Abstract: Carbon dioxide can be separated from gas streams using ion exchange, such as in an electrochemical cell. An anion exchange membrane can be configured to increase the efficiency of the system and to permit the flow of the carbon-containing ions within the system while reducing diffusion of protons and/or hydroxyl ions. A gas stream containing carbon dioxide can be introduced to the system on the cathode side, while a source of hydrogen-containing molecules can be introduced on the anode side. Operation of the system can separate the carbon dioxide from the gas stream and provide it at a separate outlet.

Abstract: A layered structure can be formed having immobilized or segregated pH buffering groups that can be used to separate carbon dioxide or other gases. The pH buffering groups can be immobilized within a matrix, confined within a gel, or segregated by a semi-permeable membrane. The pH buffering groups can be configured to increase the efficiency of the system by maintaining a desirable pH profile within the cell and to permit the flow of the carbon-containing ions within the system while controlling diffusion of protons and/or hydroxyl ions.

Abstract: Carbon dioxide or other gases can be separated from gas streams using ionic liquid, such as in an electrochemical cell. For example, a membrane can contain sufficient ionic liquid to reduce ionic current density of at least one of protons and hydroxyl ions, relative to carbon-containing ionic current density. A gas stream containing carbon dioxide can be introduced on a cathode side, while a source of hydrogen gas can be introduced on the anode side of the membrane. Operation of an electrochemical cell with such a membrane can separate the carbon dioxide from the gas stream and provide it at a separate outlet.

Abstract: A layered structure can be formed having immobilized or segregated pH buffering groups that can be used to separate carbon dioxide or other gases. The pH buffering groups can be immobilized within a matrix, confined within a gel, or segregated by a semi-permeable membrane. The pH buffering groups can be configured to increase the efficiency of the system by maintaining a desirable pH profile within the cell and to permit the flow of the carbon-containing ions within the system while controlling diffusion of protons and/or hydroxyl ions.

Abstract: Ionic liquids can be immobilized in a membrane by, for example, bonding to a support such as a matrix, or by inclusion within a gel. Immobilized ionic liquids can be used in a number of applications, such as separation of carbon dioxide or other gases from gas streams. Membranes can be included in electrochemical cells. For example, a membrane can contain sufficient immobilized ionic liquid to reduce ionic current density of at least one of protons and hydroxyl ions, relative to carbon-containing ionic current density. A gas stream containing carbon dioxide can be introduced on a cathode side, while a source of hydrogen gas can be introduced on the anode side of the membrane. Operation of an electrochemical cell with such a membrane can separate the carbon dioxide from the gas stream and provide it at a separate outlet.

Abstract: A layered structure can be formed having immobilized or segregated pH buffering groups that can be used to separate carbon dioxide or other gases. The pH buffering groups can be immobilized within a matrix, confined within a gel, or segregated by a semi-permeable membrane. The pH buffering groups can be configured to increase the efficiency of the system by maintaining a desirable pH profile within the cell and to permit the flow of the carbon-containing ions within the system while controlling diffusion of protons and/or hydroxyl ions.

Abstract: Ionic liquids can be immobilized in a membrane by, for example, bonding to a support such as a matrix, or by inclusion within a gel. Immobilized ionic liquids can be used in a number of applications, such as separation of carbon dioxide or other gases from gas streams. Membranes can be included in electrochemical cells. For example, a membrane can contain sufficient immobilized ionic liquid to reduce ionic current density of at least one of protons and hydroxyl ions, relative to carbon-containing ionic current density. A gas stream containing carbon dioxide can be introduced on a cathode side, while a source of hydrogen gas can be introduced on the anode side of the membrane. Operation of an electrochemical cell with such a membrane can separate the carbon dioxide from the gas stream and provide it at a separate outlet.

Abstract: Carbon dioxide or other gases can be separated from gas streams using ionic liquid, such as in an electrochemical cell. For example, a membrane can contain sufficient ionic liquid to reduce ionic current density of at least one of protons and hydroxyl ions, relative to carbon-containing ionic current density. A gas stream containing carbon dioxide can be introduced on a cathode side, while a source of hydrogen gas can be introduced on the anode side of the membrane. Operation of an electrochemical cell with such a membrane can separate the carbon dioxide from the gas stream and provide it at a separate outlet.

Abstract: Carbon dioxide can be separated from gas streams using ion exchange, such as in an electrochemical cell. An anion exchange membrane can be configured to increase the efficiency of the system and to permit the flow of the carbon-containing ions within the system while reducing diffusion of protons and/or hydroxyl ions. A gas stream containing carbon dioxide can be introduced to the system on the cathode side, while a source of hydrogen-containing molecules can be introduced on the anode side. Operation of the system can separate the carbon dioxide from the gas stream and provide it at a separate outlet.

Abstract: A method for a multiple-stage microwave plasma cleaning technique for efficiently cleaning a substrate processing chamber. In a specific embodiment, a two-stage cleaning process is described. The first stage begins by flowing a reactive gas from a gas source into a processing chamber where microwaves ignite and maintain a plasma from the reactive gas. Reactive radicals generated which react with residues on the interior surfaces of the processing chamber. In the second stage, an inert gas is flowed into the processing chamber in addition to the reactive gas. Microwaves then ignite and maintain a plasma from the reactive gas and optionally, the inert gas as well. Optionally, an inert gas can be flowed into the processing chamber prior to the first stage to remove loose particles from the processing chamber. The reactive gas in such embodiments is preferably NF.sub.3, but other fluorine-containing gases such as carbon tetrafluoride (CF.sub.4) or sulfur hexafluoride (SF.sub.6) may also be used.

Abstract: Vacuum CVD chambers are disclosed which provide a more uniformly deposited thin film on a substrate. The chamber susceptor mount for the substrate is heated resistively with a single coil firmly contacting the metal of the susceptor on all sides, providing uniform temperatures across the susceptor mount for a substrate. A purge gas line is connected to openings in the susceptor outside of the periphery of the substrate to prevent edge and backside contamination of the substrate. A vacuum feed line mounts the substrate to the susceptor plate during processing. A refractory purge guide, or a plurality of placement pins, maintain a fixed gap passage for the purge gases to pass alongside the edge of the wafer and into the processing area of the chamber. An exhaust pumping plate improves the uniformity of exhaustion of spent gases from the chamber.

Abstract: A manifold for use in a chemical vapor deposition reactor, optimized for providing effective deposition on a substrate of a specific diameter. The manifold has upstream and downstream faces and is of substantially circular shape, with a central region of the downstream face being perforated by a plurality of upstream-directed bores. The central region is substantially larger than a circle of the specific wafer diameter for which the reactor is optimized. A centrally located plurality of the bores are through-bores or holes to the upstream face of the manifold that define a gas flow path from an upstream gas source to the wafer.

Abstract: Vacuum CVD chambers are disclosed which provide a more uniformly deposited thin film on a substrate. The chamber susceptor mount for the substrate is heated resistively with a single coil firmly contacting the metal of the susceptor on all sides, providing uniform temperatures across the susceptor mount for a substrate. A purge gas line is connected to openings in the susceptor outside of the periphery of the substrate to prevent edge and backside contamination of the substrate. A vacuum feed line mounts the substrate to the susceptor plate during processing. A refractory purge guide, or a plurality of placement pins, maintain a fixed gap passage for the purge gases to pass alongside the edge of the wafer and into the processing area of the chamber. An exhaust pumping plate improves the uniformity of exhaustion of spent gases from the chamber.