Abstract: The invention concerns a drive device for the mechanical stage (1) of a microscope, said device having a stationary base plate (2) and slides (3, 4) which are disposed thereon, are movable in the X and Y directions and are used to position an object to be examined. Secured on each of the slides (3, 4) is a rack (5, 6) which is drivingly connected in each case to a drive pinion (7, 8). Two superimposed control knobs (9) are provided on the microscope mechanical stage (1) for manually manipulating the drive device. Disposed in each case between the control knobs (9) and the respective drive pinion (7, 8) is a transmission element in the form of a toothed belt (10, 11) which transmits the rotational movement at the control knobs (2) to the respective drive pinion (7, 8).

Abstract: A microscope with a C-shaped stand (1) for examining large-sized, disk-shaped objects (9), such as semiconductor wafers, comprises a base plate (2), a vertical portion (3) extending from the base plate, and a limb portion (4) extending forwardly from the top of the vertical portion. To achieve an ergonomic sitting position of an observer (B) and to be able to inspect the entire object surface, the vertical portion (3) has a forwardly opening slot-shaped recess (10) into which the object partially enters when it is at a rearmost position. The recess (10) is geometrically designed so as not to impair the stability of stand (1). In addition or as an alternative, a horizontally movable specimen stage (5) of the microscope includes a rearwardly opening recess (14) for partially receiving the vertical portion (3) when the stage is at its rearmost travel limit. The recess (14) may be U-shaped or specifically configured to correspond to the shape of the vertical portion (3 which it receives.