Patents by Inventor Karsten Urban
Karsten Urban has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7152488Abstract: The invention concerns a system operating unit (30) having a column (3) that is attachable by way of at least two supports (9, 10) to different points of a system housing (14). In the preferred embodiment, this column is attached laterally to the housing, the supports serving for attachment to the housing of the system. In addition, a retaining bracket (4) is connected to the column (3) in such a way that a horizontal deflection of the retaining bracket (4) about a vertical axis is possible.Type: GrantFiled: May 26, 2004Date of Patent: December 26, 2006Assignee: Leica Microsystems Semiconductor GmbHInventors: Roland Hedrich, Karsten Urban, Joachim Wienecke
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Patent number: 6962471Abstract: The invention is based on a substrate conveying module (1) for conveying substrates into a workstation (3) for inspection, measurement, or processing of the substrates, in which on because of connecting elements (4a, b) in at least two side walls (1a, b, c) of the substrate conveying module (1) and/or in at least two side walls (3a, b, c, d) of the workstation (3), the substrate conveying module (1) can, at the installation location of the workstation (3), be flexibly connected thereto in different orientations with respect to the workstation (3) and/or can be coupled at different points to the workstation (3).Type: GrantFiled: June 14, 2001Date of Patent: November 8, 2005Assignee: Leica Microsystems Jena GmbHInventors: Andreas Birkner, Knut Hiltawski, Karsten Urban, Joachim Wienecke
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Patent number: 6918735Abstract: The invention relates to a holding device for wafers in an arrangement for wafer inspection, comprising two grippers (11, 12), each of which, in the closed state of the holding device (8), encloses a subsection of the wafer circumference and which are connected to a drive device (27) and, when the latter is driven, the grippers (11, 12) move away from each other for the purpose of opening the holding device (9) and move toward each other for the purpose of closing the holding device (8), and a holding arm (13), on which the two grippers (11, 12) are pivotably mounted. In this case the holding arm (13) is mounted such that it can rotate about an axis (A) which lies substantially in the plane covered by the wafer (W), so that after a rotation through 180° about the axis (A), a wafer (W) held between the grippers (11, 12) has been turned.Type: GrantFiled: April 12, 2002Date of Patent: July 19, 2005Assignee: Leica Microsystems Jena GmbHInventors: Karsten Urban, Winfried Deutscher, Joachim Wienecke
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Publication number: 20040244512Abstract: The invention concerns a system operating unit (30) having a column (3) that is attachable by way of at least two supports (9, 10) to different points of a system housing (14). In the preferred embodiment, this column is attached laterally to the housing, the supports serving for attachment to the housing of the system. In addition, a retaining bracket (4) is connected to the column (3) in such a way that a horizontal deflection of the retaining bracket (4) about a vertical axis is possible.Type: ApplicationFiled: May 26, 2004Publication date: December 9, 2004Applicant: LEICA MICROSYSTEMS SEMICONDUCTOR GmbHInventors: Roland Hedrich, Karsten Urban, Joachim Wienecke
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Patent number: 6674524Abstract: An arrangement for the visual inspection of substrates (S) comprises a microscope (2) for viewing the substrate (S) present at an inspection point (I); at least one viewing field (11), arranged next to a microscope viewing port (2a), for viewing an image or an image area of the substrate (S); and/or at least one further viewing field (12), arranged next to the microscope viewing port (2a), for direct viewing of the substrate (S) or a portion of the substrate (S); the microscope viewing port (2a) and the viewing fields (11, 12) being arranged with respect to an operating position (P) in such a way that from the operating position (P), the viewer looks in a first viewing direction (A) perpendicularly onto the microscope viewing port (2a), and in at least one further viewing direction (B, B′) approximately perpendicularly in each case onto one of the viewing fields (11, 12). The first viewing direction (A) and the viewing directions (B, B′) enclose acute angles (&agr;, &agr;′).Type: GrantFiled: January 10, 2002Date of Patent: January 6, 2004Assignee: Leica Microsystems Jena GmbHInventor: Karsten Urban
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Publication number: 20030175106Abstract: The invention relates to a holding device for wafers in an arrangement for wafer inspection, comprising two grippers (11, 12), each of which, in the closed state of the holding device (8), encloses a subsection of the wafer circumference and which are connected to a drive device (27) and, when the latter is driven, the grippers (11, 12) move away from each other for the purpose of opening the holding device (9) and move toward each other for the purpose of closing the holding device (8), and a holding arm (13), on which the two grippers (11, 12) are pivotably mounted.Type: ApplicationFiled: February 25, 2003Publication date: September 18, 2003Inventors: Karsten Urban, Winfried Deutscher, Joachim Wienecke
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Publication number: 20020187035Abstract: The invention concerns an arrangement for wafer inspection, having a device (3) for transporting the wafers (S) from a transfer station (5) to at least one inspection station (7, 9). For transportation of the wafers (S), the device (3) comprises a feeder (4), rotatable about a rotation axis (Z), having at least one wafer support (14) whose position is pivotable, with the rotation of the feeder (4), between the transfer station (5) and inspection station (7, 9); and a drive device (18) that is coupled to the feeder (4) and with the activation of which the feeder (4) is caused to rotate through a predefined reference rotation angle.Type: ApplicationFiled: April 29, 2002Publication date: December 12, 2002Applicant: LEICA MICROSYSTEMS JENA GmbHInventors: Kersten Schaefer, Karsten Urban, Frank Bernhardt, Joachim Wienecke
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Publication number: 20020097394Abstract: An arrangement for the visual inspection of substrates (S) comprises a microscope (2) for viewing the substrate (S) present at an inspection point (I); at least one viewing field (11), arranged next to a microscope viewing port (2a), for viewing an image or an image area of the substrate (S); and/or at least one further viewing field (12), arranged next to the microscope viewing port (2a), for direct viewing of the substrate (S) or a portion of the substrate (S); the microscope viewing port (2a) and the viewing fields (11, 12) being arranged with respect to an operating position (P) in such a way that from the operating position (P), the viewer looks in a first viewing direction (A) perpendicularly onto the microscope viewing port (2a), and in at least one further viewing direction (B, B′) approximately perpendicularly in each case onto one of the viewing fields (11, 12). The first viewing direction (A) and the viewing directions (B, B′) enclose acute angles (&agr;, &agr;′).Type: ApplicationFiled: January 10, 2002Publication date: July 25, 2002Applicant: LEICA MICROSYSTEMS JENA GmbHInventor: Karsten Urban
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Publication number: 20020051698Abstract: The invention is based on a substrate conveying module (1) for conveying substrates into a workstation (3) for inspection, measurement, or processing of the substrates, in which on because of connecting elements (4a, b) in at least two side walls (1a, b, c) of the substrate conveying module (1) and/or in at least two side walls (3a, b, c, d) of the workstation (3), the substrate conveying module (1) can, at the installation location of the workstation (3), be flexibly connected thereto in different orientations with respect to the workstation (3) and/or can be coupled at different points to the workstation (3).Type: ApplicationFiled: June 14, 2001Publication date: May 2, 2002Inventors: Andreas Birkner, Knut Hiltawski, Karsten Urban, Joachim Wienecke
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Patent number: D819830Type: GrantFiled: August 30, 2016Date of Patent: June 5, 2018Inventors: Karsten Urban, Guido Franzke