Abstract: Herein disclosed are a plasma treating method and an apparatus therefor. The plasma treating method comprises: the step of monitoring the energies of plasmas corresponding to the faces of a plurality of samples to be treated; the step of adjusting to equalize the energies of said plasmas on the basis of the monitored values; and the step simultaneously treating said samples with the plasmas having said equalized energies. The plasma treating apparatus comprises: a plurality of sample electrodes disposed independently of one another in positions opposed to an opposed electrode in a treating chamber evacuated to be supplied with a treating gas; power supply means for applying and adjusting electric power to said sample electrodes; and monitor means for monitoring the energies of plasmas to be generated between said opposed electrode and said sample electrodes.

Abstract: The present invention relates to a plasma processor, and the plasma processor comprises a processing chamber, means to reduce a pressure in the processing chamber so as to evacuate the interior thereof, means to introduce a processing gas into the processing chamber, means to generate an electric field within the processing chamber, and means to establish a magnetic field orthogonal to the electric field, this means being rotatable relative to a surface to-be-processed of a sample which is processed in a plasma arising under the action of the electric field and the magnetic field, whereby a space required for the movement of the means to establish the magnetic field orthogonal to the electric field can be reduced to miniaturize the processor, and the uniform processing of the sample can be attained using rotatable plasma.

Abstract: The invention relates to a method and apparatus for a plasma process in which identical samples are processed in a plasma-processing apparatus provided with a radio-frequency plasma generation means and a microwave plasma generation means, by the utilization of a radio-frequency plasma in the radio-frequency plasma generation means and a microwave plasma in the microwave plasma generation means. The plasma-processing rate can thus be increased, and also electrical damage due to ions in the plasma can be reduced, thereby ensuring a high throughput and a high quality during the manufacture of semiconductor integrated circuit elements.

Abstract: The present invention provides a method for the desalting of fuel oil by mixing the fuel oil and clean water, thereby separating and eliminating sodium salts and potassium salts contained in the fuel oil, and the method comprises separating a heavy portion including salt-containing water from the fuel oil which is a light portion, this heavy portion separated from the fuel oil being separated into water and a residue by an evaporator, the water being reused as a washing water and the residue being burnt to use the generated heat as a heat source for the evaporator, whereby the residue is decreased in volume and solidified to be made easy in the handling.

Abstract: A centrifugal type counterflow contact apparatus having a rotary body or drum intergrally mounted on a rotary shaft, and a plurality of ring members disposed within the rotary body such that circumferential slits are defined between the adjacent ring members in the axial direction of the rotary drum. The ring members have a cross sectional configuration inclined with respect to the axis of the rotary body. A light liquid is introduced into the periphery of the rotary body while a heavy liquid is introduced in the center portion of the rotary body. The heavy and light liquids flow countercurrently through the slits between the ring members under the centrifugal force produced by the rotation of the rotary body, whereby extractability can be improved and accumulation of solids entrained in the feed can be avoided.

Abstract: A centrifugal counterflow type contactor wherein the interior space of a drum carried by a rotating shaft has a predetermined axial width or the interior space of the drum is divided by at least one baffle plate mounted on the rotating shaft into at least two chambers each having a predetermined width; and a light liquid is introduced into said interior space or each chamber at positions adjacent to the radially outward end thereof while a heavy liquid is introduced into said interior space or each chamber at positions adjacent to the radially inward end thereof so that rapid rotation of the drum causes the radial counterflow contact between the light and heavy liquids. The extraction efficiency is equal to or higher than that of a corresponding prior art centrifugal contactor, and the solids in the liquids may be prevented from being accumulated in the counterflow region.