Abstract: The present invention relates to a plurality of phononic devices and a method of manufacturing thereof. In one embodiment, highly sensitive superconducting cryogenic detectors integrate phononic crystals into their architecture. The phononic structures are designed to reduce the loss of athermal phonons, resulting in lower noise and higher sensitivity detectors. This fabrication process increases the qp generation recombination rate, thus, reducing the noise equivalent power (NEP) without sacrificing the scalability. A plurality of phononic devices, such as a kinetic inductance detector (KID), a transition edge sensor (TES) bolometer, and quarterwave backshort, can be manufactured according to the methods of the present invention.

Abstract: The present invention relates to a phononic-isolated Kinetic Inductance Detector (KID) and a method of fabrication thereof. The KID is a highly sensitive superconducting cryogenic detector which can be scaled to very large format arrays. The fabrication process of the KID of the present invention integrates a phononic crystal into a KID architecture. The phononic structures are designed to reduce the loss of recombination and athermal phonons, resulting in lower noise and higher sensitivity detectors.

Abstract: A phononic filter includes a metamaterial body including a membrane including a crystalline or amorphous dielectric material, an elemental superconductor or an alloyed superconductor; and a plurality of spaced features. The spaced features includes holes, spacings, or apertures in the metamaterial body.