Abstract: In a manufacturing method of a semiconductor device, a substrate including single crystalline silicon is prepared, a reformed layer that continuously extends is formed in the substrate, and the reformed layer is removed by etching. The forming the reformed layer includes polycrystallizing a portion of the single crystalline silicon by irradiating the substrate with a pulsed laser beam while moving a focal point of the laser beam in the substrate.

Abstract: A manufacturing method of a semiconductor device includes: irradiating a laser beam on a single crystal silicon substrate, and scanning the laser beam on the substrate so that a portion of the substrate is poly crystallized, wherein at least a part of a poly crystallized portion of the substrate is exposed on a surface of the substrate; and etching the poly crystallized portion of the substrate with an etchant. In this case, a process time is improved.

Abstract: In a manufacturing method of a semiconductor device, a substrate including single crystalline silicon is prepared, a reformed layer that continuously extends is formed in the substrate, and the reformed layer is removed by etching. The forming the reformed layer includes polycrystallizing a portion of the single crystalline silicon by irradiating the substrate with a pulsed laser beam while moving a focal point of the laser beam in the substrate.

Abstract: A manufacturing method of a semiconductor device includes: irradiating a laser beam on a single crystal silicon substrate, and scanning the laser beam on the substrate so that a portion of the substrate is poly crystallized, wherein at least a part of a poly crystallized portion of the substrate is exposed on a surface of the substrate; and etching the poly crystallized portion of the substrate with an etchant. In this case, a process time is improved.

Abstract: A distribution type tactile sensor, which comprises a plurality of electrodes provided in pairs at respective pressure sensing points on a pressure sensitive conductive rubber sheet capable of changing the electrical resistance responsive to compressive forces, and a rectifier element provided to respective electrodes for rectifying the current flowing across each pair of electrodes through the rubber sheet, the electrodes being divided into groups each comprising electrodes arranged in a line for respective polarities of the electrodes, electrodes in respective electrode groups being parallel connected to one another through electrode leads, and directions of the division of electrode groups divided for respective polarities being crossed with one another at respective pressure sensing points.

Abstract: Disclosed is a pressure-sensitive, electrically conductive elastomeric composition comprising a substrate composed of an organic flexible material and electrically conductive particles consisting of angle-chipped, roundish pebble-like particles of artificial graphite incorporated and dispersed therein. An elastomeric material comprising this composition has such a characteristic property that the electric resistivity is conspicuously and gradiently reduced under application of a pressure from the level maintained when no pressure is applied. This characteristic property is very durable and therefore, the material can be used advantageously for switch elements and the like.