Patents by Inventor Kaname Takahashi
Kaname Takahashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8969828Abstract: This invention stabilizes positioning and provides improved positioning accuracy in a scanning electron microscope provided with stage-driving means utilizing an effect of rolling friction. In this scanning electron microscope that includes a sample stage equipped with an x-table, a y-table, a z-table, a rotation table, and a tilting table, and moved by means of stepping motors each connected to a ball screw via a coupling, a sliding friction element is disposed at a position close to the ball screw, between the x-table and the y-table and between a tilting base and the x-table.Type: GrantFiled: May 11, 2011Date of Patent: March 3, 2015Assignee: Hitachi High-Technologies CorporationInventors: Naoki Sakamoto, Kaname Takahashi, Shigeru Haneda, Shinsuke Kawanishi
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Patent number: 8907303Abstract: In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.Type: GrantFiled: June 6, 2012Date of Patent: December 9, 2014Assignee: Hitachi High-Technologies CorporationInventors: Yasuyuki Momoi, Kaname Takahashi, Shigeru Haneda
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Publication number: 20140117251Abstract: In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.Type: ApplicationFiled: June 6, 2012Publication date: May 1, 2014Inventors: Yasuyuki Momoi, Kaname Takahashi, Shigeru Haneda
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Publication number: 20130082190Abstract: Fluctuation in speed when a stage with a sample mounted thereon is moved at low speed is reduced such that an image to be observed is moved at constant speed when performing high-magnification observation using a scanning electron microscope. A control amount is obtained by compensation means from the deviation between position information obtained from position information detected by position detection means through a first low-pass filter and a command value obtained by integrating a speed command value input from stage operation input means and through a second low-pass filter having the same frequency characteristic as the first low-pass filter, and a driving signal to be output to driving means is generated from the added value of the control amount and the speed command value by waveform output means.Type: ApplicationFiled: June 15, 2011Publication date: April 4, 2013Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Yasuyuki Momoi, Koichiro Tekeuchi, Kaname Takahashi, Shigeru Haneda
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Publication number: 20130056636Abstract: Sample drift in a scanning electron microscope is suppressed which is caused by a change in room temperature or associated with operation of motors for driving a sample stage. Supply currents to the motors during movement of the sample and a stop of the sample movement are controlled so that the supply currents have the same level or so that a maximum difference in level between the supply currents is 20%. This lessens any changes in the amounts of heat generated by the motors, thereby reducing sample drift during observation.Type: ApplicationFiled: May 11, 2011Publication date: March 7, 2013Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Shigeru Haneda, Kaname Takahashi, Naoki Sakamoto, Shinsuke Kawanishi
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Publication number: 20130048854Abstract: This invention stabilizes positioning and provides improved positioning accuracy in a scanning electron microscope provided with stage-driving means utilizing an effect of rolling friction. In this scanning electron microscope that includes a sample stage equipped with an x-table, a y-table, a z-table, a rotation table, and a tilting table, and moved by means of stepping motors each connected to a ball screw via a coupling, a sliding friction element is disposed at a position close to the ball screw, between the x-table and the y-table and between a tilting base and the x-table.Type: ApplicationFiled: May 11, 2011Publication date: February 28, 2013Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Naoki Sakamoto, Kaname Takahashi, Shigeru Haneda, Shinsuke Kawanishi
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Patent number: 7964845Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.Type: GrantFiled: October 20, 2008Date of Patent: June 21, 2011Assignee: Hitachi High-Technologies CorporationInventors: Yuusuke Tanba, Mitsugu Sato, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto, Akinari Morikawa
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Patent number: 7891482Abstract: The object of the present invention is to improve the productivity and make the assembling operation easier in a carrier apparatus for carrying a work while performing an assembling operation by making effective use of an inside region, even in the case where a conveyor line is provided in the form of a circling route. In a free flow type conveyor line (1) in which a work is loaded on a pallet (2) having a floor surface which travels substantially at the same level as a floor surface (5) for operation, a horizontal curved section (3) is provided in a section of the line (1), and the pallet (2) is divided into a first, a second and a third divided pallet elements (2A, 2B, 2C) in the carrying direction.Type: GrantFiled: October 6, 2006Date of Patent: February 22, 2011Assignee: Honda Motor Co., Ltd.Inventors: Kaname Takahashi, Yoshiharu Hatsusaka, Mikiya Fukuda
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Publication number: 20090133989Abstract: (Object) The object of the present invention is to improve the productivity and make the assembling operation easier in a carrier apparatus for carrying a work while performing an assembling operation by making effective use of an inside region, even in the case where a conveyor line is provided in the form of a circling route. (Means of Solution) In a free flow type conveyor line (1) in which a work is loaded on a pallet (2) having a floor surface which travels substantially at the same level as a floor surface (5) for operation, a horizontal curved section (3) is provided in a section of the line (1), and the pallet (2) is divided into a first, a second and a third divided pallet elements (2A, 2B, 2C) in the carrying direction.Type: ApplicationFiled: October 6, 2006Publication date: May 28, 2009Inventors: Kaname Takahashi, Yoshiharu Hatsusaka, Mikiya Fukuda
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Publication number: 20090060693Abstract: Provided is a working device wherein an operator is not required to enter a working area (K) of a robot (11) surrounded by a protection fence (21). The working device is provided with a tray (43) for placing a second work piece (18). The second work piece is placed on the tray (43) and transferred from inside to the outside of the protection fence.Type: ApplicationFiled: February 20, 2007Publication date: March 5, 2009Applicant: HONDA MOTORS CO., LTD.Inventors: Kaname Takahashi, Yoshiharu Hatsusaka, Katsuhiko Ebisawa
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Publication number: 20090050803Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.Type: ApplicationFiled: October 20, 2008Publication date: February 26, 2009Inventors: Yuusuke Tanba, Mitsugu Sato, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto, Akinari Morikawa
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Patent number: 7456403Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.Type: GrantFiled: October 3, 2005Date of Patent: November 25, 2008Assignee: Hitachi High-Technologies CorporationInventors: Yuusuke Tanba, Mitsugu Sato, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto
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Publication number: 20070235645Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.Type: ApplicationFiled: October 3, 2005Publication date: October 11, 2007Inventors: Yuusuke Tanba, Mitsugu Sato, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto
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Patent number: 6963069Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.Type: GrantFiled: January 30, 2004Date of Patent: November 8, 2005Assignee: Hitachi High-Technologies CorporationInventors: Yuusuke Tanba, Mitsugu Sato, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto, Akinari Morikawa
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Publication number: 20040238752Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.Type: ApplicationFiled: January 30, 2004Publication date: December 2, 2004Inventors: Yuusuke Tanba, Mitsugu Sato, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto, Akinari Morikawa
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Patent number: 6403968Abstract: Oil from an oil source is introduced into an inside of a reciprocal oil hydraulic pressure cylinder through a port, and a lock shaft is pushed against a lock plate by the oil pressure to restrict movement of a tilt table. A cylindrical portion made of a material having a large friction coefficient to the lock plate is attached to a top end of the lock shaft so as to contact with the lock plate in a surface contact state. Releasing of stage locking is performed by introducing the oil into the inside of the reciprocal oil hydraulic pressure cylinder through another port to draw back the lock shaft by the oil pressure. Thereby, the stiffness of the sample stage lock mechanism in the x-direction becomes large and the friction force in the y- and z-directions also becomes large. Therefore, vibration of the tilt table in the x-, y- and z-directions can be effectively suppressed.Type: GrantFiled: July 2, 1999Date of Patent: June 11, 2002Assignee: Hitachi, Ltd.Inventors: Eiichi Hazaki, Masaki Kurihara, Kaname Takahashi