Patents by Inventor Karten Weber

Karten Weber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for thermal treatment of substrates
    Publication number: 20040029065
    Abstract: The aim of the invention is to reduce the formation of scratches in a device for the thermal treatment of substrates, in particular, semiconductor substrates, in a chamber in which the substrate is placed upon support elements. According to the invention, said aim is achieved by means of displaceable support elements.
    Type: Application
    Filed: July 28, 2003
    Publication date: February 12, 2004
    Inventors: Uwe Kreiser, Karten Weber, Wilfried Lerch, Michael Grandy, Patrick Schmid, Jurgen Niess, Olgun Altug