Patents by Inventor Karl H. Probst

Karl H. Probst has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for producing a multi-step structure in a substrate
    Patent number: 5635337
    Abstract: A structure of openings is produced in two or more layers of silylated, polyimide photoresist. Openings in subsequent layers, which overlap previous openings, are of larger size. Then the structure is transferred to an organic substrate using oxygen plasma etching with up to 3% CF.sub.4. The smallest opening transferred to the substrate extends through the substrate.
    Type: Grant
    Filed: May 5, 1993
    Date of Patent: June 3, 1997
    Assignee: International Business Machines
    Inventors: Johann Bartha, Johann Greschner, Karl H. Probst, Gerhard Schmid