Abstract: A capacitive force sensor is comprised of a base (1) containing a capacitance electrode (3), a cover (8) containing a second capacitance electrode (9) and spacers (7) separating these two components. The material thickness of the base (1) and the cover (8) is such that when a force is applied at least one of the materials constituting the base (1), the cover (8) and the spacers (7) will be compressed to such a degree that a decrease in the distance between the capacitance electrodes (3,9) will result but the materials bridging the areas between the spacers (7) will not be deformed.

Abstract: A pressure sensor comprises a measuring capacitor, of which the measuring electrode (7) is insulatedly applied to a silicon membrane (3) and the counterelectrode (18) is insulatedly applied to a silicon disc (2). The measuring electrode (7) and the counterelectrode (18) are surrounded by shielding electrodes (11, 21). The shielding electrodes (11, 21), as well as the silicon discs (1), are fed with a shielding voltage of which the electrical potential is the same as that of the measurement electrode (7). The two silicon discs (1, 2) are mechanically interconnected by bump connections (25, 29, 31, 32).