Patents by Inventor Katherine Elizabeth Woo

Katherine Elizabeth Woo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FLUORIDE COATING TO IMPROVE CHAMBER PERFORMANCE
    Publication number: 20220037126
    Abstract: Embodiments of the disclosure relate to articles, coated chamber components and methods of coating chamber components with a protective coating that includes at least one metal fluoride having a formula selected from the group consisting of M1xFw, M1xM2yFw and M1xM2yM3zFw, where at least one of M1, M2, or M3 is magnesium or lanthanum. The protective coating can be deposited by atomic layer deposition, chemical vapor deposition, electron beam ion assisted deposition, or physical vapor deposition.
    Type: Application
    Filed: August 3, 2020
    Publication date: February 3, 2022
    Inventors: Jennifer Y. Sun, Ren-Guan Duan, Gayatri Natu, Tae Won Kim, Jiyong Huang, Nitin Deepak, Paul Brillhart, Lin Zhang, Yikai Chen, Sanni Sinikka Seppälä, Ganesh Balasubramanian, JuanCarlos Rocha, Shankar Venkataraman, Katherine Elizabeth Woo