Abstract: A dechuck control method of dechucking a processed object electrostatically attracted to an electrostatic chuck is provided. The method includes a step of dechucking the processed object by lifting the processed object with a supporting mechanism. The dechucking step is performed while applying a given voltage to an electrode of the electrostatic chuck.

Abstract: Disclosed is an electrostatic attraction method including: a first step in which a gas is introduced into a chamber in which the processing target object is to be processed before a processing target object is placed on a stage within the chamber, and plasma is generated by applying a high frequency power; a second step in which a DC voltage having a polarity opposite to a polarity of a DC voltage to be applied when attracting the processing target object, to an electrostatic chuck provided on the stage after the first step; a third step where extinguishing of the plasma by stopping application of the high frequency power is performed after the second step; and a fourth step where application of the DC voltage is stopped after the third step.

Abstract: An aqueous coating composition containing an acrylic-modified polyester resin (A) and a reactive-group-containing resin (B), the acrylic-modified polyester resin (A) comprising as a monomer component constituting the acrylic part, a polyoxyalkylene group-containing unsaturated monomer having a weight average molecular weight of 400 or more, and the proportion of compounds having 6 or more carbon atoms of the total amount of the polyester-constituting components being 50 mass % or more.

Abstract: A dechuck control method of dechucking a processed object electrostatically attracted to an electrostatic chuck is provided. The method includes a step of dechucking the processed object by lifting the processed object with a supporting mechanism. The dechucking step is performed while applying a given voltage to an electrode of the electrostatic chuck.

Abstract: An aqueous coating composition containing an acrylic-modified polyester resin (A) and a reactive-group-containing resin (B), the acrylic-modified polyester resin (A) comprising as a monomer component constituting the acrylic part, a polyoxyalkylene group-containing unsaturated monomer having a weight average molecular weight of 400 or more, and the proportion of compounds having 6 or more carbon atoms of the total amount of the polyester-constituting components being 50 mass % or more.

Abstract: Disclosed is an electrostatic attraction method including: a first step in which a gas is introduced into a chamber in which the processing target object is to be processed before a processing target object is placed on a stage within the chamber, and plasma is generated by applying a high frequency power; a second step in which a DC voltage having a polarity opposite to a polarity of a DC voltage to be applied when attracting the processing target object, to an electrostatic chuck provided on the stage after the first step; a third step where extinguishing of the plasma by stopping application of the high frequency power is performed after the second step; and a fourth step where application of the DC voltage is stopped after the third step.

Abstract: The first objective of the present invention is to provide an aqueous paint composition that can form a paint film with excellent smoothness, image clarity, adhesion and water resistance. This aqueous paint is characterized in comprising (A) an aqueous dispersion of an acrylic modified polyester resin, (B) a block polyisocyanate compound having a nonionic hydrophilic group, and (C) an aqueous dispersion of acrylic polymer fine particles.

Abstract: A direction change of space formed in an etching target layer can be suppressed while maintaining an etching selectivity for the etching target layer against a mask. A semiconductor device manufacturing method MT includes exciting a first gas by supplying the first gas containing a fluorocarbon gas, a fluorohydrocarbon gas and an oxygen gas into a processing chamber 12 (ST2); and exciting a second gas by supplying the second gas containing an oxygen gas and a rare gas into the processing chamber (ST3), and a cycle including the exciting of the first gas (ST2) and the exciting of the second gas (ST3) is repeated multiple times.

Abstract: A direction change of space formed in an etching target layer can be suppressed while maintaining an etching selectivity for the etching target layer against a mask. A semiconductor device manufacturing method MT includes exciting a first gas by supplying the first gas containing a fluorocarbon gas, a fluorohydrocarbon gas and an oxygen gas into a processing chamber 12 (ST2); and exciting a second gas by supplying the second gas containing an oxygen gas and a rare gas into the processing chamber (ST3), and a cycle including the exciting of the first gas (ST2) and the exciting of the second gas (ST3) is repeated multiple times.

Abstract: The first objective of the present invention is to provide an aqueous paint composition that can form a paint film with excellent smoothness, image clarity, adhesion and water resistance. This aqueous paint is characterized in comprising (A) an aqueous dispersion of an acrylic modified polyester resin, (B) a block polyisocyanate compound having a nonionic hydrophilic group, and (C) an aqueous dispersion of acrylic polymer fine particles.

Abstract: This heat-insulating piston has a piston head comprising a piston head base portion consisting of a ceramic material, a heat-insulating member jointed to the piston head base portion and consisting of a whisker fired member of the same ceramic material as that of the piston head base portion, and a laminate jointed to the surface of the heat-insulating member that faces the combustion chamber, as well as to the surface that slides and consisting of the same ceramic material as that of the heat-insulating member. The heat-insulating member is stably jointed to the piston head base portion and laminate by utilizing the same ceramic material for the heat-insulating member, piston head base portion and laminate, whereby the strength of the piston head can be improved. Furthermore, the heat-insulating capability of the piston can be improved, while the thermal capacity of the laminate is made small, whereby the suction efficiency can also be improved.

Abstract: In a heat-insulating piston comprising a ceramic cylindrical member having the lower end surface thereof in contact with the outer peripheral upper end surface of a piston skirt member, a head base member having the peripheral portion thereof in contact with an inner peripheral step portion of the cylindrical member and fixed to the piston skirt member, a heat-insulating member disposed on the head base member and a ceramic thin film member disposed on the heat-insulating member and having the peripheral portion thereof bonded to the cylindrical member, this invention relates to a heat-insulating piston which inserts metallic heat-resistant members between the inner peripheral step portion of the cylindrical member and the peripheral portion of the head base member in order to prevent the occurrence of a gap between the thin film member and the heat-insulating member.