Abstract: [Problem] To reduce a sliding trace in a vicinity of a substrate end surface, while maintaining smooth vertical movement of a substrate in a groove of the holding section in a substrate storage container, said sliding trace being made with the holding section. [Solution] The present invention relates to a substrate storage container (1) that is provided with: a container main body (2), which stores a substrate (W), and which has at least one side open; and a removable cover body (3) capable of opening/closing an opening (5) of the container main body (2).

Abstract: An optical element includes a base having a curved depression formed in a front surface thereof and a formed layer arranged on the base. The formed layer includes a main part in the depression as viewed from a depth direction of the depression and an overhang on the front surface of the base while connecting to the main part. An opposite surface of the main part to a surface thereof on a side of an inner surface of the depression is formed like a concave curve that is concave in a same direction as the inner surface of the depression. A predetermined surface of the main part that is opposed to the inner surface of the depression is provided with an optical function part.

Abstract: An optical element includes a base having a curved depression formed in a front surface thereof and a formed layer arranged on the base. The formed layer includes a main part in the depression as viewed from a depth direction of the depression and an overhang on the front surface of the base while connecting to the main part. An opposite surface of the main part to a surface thereof on a side of an inner surface of the depression is formed like a concave curve that is concave in a same direction as the inner surface of the depression. A predetermined surface of the main part that is opposed to the inner surface of the depression is provided with an optical function part.

Abstract: A spectrometer includes a package having a stem and a cap, an optical unit disposed on the stem, and a lead pin for securing the optical unit to the stem. The optical unit includes a dispersive part for dispersing and reflecting light entering from a light entrance part of the cap, a light detection element having a light detection part for detecting the light dispersed and reflected by the dispersive part, a support for supporting the light detection element such that a space is formed between the dispersive part and the light detection element, and a projection protruding from the support, the lead pin being secured to the projection. The optical unit is movable with respect to the stem in a contact part of the optical unit and the stem.

Abstract: A spectroscope comprises a package provided with a light entrance part, a plurality of lead pins penetrating through a support part opposing the light entrance part in the package, and a spectroscopic module supported on the support part within the package. The spectroscopic module has a light detection unit provided with a light transmission part for transmitting therethrough light incident thereon from the light entrance part and a spectroscopic unit, secured to the light detection unit so as to be arranged on the support part side of the light detection unit, including a spectroscopic part for spectrally resolving the light transmitted through the light transmission part while reflecting the light to a light detection part. The lead pins are fitted into fitting parts provided with the light detection unit and electrically connected to the light detection part.

Abstract: A spectroscope comprises a package provided with a light entrance part, a plurality of lead pins penetrating through a support part opposing the light entrance part in the package, a light detection unit supported on the support part within the package, and a spectroscopic unit supported on the support part within the package so as to be arranged on the support part side of the light detection unit. The light detection unit has a light transmission part for transmitting therethrough light incident thereon from the light entrance part. The spectroscopic unit has a spectroscopic part for spectrally resolving the light transmitted through the light transmission part while reflecting the light to a light detection part. The lead pins are fitted into fitting parts provided with the light detection unit and electrically connected to the light detection part.

Abstract: An optical element includes a base having a curved depression formed in a front surface thereof and a formed layer arranged on the base. The formed layer includes a main part in the depression as viewed from a depth direction of the depression and an overhang on the front surface of the base while connecting to the main part. An opposite surface of the main part to a surface thereof on a side of an inner surface of the depression is formed like a concave curve that is concave in a same direction as the inner surface of the depression. A predetermined surface of the main part that is opposed to the inner surface of the depression is provided with an optical function part.

Abstract: A photoelectric sensor includes a phototransmitter that outputs light toward a detection target region of an object; an optical receiver that receives the light outputted from the phototransmitter; a signal processing unit that outputs a signal indicating that the object is detected in response to a decrease of an amount of light received by the optical receiver; and two optical filters that are provided between the phototransmitter and the optical receiver to transmit only pieces of light having specific characteristics.

Abstract: A spectroscope comprises a package provided with a light entrance part, a plurality of lead pins penetrating through a support part opposing the light entrance part in the package, a light detection unit supported on the support part within the package, and a spectroscopic unit supported on the support part within the package so as to be arranged on the support part side of the light detection unit. The light detection unit has a light transmission part for transmitting therethrough light incident thereon from the light entrance part. The spectroscopic unit has a spectroscopic part for spectrally resolving the light transmitted through the light transmission part while reflecting the light to a light detection part. The lead pins are fitted into fitting parts provided with the light detection unit and electrically connected to the light detection part.

Abstract: A spectroscope comprises a package provided with a light entrance part, a plurality of lead pins penetrating through a support part opposing the light entrance part in the package, and a spectroscopic module supported on the support part within the package. The spectroscopic module has a light detection unit provided with a light transmission part for transmitting therethrough light incident thereon from the light entrance part and a spectroscopic unit, secured to the light detection unit so as to be arranged on the support part side of the light detection unit, including a spectroscopic part for spectrally resolving the light transmitted through the light transmission part while reflecting the light to a light detection part. The lead pins are fitted into fitting parts provided with the light detection unit and electrically connected to the light detection part.