Abstract: A holder is disclosed for a cassette for substrates. The holder includes a base plate on which a guide member provided with at least two guides is secured. The cassette is to be positioned between the guides, which enable the cassette to be aligned with respect to the base plate, and the side of which facing the base plate tapers inwards and downwards. The application of such a holder in an apparatus for manufacturing semiconductor devices is still hampered as a result of incorrectly positioning the holder in the apparatus. This can lead to damage to the substrates and a lower yield of the manufacturing process. The side of the guide member tapers inwards and upwards. By virtue of this structure, the cassette can be positioned more accurately and reproducibly into the holder. In this way, damage to substrates is avoided and the yield is high. The guide member may be mirror symmetrical and can include two separate guide members, which are mirror symmetrical as well.

Abstract: The invention relates to a holder (10) for a cassette (1) for substrates (2), comprising a base plate (3) on which a guide member (4) provided with at least two guides (5) is secured. The cassette (1) is to be positioned between the guides (5), which enable the cassette (1) to be aligned with respect to the base plate (3), and the side (6) of which facing the base plate (3) tapers inwards and downwards. The application of such a holder (10) in an apparatus for manufacturing semiconductor devices is still hampered as a result of incorrectly positioning the holder (10) in said apparatus, leading to damage to the substrates (2) and a lower yield of the manufacturing process.