Patents by Inventor Kaoru Tanabe

Kaoru Tanabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Boat for carrying semiconductor substrates
    Patent number: 4389967
    Abstract: In a boat with wheels for carrying semiconductor substrates, the friction surfaces of the wheel systems are coated with a silicon nitride film to prevent seizure from occurring during a diffusion, oxidation or annealing process for semiconductor substrates.
    Type: Grant
    Filed: January 11, 1981
    Date of Patent: June 28, 1983
    Assignee: Fujitsu Limited
    Inventors: Haruo Shimoda, Kaoru Tanabe
  • Process for producing epitaxial layers
    Patent number: 4263087
    Abstract: Epitaxial layers are formed by introducing a reaction gas mixture into a reaction vessel in which semiconductor substrates are located, under a pressure of not higher than 1333 Pa (10 Torr), and heating said semiconductor substrates by high frequency induction power so that layers grow epitaxially on said semiconductor substrates. The frequency f of high frequency power is not higher than 50 kHz, and the pressure P in said reaction vessel is maintained in the following range ##STR1## wherein, P is the pressure in units of Pa or Torr in the reaction vessel and f is the frequency in kHz of said high frequency power.
    Type: Grant
    Filed: February 11, 1980
    Date of Patent: April 21, 1981
    Assignee: Fujitsu Limited
    Inventors: Kaoru Tanabe, Yoshifumi Nomura, Mamoru Maeda, Mikio Takagi