Abstract: Tunable, bio-functionalized, nanoelectromechanical systems (Bio-NEMS), micromechanical resonators (MRs), nanomechanical resonators (NRs), surface acoustic wave resonators, and bulk acoustic wave resonators having superhydrophobic surfaces for use in aqueous biochemical solutions. The MRs, NRs or Bio-NEMS include a system resonator that can vibrate or oscillate at a relatively high frequency and to which an analyte molecule(s) contained in the solution ? can attach or upon which small molecular-scale forces can act; a device for adjusting a relaxation time of the solution, to increase the quality (Q-factor) of the resonator inside the solution, to reduce energy dissipation into the solution; and a device for detecting a frequency shift in the resonator due to the analyte molecule(s) or applied molecular-scale forces.

Abstract: The invention relates to the application of the techniques of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. A pulsed flux of atoms is adsorbed onto the surface of a 32.8 MHz nanomechanical resonator within an ultrahigh vacuum environment. The mass-induced frequency shifts from these adsorbates are then used to demonstrate a mass sensitivity of ˜1.46×106 Daltons (Da). For resonators operating up to frequencies of 72 MHz, inverse mass responsivities as small as ˜8×10−20 grams/Hz (5×104 Da/Hz) are obtained. Our results offer a new approach to ultrahigh resolution mass spectrometry of individual, electrically-neutral macromolecules with clear prospects for single Dalton sensitivity.

Abstract: The invention relates to the application of the techniques of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. A pulsed flux of atoms is adsorbed onto the surface of a 32.8 MHz nanomechanical resonator within an ultrahigh vacuum environment. The mass-induced frequency shifts from these adsorbates are then used to demonstrate a mass sensitivity of ˜1.46×106 Daltons (Da). For resonators operating up to frequencies of 72 MHz, inverse mass responsivities as small as ˜8×10−20 grams/Hz (5×104 Da/Hz) are obtained. Our results offer a new approach to ultrahigh resolution mass spectrometry of individual, electrically-neutral macromolecules with clear prospects for single Dalton sensitivity.