patent number: 7049051Abstract: The present invention describes a processes that builds an acoustic cavity, a chamber, and vent openings for acoustically connecting the chamber with the acoustic cavity. The dry etch processes may include reactive ion etches, which include traditional parallel plate RIE dry etch processes, advanced deep and inductively coupled plasma RIE processes. Three embodiments for connecting the chamber to the cavity from the top side of the substrate, e.g. by using pilot openings formed using at least a portion of the mesh as an etch mask, by forming the vent openings using at least a portion of the mesh as an etch mask, or by having the chamber intersect the vent openings as the chamber is being formed, illustrate how the disclosed process may be modified. By forming the cavity on the back side of the substrate, the depth of the vent holes is decreased. Additionally, using at least a portion of the micro-machined mesh as an etch mask for the vent holes makes the process self-aligning.Type: GrantFiled: January 23, 2003Date of Patent: May 23, 2006Assignee: Akustica, Inc.Inventors: Kaigham J. Gabriel, Xu Zhu
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Patent number: 7019955Abstract: An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS (microelectromechanical systems) semiconductor fabrication process. The curling of the diaphragm during fabrication is reduced by depositing the micromachined membrane for the diaphragm in a serpentine-spring configuration with alternating longer and shorter arms. As a microspeaker, the acoustic transducer of the present invention converts a digital audio input signal directly into a sound wave, resulting in a very high quality sound reproduction at a lower cost of production in comparison to conventional acoustic transducers. The micromachined diaphragm may also be used in microphone applications.Type: GrantFiled: February 18, 2004Date of Patent: March 28, 2006Assignee: Carnegie Mellon UniversityInventors: Wayne A. Loeb, John J. Neumann, Jr., Kaigham J. Gabriel
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Patent number: 6943448Abstract: The present invention is directed to a structure comprised of alternating layers of metal and sacrificial material built up using standard CMOS processing techniques, a process for building such a structure, a process for fabricating devices from such a structure, and the devices fabricated from such a structure. In one embodiment, a first metal layer is carried by a substrate. A first sacrificial layer is carried by the first metal layer. A second metal layer is carried by the sacrificial layer. The second metal layer has a portion forming a micro-machined metal mesh. When the portion of the first sacrificial layer in the area of the micro-machined metal mesh is removed, the micro-machined metal mesh is released and suspended above the first metal layer a height determined by the thickness of the first sacrificial layer. The structure may be varied by providing a base layer of sacrificial material between the surface of the substrate and the first metal layer.Type: GrantFiled: January 23, 2003Date of Patent: September 13, 2005Assignee: Akustica, Inc.Inventors: Kaigham J. Gabriel, Xu Zhu
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Patent number: 6829131Abstract: An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS (microelectromechanical systems) semiconductor fabrication process. The curling of the diaphragm during fabrication is reduced by depositing the micromachined membrane for the diaphragm in a serpentine-spring configuration with alternating longer and shorter arms. As a microspeaker, the acoustic transducer of the present invention converts a digital audio input signal directly into a sound wave, resulting in a very high quality sound reproduction at a lower cost of production in comparison to conventional acoustic transducers. The micromachined diaphragm may also be used in microphone applications.Type: GrantFiled: September 13, 1999Date of Patent: December 7, 2004Assignee: Carnegie Mellon UniversityInventors: Wayne A. Loeb, John J. Neumann, Jr., Kaigham J. Gabriel
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Publication number: 20040197227Abstract: A micro-electro-mechanical system (MEMS) device is described having a membrane which can be induced to resonate and the frequency of its resonance can be monitored. Chemical moieties can be attached to the membrane, and these moieties can be selected such that they have an affinity for molecules of interest, especially biological molecules of interest. When molecules of interest bind to the moieties they increase the mass of the membrane and thereby change the frequency of the membrane's resonance. By monitoring the resonance one can obtain an indication of the presence of the molecules of interest and in some circumstances an indication of the approximate concentration of these molecules. In addition, several types of moieties having affinities for several different molecules of interest can be placed on the membrane in such a way that the sensor can detect the presence of several different types of molecules of interest and distinguish which ones may be present and which ones may be absent.Type: ApplicationFiled: November 6, 2003Publication date: October 7, 2004Inventors: Steinar Hauan, John J. Neumann, Todd M. Przybycien, Michael Bartkovsky, Kaigham J. Gabriel
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Publication number: 20040145056Abstract: The present invention is directed to a structure comprised of alternating layers of metal and sacrificial material built up using standard CMOS processing techniques, a process for building such a structure, a process for fabricating devices from such a structure, and the devices fabricated from such a structure. In one embodiment, a first metal layer is carried by a substrate. A first sacrificial layer is carried by the first metal layer. A second metal layer is carried by the sacrificial layer. The second metal layer has a portion forming a micro-machined metal mesh. When the portion of the first sacrificial layer in the area of the micro-machined metal mesh is removed, the micro-machined metal mesh is released and suspended above the first metal layer a height determined by the thickness of the first sacrificial layer. The structure may be varied by providing a base layer of sacrificial material between the surface of the substrate and the first metal layer.Type: ApplicationFiled: January 23, 2003Publication date: July 29, 2004Inventors: Kaigham J. Gabriel, Xu Zhu
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Publication number: 20040146810Abstract: The present invention describes a processes that builds an acoustic cavity, a chamber, and vent openings for acoustically connecting the chamber with the acoustic cavity. The dry etch processes may include reactive ion etches, which include traditional parallel plate RIE dry etch processes, advanced deep and inductively coupled plasma RIE processes. Three embodiments for connecting the chamber to the cavity from the top side of the substrate, e.g. by using pilot openings formed using at least a portion of the mesh as an etch mask, by forming the vent openings using at least a portion of the mesh as an etch mask, or by having the chamber intersect the vent openings as the chamber is being formed, illustrate how the disclosed process may be modified. By forming the cavity on the back side of the substrate, the depth of the vent holes is decreased. Additionally, using at least a portion of the micro-machined mesh as an etch mask for the vent holes makes the process self-aligning.Type: ApplicationFiled: January 23, 2003Publication date: July 29, 2004Inventors: Kaigham J. Gabriel, Xu Zhu
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Publication number: 20030210799Abstract: A direct digital microphone is constructed of a plurality of first membranes each formed by a micro-machined mesh supported by a substrate. Each of the membranes has a first and a second position. A second membrane is supported by the substrate and positioned above the plurality of first membranes to form a chamber between the plurality of first membranes and the second membrane. A pressure sensor is responsive to pressure in the chamber. Drive electronics are responsive to the pressure sensor for controlling the positions of each of the plurality of first membranes. Output electronics are responsive to the positions of the plurality of first membranes to produce a digital output signal. A stacked membrane structure and methods of fabrication and operation are also disclosed.Type: ApplicationFiled: May 10, 2002Publication date: November 13, 2003Inventors: Kaigham J. Gabriel, Xu Zhu, Huikai Xie