Patents by Inventor Katsuharu Imai

Katsuharu Imai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bucket-type ion source for fanning cusped magnetic fields inside a plasma generation chamber
    Patent number: 8604683
    Abstract: An ion source includes a plasma generation chamber, at least one filament disposed inside the plasma generation chamber, at least one electrode disposed so as to be opposed to the plasma generation chamber, and configured to extract out an ion beam from the plasma generation chamber, and a plurality of permanent magnets disposed outside the plasma generation chamber, and configured to form cusped magnetic fields inside the plasma generation chamber, and a deposition preventive plate disposed parallel with an inner surface of a wall of the plasma generation chamber. The deposition preventive plate has recesses which are formed at such positions as to be opposed to the respective permanent magnets with the wall of the plasma generation chamber interposed in between.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: December 10, 2013
    Assignee: Nissin Ion Equipment Co., Ltd.
    Inventors: Yutaka Inouchi, Takeshi Matsumoto, Masahiro Tanii, Katsuharu Imai
  • ION SOURCE
    Publication number: 20120229012
    Abstract: An ion source includes a plasma generation chamber, at least one filament disposed inside the plasma generation chamber, at least one electrode disposed so as to be opposed to the plasma generation chamber, and configured to extract out an ion beam from the plasma generation chamber, and a plurality of permanent magnets disposed outside the plasma generation chamber, and configured to form cusped magnetic fields inside the plasma generation chamber, and a deposition preventive plate disposed parallel with an inner surface of a wall of the plasma generation chamber. The deposition preventive plate has recesses which are formed at such positions as to be opposed to the respective permanent magnets with the wall of the plasma generation chamber interposed in between.
    Type: Application
    Filed: March 9, 2012
    Publication date: September 13, 2012
    Applicant: NISSIN ION EQUIPMENT CO., LTD.
    Inventors: Yutaka Inouchi, Takeshi Matsumoto, Masahiro Tanii, Katsuharu Imai