Abstract: Disclosed is a plane grating calibration system, comprising an optical subsystem, a frame, first vibration isolator, a vacuum chuck, a workpiece stage, second vibration isolator, a base platform and a controller; the optical subsystem is mounted on the frame, and the frame is isolated from vibration by the first vibration isolator; the vacuum chuck is rotatably mounted on the workpiece stage, the workpiece stage is positioned on the base platform, and the base platform is isolated from vibration by the second vibration isolator. A displacement interferometer is integrated into the optical subsystem, and the entire optical subsystem adopts a method of sharing a light source, thereby avoiding the problems of low wavelength precision and poor coherence of separate light sources.

Abstract: An improved process having the steps of forming a low organic slurry in a mixer, pumping the low organic slurry to a spray drying tower, spraying the low organic slurry in the spray drying tower, drying the low organic slurry in the spray drying tower to form a low organic granule, and processing the low organic granule to form a detergent composition. The low organic slurry contains less than about 10%, by weight of the low organic slurry, of an organic material.