Abstract: A method and apparatus for practicing the method of sputtering target material onto a substrate by utilizing a cathode member of a sputtering apparatus, the cathode member having an exterior surface. The method comprises applying a liquid target material to a generally downwardly exposed surface portion of the exterior surface of the cathode member such that at least a portion of the liquid target material exhibits a generally downwardly exposed surface and positioning next to the surface of the cathode member the substrate for receiving target material sputtered from the liquid target material exhibiting a generally downwardly exposed surface.

Abstract: An improved method for making solar cells of the type wherein a thin film silicon hydrogen alloy structure is deposited upon a transparent zinc oxide conductive film. Before deposition of the TFS film, the zinc oxide film is treated with a glow discharge comprising oxygen.

Abstract: A photovoltaic cell of the thin film silicon p-i-n class in which a microcrystalline silicon film is used in place of the p or n region of the p-i-n structure and is simultaneously used as the corresponding current collecting film.