Patents by Inventor Karl-Heinz TRIMBORN

Karl-Heinz TRIMBORN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10501847
    Abstract: In a device and a method for generating vapor in a CVD or PVD device, particles are vaporized by bringing the particles into contact with a first heat transfer surface of a vaporization device. The vapor generated by vaporizing the particles is transported by a carrier gas out of the vaporization device and into a single or multistage modulation device. In a vapor transfer phase, second heat transfer surfaces of the modulation device are adjusted to a first modulation temperature, at which the vapor passes through the modulation device without condensing on the second heat transfer surfaces. At an intermission phase, the second heat transfer surfaces are adjusted to a second modulation temperature, at which at least some of the vapor condenses on the second heat transfer surfaces.
    Type: Grant
    Filed: June 17, 2015
    Date of Patent: December 10, 2019
    Assignee: AIXTRON SE
    Inventors: Michael Long, Birgit Irmgard Beccard, Claudia Cremer, Karl-Heinz Trimborn, Andy Eichler, Andreas Poqué
  • Patent number: 10267768
    Abstract: A device and a method determines the concentration of a vapor in a volume, in particular for determining or controlling the mass flow of the vapor being conveyed through the volume by a carrier gas. The device comprises a sensor, which supplies a sensor signal that is dependent on the concentration or partial pressure of the vapor. The sensor has an oscillatory body that can be brought to oscillation, the oscillation frequency of which is influenced by a mass accumulation formed on a surface of the oscillating body by the condensed vapor. The oscillating body has a temperature control unit, by means of which the oscillating body can be brought to a temperature below the condensation temperature of the vapor. An evaluation unit determines the concentration or the partial pressure of the vapor from the temporal change of the oscillator frequency.
    Type: Grant
    Filed: February 23, 2015
    Date of Patent: April 23, 2019
    Assignee: AIXTRON SE
    Inventors: Birgit Irmgard Beccard, Claudia Cremer, Karl-Heinz Trimborn, Michael Long, Andy Eichler, Nael Al Ahmad
  • Publication number: 20180148836
    Abstract: In a device and a method for generating vapor in a CVD or PVD device, particles are vaporized by bringing the particles into contact with a first heat transfer surface of a vaporization device. The vapor generated by vaporizing the particles is transported by a carrier gas out of the vaporization device and into a single or multistage modulation device. In a vapor transfer phase, second heat transfer surfaces of the modulation device are adjusted to a first modulation temperature, at which the vapor passes through the modulation device without condensing on the second heat transfer surfaces. At an intermission phase, the second heat transfer surfaces are adjusted to a second modulation temperature, at which at least some of the vapor condenses on the second heat transfer surfaces.
    Type: Application
    Filed: June 17, 2015
    Publication date: May 31, 2018
    Inventors: Michael LONG, Birgit Irmgard BECCARD, Claudia CREMER, Karl-Heinz TRIMBORN, Andy EICHLER, Andreas POQUÉ
  • Patent number: 9942946
    Abstract: In a device for generating a vapor for a CVD or PVD apparatus, at least two thermal transfer bodies are arranged successively in the direction of flow of a carrier gas. The device also includes an inlet pipe for feeding an aerosol to one of the thermal transfer bodies for vaporization of the aerosol by bringing the aerosol particles into contact with thermal transfer surfaces of the thermal transfer body. At least one of the thermal transfer bodies has an opening for an inlet pipe that has a first flow channel for feeding the aerosol in and a second flow channel for feeding a carrier gas in. Gas passage openings are provided through which the carrier gas flows out of the second flow channel into the first flow channel. The second flow channel is sealed in the area of the mouth of the inlet pipe.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: April 10, 2018
    Assignee: AIXTRON SE
    Inventors: Michael Long, Andreas Poqué, Claudia Cremer, Birgit Irmgard Beccard, Karl-Heinz Trimborn
  • Publication number: 20170016859
    Abstract: A device and a method determines the concentration of a vapor in a volume, in particular for determining or controlling the mass flow of the vapor being conveyed through the volume by a carrier gas. The device comprises a sensor, which supplies a sensor signal that is dependent on the concentration or partial pressure of the vapor. The sensor has an oscillatory body that can be brought to oscillation, the oscillation frequency of which is influenced by a mass accumulation formed on a surface of the oscillating body by the condensed vapor. The oscillating body has a temperature control unit, by means of which the oscillating body can be brought to a temperature below the condensation temperature of the vapor. An evaluation unit determines the concentration or the partial pressure of the vapor from the temporal change of the oscillator frequency.
    Type: Application
    Filed: February 23, 2015
    Publication date: January 19, 2017
    Inventors: Birgit Irmgard BECCARD, Claudia CREMER, Karl-Heinz TRIMBORN, Michael LONG, Andy EICHLER, Nael AL AHMAD