Abstract: A surface inspection device (1) according to the present invention comprises: a plate-shaped sample holding member (3) which can hold a sample (2); a spindle motor (4) for rotating the sample holding member (3); a turntable (5) which is fixed to the spindle motor (4) and rotated by the spindle motor (4); a frame (6) to which the spindle motor (4) is fixed; a plurality of support members (12) each having one end fixed to the sample holding member (3) and the other end fixed to the turntable (5), the support members supporting the sample holding member (3) such that the sample holding member is displaceable in a focus direction which is the height direction with respect to the turntable (5); and a sample drive unit (11) which displaces the sample holding member (3) in the focus direction with respect to the turntable (5). This surface inspection device (1) can accurately drive the sample (2) in the focus direction.

Abstract: The probe card to be used for the measurement of the electrical characteristics of a semiconductor device such as an LSI chip and comprising the contactor mounting substrate on which a plurality of contactors are provided, in which the contactor comprises an insertion part for mounting the contactor on the contactor mounting substrate, a support part for supporting the insertion part and performing positioning in the height direction by contacting a surface of the, contactor mounting substrate, an arm part extending from the support part, and a contact part arranged at a tip end of the arm part to come in contact with an electrode of an object to be tested, and the insertion part is detachably mounted on an electrode hole provided in the surface of the contactor mounting substrate and made to be conductive by a wiring pattern. In some embodiments, a contactor includes a holding part and/or pressurized part integrated with the supporting part.

Abstract: Probe card for examining semiconductor devices on semiconductor wafers that allows the members configuring the probe card to be easily separated and assembled, prevents the occurrence of electrical conduction failure between electrodes and achieves high electrical contact and high reliability. The probe card is used for measuring electrical properties of a measuring object and includes a space transformer including a plurality of contacts contacting an electrode pad of the measuring object on one surface and a plurality of connecting pins on a surface opposite the surface with the contact, a main substrate including a plurality of first connecting electrodes contacting an electrode pad of measuring equipment, and a sub-substrate including a plurality of through-holes, through which the connecting pin is inserted between the main substrate and the space transformer, for electrically conducting with the first connecting electrode, where the sub-substrate and the main substrate are coupled together.

Abstract: A probe card used for measuring electrical characteristics of a semiconductor device such as an LSI chip and comprising a contactor mounting substrate on which a plurality of contactors are arranged, in which the contactor comprises an insertion part for mounting the contactor on the contactor mounting substrate, a support part for supporting the insertion part and performing positioning in the height direction by contacting a surface of the contactor mounting substrate, an arm part extending from the support part, and a contact part arranged at a tip end of the arm part to come in contact with an electrode of an object to be tested, and the insertion part is detachably mounted on an electrode hole provided in the surface of the contactor mounting substrate and made to be conductive by a wiring pattern.

Abstract: The present invention relates to a probe card which measures electrical characteristics of a semiconductor device such as an LSI chip and it is an object to provide a mounting structure of a contactor which comes in contact with the semiconductor device. The probe card has a contactor mounting substrate on which a plurality of contactors are provided, in which the contactor comprises an insertion part for mounting the contactor on the contactor mounting substrate, a support part for supporting the insertion part and performing positioning in the height direction by contacting a surface of the, contactor mounting substrate, an arm part extending from the support part, and a contact part arranged at a tip end of the arm part to come in contact with an electrode of an object to be tested, and the insertion part is detachably mounted on an electrode hole provided in the surface of the contactor mounting substrate and made to be conductive by a wiring pattern.

Abstract: A probe card according to the present invention allows the members configuring the probe card to be easily separated and assembled, and further prevention the occurrence of electrical conduction failure between electrodes and achieves high electrical contact and high reliability.

Abstract: A wearable electronic device is offered in which sound radiation and sound reception operations of an electroacoustic converter are performed reliably. The wearable electronic device can be a personal digital assistant (PDA) having an enclosure portion that is worn on a user's wrist in use. The electroacoustic converter is incorporated in the enclosure portion. Sound radiation and reception holes extending through the wall of the enclosure portion are formed between the inner surface and the outer surface of the enclosure portion. The inner surface surrounds the converter, while the outer surface makes contact with the user's wrist when the device is worn. The enclosure portion has recessed or convex portions on or in portions of the outer surface around the openings of the sound radiation and reception holes to form acoustic signal propagation paths.