Abstract: A flow rate signal correction method applicable to a pressure-type flow rate control device that controls a flow rate by controlling pressure existing upstream of a restriction part includes a step of generating a primary signal indicating the flow rate in accordance with an output of a pressure sensor provided upstream of the restriction part and a step of generating a secondary signal as a corrected signal of the primary signal such that the current value of the primary signal and a value including information regarding one or a plurality of past values of the primary signal are used to derive a current value corrected according to a predetermined relational expression. The secondary signal is output as a flow rate signal during a stable flow rate period, and the secondary signal is not output as a flow rate signal during a transient change period.

Abstract: The pressure-type flow rate control device includes: a restriction part interposed in a flow channel; an upstream-side pressure sensor detecting a fluid pressure on the upstream side of the restriction part; a downstream-side pressure sensor detecting a fluid pressure on the downstream side of the restriction part; a flow control valve provided in the flow channel on the upstream side of the upstream-side pressure sensor; and computation control circuit controlling the flow control valve based on detected values of the upstream-side pressure sensor and the downstream-side pressure sensor, thereby controlling the flow. Under conditions where no fluid flow occurs in the flow channel, the computation control circuit computes the difference between the detected value of the upstream-side pressure sensor and the detected value of the downstream-side pressure sensor, and outputs a signal for pressure sensor malfunction determination based on the computed difference.

Abstract: A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m (P1-P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.

Abstract: A vaporization supply apparatus comprises a vaporizer which heats and vaporize a liquid, a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer, a first control valve interposed in a supply channel of a liquid to the vaporizer, a pressure detector for detecting a pressure of a gas vaporized by the vaporizer, a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and a control device which controls the first control valve to supply a predetermined amount of a liquid to the vaporizer based on the pressure value detected by the pressure detector, and to close the first control valve when the liquid detection part detect a liquid in an amount higher than the predetermined amount.

Abstract: A pressure type flow control system with flow monitoring includes an inlet side passage, a control valve comprising a pressure-type flow control unit connected downstream of the inlet side passage, a thermal-type flow sensor connected downstream of the control valve, an orifice installed on a fluid passage connected downstream of the thermal-type flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet side passage connected to the orifice, and a control unit comprising a pressure-type flow rate arithmetic and control unit to which a pressure signal from the pressure sensor and a temperature signal from the temperature sensor are input, and which computes a flow rate value of fluid flowing through the orifice, and outputs a control signal to a valve drive unit of the control valve.

Abstract: The pressure-type flow control device includes: a main body provided with a fluid channel communicating between a fluid inlet and a fluid outlet and an exhaust channel communicating between the fluid channel and an exhaust outlet; a pressure control valve fixed to a fluid inlet side of the main body for opening or closing the upstream side of the fluid channel; a first pressure sensor for detecting the internal pressure of the fluid channel on the downstream side of the control valve; an orifice provided in the fluid channel on the downstream side of the point of branching of the exhaust channel; an on/off valve for opening or closing the fluid channel on the downstream side of the first pressure sensor; and an exhaust valve for opening or closing the exhaust channel.

Abstract: [Problem] To provide a liquid level indicator and a liquid raw material vaporization feeder, in which the time to detect a switch from the liquid phase to the gas phase has reduced flow rate dependence, and also the detection time can be shortened. [Means for Resolution] The present invention includes a chamber 2 that stores a liquid raw material, at least one protection tube 3 housing a resistance temperature detector for detecting the liquid level L1 in the chamber 2, and a flow controller 4 that controls the flow rate of the gas flowing out from the chamber 2 and feeds the same. The protection tube 3 is horizontally inserted into a sidewall 2a of the chamber 2 and fixed thereto.

Abstract: A liquid level meter includes a first resistive temperature detector; a first temperature measuring body a liquid level detection section a temperature detection section detecting the temperatures of the first resistive temperature detector and the first temperature measuring body; a current control section determining a value of a current to apply to the first resistive temperature detector such that a difference between the temperatures of the first resistive temperature detector and the first temperature measuring body detected by the temperature detection section to be a first constant value; and a power supply unit supplying a current of the determined current value to the first resistive temperature detector; wherein the liquid level detection section determines whether the first resistive temperature detector is present in a liquid or outside of the liquid using the value of the current applied to the first resistive temperature detector.

Abstract: A piezoelectric element-driven valve includes a body provided with a fluid channel and a valve seat, a valve element which opens and closes the fluid channel by being in contact with and separated from the valve seat of the body, and piezoelectric actuators which drive the valve element to open and close by means of the extension of the piezoelectric element. In the piezoelectric element-driven valve, at least two piezoelectric actuators are arranged on a straight line via a spacer which allows pulling out of wiring.

Abstract: A multi-hole orifice plate for flow control includes an orifice plate for controlling the flow rate of a fluid, wherein the opening area of one orifice necessary for the passage of a predetermined flow rate of fluid is divided to provide a plurality of orifices having a total opening area equal to said opening area.

Abstract: A pressure type flow control system with flow monitoring includes an inlet, a control valve including a pressure flow control unit connected downstream of the inlet, a thermal flow sensor connected downstream of the control valve, an orifice installed on a fluid passage communicatively connected downstream of the thermal flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet communicatively connected to the orifice, and a control unit including a pressure type flow rate arithmetic and control unit receiving a pressure signal from the pressure sensor and a temperature signal from the temperature sensor, and a flow sensor control unit to which a flow rate signal from the thermal flow sensor is input.

Abstract: The pressure-type flow controller includes a main body provided with a fluid passage, a control valve for pressure control fixed in a horizontal position to the main body, an on/off valve fixed in a vertical position to the main body on the downstream side of the control valve for pressure control, an orifice provided in the fluid passage on the upstream side of the on/off valve, and a pressure sensor fixed to the main body for detecting the internal pressure of the fluid passage between the control valve for pressure control and the orifice. The fluid passage includes a first passage portion in a horizontal position connected to the control valve for pressure control, a second passage portion in a vertical position connecting the first passage portion to the orifice, and a third passage portion in a horizontal position connecting the second passage portion to the pressure sensor.

Abstract: A pressure type flow control system with flow monitoring includes an inlet, a control valve including a pressure flow control unit connected downstream of the inlet, a thermal flow sensor connected downstream of the control valve, an orifice installed on a fluid passage communicatively connected downstream of the thermal flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet communicatively connected to the orifice, and a control unit including a pressure type flow rate arithmetic and control unit receiving a pressure signal from the pressure sensor and a temperature signal from the temperature sensor, and a flow sensor control unit to which a flow rate signal from the thermal flow sensor is input.

Abstract: An apparatus able to regulate a raw material concentration, in a mixed gas of carrier gas and raw material gas, accurately and stably to supply the mixed gas to a process chamber, with a flow rate controlled highly accurately, thereby detecting a vapor concentration of the raw material gas in the mixed gas easily and highly accurately and displaying the concentration in real time without using an expensive concentration meter, etc.

Abstract: A raw material gas supply apparatus includes a liquid raw material gas supply source, a source tank storing liquid raw material, a gas distribution passage through which raw material gas comprising steam of the liquid raw material is supplied to a process chamber from the source tank, an automatic pressure regulator installed on an upstream side of the gas passage, wherein the automatic pressure regulator keeps supply pressure of the raw material gas at a set value, a supply gas switching valve installed on a downstream side of the gas passage, wherein this valve opens and closes the gas passage, an orifice provided on at least one of an inlet side or outlet side of the valve, wherein the orifice regulates flow rate of the raw material gas, and a constant temperature heating device heats the source tank, the gas passage, the valve and the orifice to a set temperature.

Abstract: A pressure type flow control system with flow monitoring includes an inlet side passage, a control valve comprising a pressure-type flow control unit connected downstream of the inlet side passage, a thermal-type flow sensor connected downstream of the control valve, an orifice installed on a fluid passage connected downstream of the thermal-type flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet side passage connected to the orifice, and a control unit comprising a pressure-type flow rate arithmetic and control unit to which a pressure signal from the pressure sensor and a temperature signal from the temperature sensor are input, and which computes a flow rate value of fluid flowing through the orifice, and outputs a control signal to a valve drive unit of the control valve.

Abstract: A pressure-type flow rate controller includes a body provided with a fluid passage which communicates a fluid inlet and a fluid outlet, a control valve for pressure control fixed to the body to open and close the fluid passage, an orifice arranged in the course of the fluid passage on the downstream side of the control valve, and a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve and the orifice, wherein the fluid passage comprises a first passage portion communicating the control valve and a pressure detection chamber provided on a pressure detection surface of the pressure sensor, and a second passage portion spaced away from the first passage portion and communicating the pressure detection chamber and the orifice.

Abstract: A pressure type flow control system with flow monitoring includes an inlet side passage, a control valve comprising a pressure-type flow control unit connected downstream of the inlet side passage, a thermal-type flow sensor connected downstream of the control valve, an orifice installed on a fluid passage connected downstream of the thermal-type flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet side passage connected to the orifice, and a control unit comprising a pressure-type flow rate arithmetic and control unit to which a pressure signal from the pressure sensor and a temperature signal from the temperature sensor are input, and which computes a flow rate value of fluid flowing through the orifice, and outputs a control signal to a valve drive unit of the control valve.

Abstract: The pressure-type flow control device includes: a main body provided with a fluid channel communicating between a fluid inlet and a fluid outlet and an exhaust channel communicating between the fluid channel and an exhaust outlet; a pressure control valve fixed to a fluid inlet side of the main body for opening or closing the upstream side of the fluid channel; a first pressure sensor for detecting the internal pressure of the fluid channel on the downstream side of the control valve; an orifice provided in the fluid channel on the downstream side of the point of branching of the exhaust channel; an on/off valve for opening or closing the fluid channel on the downstream side of the first pressure sensor; and an exhaust valve for opening or closing the exhaust channel.

Abstract: A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m(P1?P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.