Patents by Inventor Karuki Eickmann

Karuki Eickmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heat treating device
    Patent number: 7141765
    Abstract: A antireflective film 50 is formed on a thermocouple 42 arranged in a processing vessel 1 of a heat treatment apparatus in order to improve the transient response characteristics of the thermocouple 42. In a typical embodiment, the thermocouple 42 is made by connecting a platinum wire 43A and a platinum-rhodium alloy wire 43B, and the antireflective film 50 is composed by stacking a silicon nitride layer 50C, silicon layer 50B and a silicon nitride layer 50A in that order.
    Type: Grant
    Filed: March 20, 2002
    Date of Patent: November 28, 2006
    Assignee: Tokyo Electron Limited
    Inventors: Toshiyuki Makiya, Takanori Saito, Karuki Eickmann, Sanjeev Kaushal, Anthony Dip, David L. O'meara
  • Heat treating device
    Publication number: 20040115585
    Abstract: A antireflective film 50 is formed on a thermocouple 42 arranged in a processing vessel 1 of a heat treatment apparatus in order to improve the transient response characteristics of the thermocouple 42. In a typical embodiment, the thermocouple 42 is made by connecting a platinum wire 43A and a platinum-rhodium alloy wire 43B, and the antireflective film 50 is composed by stacking a silicon nitride layer 50C, silicon layer 50B and a silicon nitride layer 50A in that order.
    Type: Application
    Filed: September 29, 2003
    Publication date: June 17, 2004
    Inventors: Toshiyuki Makiya, Takanori Saito, Karuki Eickmann, Sanjeev Kaushai, Anthony Dip, David L. O'meara