Abstract: An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly. Arms (61 to 63) of a transmission arm unit (6) are provided for transmitting an operation of a first parallel link (4) to a second parallel link (5). An operation of the first parallel link (4) is transmitted to the second parallel link (5) so that an angle between an arm (53) and an arm (52) in the second parallel link(5) always coincides with an angle between an arm (41) and an arm (42) in the first parallel arm unit (4).

Abstract: An object is to make it possible to adequately reduce the wafer transport time and to contribute to size-reduction of the semiconductor processing system. Two wafer supports (3, 4) on which wafers (100) are placed are arranged to be apart from each other by a distance (D) in a vertical direction . To transport two wafers (100) to respective loading stages (200A, 200B), first a wafer (100) placed on the lower wafer support (3) is subjected to correction of its position in its main plane, and the wafer supports (3, 4) are descended. After the wafer (100) placed on the wafer support (3) is loaded onto pins (211-213), another wafer (100) placed on the upper wafer support (4) is subjected to correction of its position in its main plane, and the wafer supports (3, 4) are descended.

Abstract: An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly. Arms (61 to 63) of a transmission arm unit (6) are provided for transmitting an operation of a first parallel link (4) to a second parallel link (5). An operation of the first parallel link (4) is transmitted to the second parallel link (5) so that an angle between an arm (53) and an arm (52) in the second parallel link(5) always coincides with an angle between an arm (41) and an arm (42) in the first parallel arm unit (4).

Abstract: A wafer exchange apparatus is provided that is compact with excellent accessibility. The wafer exchange apparatus of the present invention includes a first and a second hands (10), (20), a first lifting means (30), a casing (40), a horizontal moving means (50) and a second lifting means (60). The first and the second hands (10), (20) are formed in shapes segmented in the left and right direction with generally line symmetry, and support a wafer (100). The first lifting means (30) moves the second hand (20) upward and downward. The casing (40) has the first lifting means (30) built-in, and supports the first hand (10) at a constant position in height while supporting the second hand (20) movably upward and downward. The horizontal moving means (50) moves the casing (40) horizontally. The second lifting means (60) moves the casing (40) upward and downward.

Abstract: In an industrial robot having a plurality of arms, each arm is coupled with other elements such as a mounting base, another arm, a robotic hand, and revolved by a motion of a revolving joint. A motor for moving the revolving joint, an encoder for sensing a rotation angle of a drive shaft of the motor, and a control circuit for controlling the driving of the motor are provided on the same arm. A signal cable for transmitting a sensing signal of the encoder to the control circuit is terminated at the control circuit on the same arm. There is no need to align the signal cable from the encoder to a main control circuit provided in the mounting base.

Abstract: In an industrial robot having a plurality of arms, each arm is coupled with other elements, such as a mounting base, another arm, a robotic hand, and revolved by a motion of the revolvable joint. The revolvable joint has a rotary electric connecting structure such as a slip ring or a rotary transformer which can be rotated endlessly. Electric powers for driving motors by which the arms are revolved and control signals for controlling the driving of the motors are supplied or transmitted through the rotary electric connecting structure, so that the arms can be rotated endlessly without twisting or breaking of electric cables.

Abstract: A horizontal multi-joint industrial robot has a construction in which rotational driving force is transmitted from rotational driving sources placed in a base through driving force transmitting mechanism placed in arms and connecting parts to each of arms and a robot hand. This construction in which rotational driving sources for arms and robot hand are placed concentratively in the base, eliminates the need for routing electric lines in moving parts, thereby preventing rotational movements of the arms and robot hand from decreasing the reliability, and besides allowing inertial moments to reduce by decreasing weights of the moving parts.

Abstract: In an industrial robot having a plurality of arms, each arm is coupled with other elements such as a mounting base, another arm, a robotic hand, and revolved by a motion of the revolute joint. The revolute joint has a rotary electric connecting structure such as a slip ring or a rotary transformer which can be rotated endlessly. Electric powers for driving motors by which the arms are revolved and control signals for controlling the driving of the motors are supplied or transmitted through the rotary electric connecting structure, so that the arms can be rotated endlessly without twisting or breaking of electric cables.

Abstract: In an industrial robot having a plurality of arms, each arm is coupled with other elements such as a mounting base, another arm, a robotic hand, and revolved by a motion of the revolute joint. A motor for moving the revolute joint, an encoder for sensing a rotation angle of a drive shaft of the motor, and a control circuit for controlling the driving of the motor are provided on the same arm. A signal cable for transmitting a sensing signal of the encoder to the control circuit is terminated at the control circuit on the same arm. There is no need to align the signal cable from the encoder to a main control circuit provide in the mounting base.

Abstract: A horizontal multi-joint industrial robot has three arms of first, second and third arms which are sequentially attached from a base member, and has a robot hand which is connected to an distal end portion of the third arm. In this composition, there are two states of folding directions of arm joints with respect to a robot hand movement. When the robot hand moves in a forward direction, rotational movement of the arms is controlled so as to select one of the folding directions such that an angle between a robot hand direction and the third arm maintains 90° or more. This allows a distal end portion of the second arm to always position behind a distal end portion of the third arm with respect to the robot hand forward direction, which makes it possible to decrease a robot arm movable area that makes no contribution toward conveying a workpiece, thereby saving space for installing the robot.