Abstract: There is provided a tungsten film-forming method, including: forming a silicon film on a substrate in a reduced pressure atmosphere by disposing the substrate having a protective film formed on a surface of the substrate in a processing container; forming an initial tungsten film by supplying a tungsten chloride gas to the substrate having the silicon film formed thereon; and forming a main tungsten film by supplying a tungsten-containing gas to the substrate having the initial tungsten film formed thereon.

Abstract: A tungsten film forming method in which a substrate having a TiN film formed thereon is disposed in a processing container and a tungsten film is formed above a surface of the substrate while heating the substrate in a reduced pressure atmosphere, includes forming a first film of an aluminum-containing material on the substrate and forming the tungsten film on the first film.

Abstract: There is provided a method of processing each of a plurality of substrates comprising: obtaining a first correction factor based on a first flow rate set value of a mass flow controller and a first measurement value of a mass flow meter; adjusting the first flow rate set value of the mass flow controller with the first correction factor so that the flow rate of the vaporized raw material becomes equal to a target value to process the substrate; obtaining a second correction factor based on a second flow rate set value of the mass flow controller and a second measurement value of the mass flow meter; and adjusting the second flow rate set value of the mass flow controller with the second correction factor so that the flow rate of the vaporized raw material becomes equal to the target value to process the substrate.

Abstract: A method of filling recesses in a substrate with tungsten includes preparing the substrate within a chamber of a film forming apparatus, performing a first cycle at least once, the first cycle comprising introducing a tungsten-containing precursor gas into the chamber, purging the chamber, introducing a hydrogen-containing gas into the chamber, and purging the chamber, and performing a second cycle at least once after the first cycle is performed at least once, the second cycle comprising introducing the tungsten-containing precursor gas into the chamber, purging the chamber, introducing the hydrogen-containing gas into the chamber, and purging the chamber. A pressure in the chamber when the second cycle is performed is set to a pressure lower than a pressure in the chamber when the first cycle is performed.

Abstract: There is provided a method of forming a tungsten film on a surface of a target substrate having a base film by repeating a cycle plural times, the cycle including alternately supplying a tungsten chloride gas and a reducing gas for reducing the tungsten chloride gas, with a purge interposed therebetween, into a process container in which the target substrate is accommodated and that is maintained under a depressurized atmosphere. The method includes setting a supply flow rate of the tungsten chloride gas and a time of the cycle such that a ratio of a thickness of the base film etched by repeating the cycle the plural times to a thickness of the base film before repeating the cycle the plural times becomes smaller than a predetermined ratio in a state where an integrated flow rate of the tungsten chloride gas per one cycle is kept substantially constant.

Abstract: A gas supply apparatus is capable of intermittently supplying a source gas into a processing container via a buffer tank and a first high speed opening/closing valve. The gas supply apparatus includes: an evacuation line connected to a second side of the buffer tank and configured to evacuate the inside of the buffer tank; and a second high speed opening/closing valve provided on the evacuation line.

Abstract: There is provided a gas supply device for vaporizing a raw material inside a raw material container and supplying a raw material gas into a processing vessel together with a carrier gas, including: a mass flow controller connected to an upstream side of the raw material container and configured to control a flow rate of the carrier gas; a flow meter connected to a downstream side of the raw material container; and a control part configured to perform a control so as not to supply the raw material gas into the processing vessel until a detection value of the flow meter with respect to the carrier gas controlled to have a constant flow rate by the mass flow controller is stabilized after replacing the raw material container.

Abstract: A gas supply device for vaporizing a raw material inside a raw material container and supplying a raw material gas into a processing container together with a carrier gas, which includes: a buffer tank provided between the raw material container and the processing container; an Evac line for exhausting interiors of the buffer tank and the raw material container; a memory part that stores a first internal pressure of the buffer tank when a process is performed by supplying the raw material gas into the processing container; and a control part configured to control a flow rate of a gas exhausted to the Evac line and a flow rate of the raw material gas and the carrier gas filled in the buffer tank, so that a second internal pressure of the buffer tank becomes equal to the first internal pressure before supplying the raw material gas into the processing container.

Abstract: There is provided a film forming method of forming a metal film, which includes: alternately supplying a metal chloride gas and a reducing gas for reducing the metal chloride gas to a substrate arranged inside a processing vessel a plurality of times, wherein the alternately supplying the metal chloride gas and the reducing gas includes a period of time during which a flow rate of the metal chloride gas gradually increases.

Abstract: A method of filling recesses in a substrate with tungsten includes preparing the substrate within a chamber of a film forming apparatus, performing a first cycle at least once, the first cycle comprising introducing a tungsten-containing precursor gas into the chamber, purging the chamber, introducing a hydrogen-containing gas into the chamber, and purging the chamber, and performing a second cycle at least once after the first cycle is performed at least once, the second cycle comprising introducing the tungsten-containing precursor gas into the chamber, purging the chamber, introducing the hydrogen-containing gas into the chamber, and purging the chamber. A pressure in the chamber when the second cycle is performed is set to a pressure lower than a pressure in the chamber when the first cycle is performed.

Abstract: A portable terminal apparatus where a talking can be speedily switched to that using a bone conduction speaker even in the talking. In this device, an upper housing (101) has a cutout section (106) for clearing a step section (103). Installation sections (107) are arranged so as to set the cutout section (106) between them and are combined with a hinge provided in the step section (103). The upper housing (101) can be pivoted and folded relative to a lower housing (102). The lower housing (102) has a keypad (110) and also has the step section (103) formed higher by one step than a panel surface (112) of the lower housing (102). The step section (103) receives a bone conduction speaker (104) and has at its top section a vibration surface (105).

Abstract: An object of the present invention is to provide an electronic device that can be operated as imagined while checking display contents because the display contents on a displaying unit and an operation applied to an operating unit are linked together. An electronic device of the present invention includes a second operation button (4), a display portion (2), and a control portion (6) that controls a display on the display portion (2) in response to operations of the second operation button (4), a first operation button (3), and the like, wherein the control portion (6) changes display contents on the display portion (2) to link together with a tracing operation applied to the second operation button (4).

Abstract: A portable terminal apparatus where a talking can be speedily switched to that using a bone conduction speaker even in the talking. In this device, an upper housing (101) has a cutout section (106) for clearing a step section (103). Installation sections (107) are arranged so as to set the cutout section (106) between them and are combined with a hinge provided in the step section (103). The upper housing (101) can be pivoted and folded relative to a lower housing (102). The lower housing (102) has a keypad (110) and also has the step section (103) formed higher by one step than a panel surface (112) of the lower housing (102). The step section (103) receives a bone conduction speaker (104) and has at its top section a vibration surface (105).

Abstract: Inclined plane is provided at the tip of rotor cam. On the other hand, inclined planes are also provided in specific positions of stator cam. Because of this structure, in the specific positions, the inclined planes are in resilient contact with each other. Thus, the load is increased only in the specific positions without an increase in the load of spring. This structure can provide an opening and closing device capable of securely holding only desired positions without affecting the feel of opening and closing operation of the entire device, and electronic equipment using the device.

Abstract: A biaxial hinge having a rotating mechanism that realizes durability, a good tactile feedback, smaller size and more lightweight is provided for use in a notebook computer or a portable telephone that needs to be smaller and more lightweight. The biaxial hinge is constituted such that a rotating shaft support member is fixed to a rotational shaft support member, a rotation-side member is inserted and attached to the outer periphery of the rotating shaft member, and an opening/closing torque unit mechanism for opening and closing operations is disposed at the rotation-side member, wherein sliding friction torque and click torque are generated by the load produced by a coil spring between pressing members and the rotating shaft support member or a sliding member attached to the rotating shaft member. The rotating mechanism of the biaxial hinge of the present invention affords good durability, a good tactile feedback, and a reduction in size and weight.

Abstract: A portable device includes a camera section, a camera image display, a first case having a first surface having the display therein and a second surface opposite the first surface, a second case that can be positioned over the second surface of the first case, a rotation axis section supporting the second case to the first case rotatably about an axis perpendicular to the first surface of the first case, and a camera/display operation section. The camera section has an optical axis, and the rotation axis section accommodates the camera section so that the optical axis is parallel to the rotation axis. The operation section is on the first surface of the first case opposite an image-capturing direction of the rotation axis of the rotation axis section.

Abstract: There is provided a foldable electronic apparatus in which first and second casings are pivotally mounted by a bearing portion so as to be freely rotatable and these casings are automatically opened until a predetermined opening angle and then further manually opened. In the electronic apparatus of the present invention, the first and second casings (1), (2) are freely rotatably connected to each other (pivotally mounted) through a bearing portion (3). An opening/closing device (4) for automatically opening the first and second casings (1), (2) until a predetermined opening angle by operating a push button (49) is secured to the bearing portion. The opening/closing device (4) includes a mechanism for opening the casings until a larger opening angle exceeding the predetermined opening angle, and the first and second casings (1), (2) can be manually opened till a larger opening angle.

Abstract: An object of the present invention is to provide an electronic device that can be operated as imagined while checking display contents because the display contents on a displaying unit and an operation applied to an operating unit are linked together. An electronic device of the present invention includes a second operation button (4), a display portion (2), and a control portion (6) that controls a display on the display portion (2) in response to operations of the second operation button (4), a first operation button (3), and the like, wherein the control portion (6) changes display contents on the display portion (2) to link together with a tracing operation applied to the second operation button (4).

Abstract: A biaxial hinge having a rotating mechanism that realizes durability, a good tactile feedback, smaller size and more lightweight is provided for use in a notebook computer or a portable telephone that needs to be smaller and more lightweight. The biaxial hinge is constituted such that a rotating shaft member 9 is fixed to a rotation support member 10, a rotation-side member 7 is inserted and attached to the outer periphery of the rotating shaft member 9, and an opening/closing torque unit mechanism 12 for opening and closing operations is disposed at the rotation-side member 7, wherein sliding friction torque and click torque are generated by the load produced by a coil spring 6 between pressing members 4 and the rotating shaft support member 10 or a sliding member 3 attached to the rotating shaft member 9. The rotating mechanism of the biaxial hinge of the present invention affords good durability, a good tactile feedback, and a reduction in size and weight.

Abstract: A portable device includes a camera section, a display capable of displaying an image captured by the camera section, a first case having a first surface having the display therein and a second surface opposite to the first surface, a second case that can be positioned over the second surface of the first case, a rotation axis section supporting the second case to the first case rotatably about a rotation axis perpendicular to the first surface of the first case, and an operation section operates at least one of the camera section and the display. The camera section has an optical axis and is capable of capturing an image of an object in an image-capturing direction parallel to the optical axis. The rotation axis section accommodates the camera section so that the optical axis is parallel to the rotation axis, and the image-capturing direction is directed from the first surface of the first case to the second surface of the first case.