Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

Abstract: A stage apparatus includes a column for irradiating a sample with a charged particle beam, a vacuum sample chamber to which the column is attached, moving tables disposed in the vacuum sample chamber to move the sample relatively to the column, and position detectors for detecting positions of the moving tables. The stage apparatus includes an attachment member disposed between the column and the vacuum sample chamber. The attachment member has an opening which restricts movement of the column in a same direction as directions of the moving tables. Reference mirrors in the position detectors for detecting the positions of the tables are attached to the attachment member. Each of the reference mirrors has an adjustment apparatus to adjust a relative angle between the reference mirror and the laser beam.

Abstract: Disclosed is a high resolution and high throughput charged particle radiation device that attenuates the natural vibration of an ion pump in a short time, excited by a reaction force at the time of driving the stage, and prevents occurrence of a loop of force and a loop of current. The charged particle radiation device includes a sample chamber (4) for disposing a sample (3) therein, a charged particle radiation optical lens tube (1) for irradiating the sample (3) with charged particle radiation (10), ion pumps (2a, 2b) for evacuating the charged particle radiation optical lens tube (1), a frame (16) fixedly attached to the sample chamber (4), the frame (16) facing one end of each of the ion pumps (2a, 2b), and vibration absorbers provided between the frame (16) and the one end of each of the ion pumps (2a, 2b), each of the vibration absorbers including a layered structure which includes a viscoelastic sheet (20a, 20b) sandwiched between metal plates (18a, 18b, 21a, 21b).

Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

Abstract: Disclosed is a high resolution and high throughput charged particle radiation device that attenuates the natural vibration of an ion pump in a short time, excited by a reaction force at the time of driving the stage, and prevents occurrence of a loop of force and a loop of current. The charged particle radiation device includes a sample chamber (4) for disposing a sample (3) therein, a charged particle radiation optical lens tube (1) for irradiating the sample (3) with charged particle radiation (10), ion pumps (2a, 2b) for evacuating the charged particle radiation optical lens tube (1), a frame (16) fixedly attached to the sample chamber (4), the frame (16) facing one end of each of the ion pumps (2a, 2b), and vibration absorbers provided between the frame (16) and the one end of each of the ion pumps (2a, 2b), each of the vibration absorbers including a layered structure which includes a viscoelastic sheet (20a, 20b) sandwiched between metal plates (18a, 18b, 21a, 21b).

Abstract: To provide a network game system for switching a server-client machine without deteriorating the excitement of a game. A network game system (10) causes each of a plurality of game machines (12) to operate as a client and at least one of the plurality of game machines (12) to also operate as a server, thereby providing a game to be played by the players of the plurality of game machines (12). A game play evaluation value calculation unit (40) calculates a play evaluation value corresponding to each of the plurality of game machines (12) during a game. In the case where a predetermined switching determination time arrives during the game, a server switching unit (52) switches the game machine (12) operating as the server from the game machine (12) currently operating as the server to another game machine (12) of the plurality of game machines (12), based on the evaluation value calculated by the play evaluation value calculation unit (40).

Abstract: Provided is a network game system for providing a game played by players of game machines by operating at least one of the game machines as a server, in which: the game machine to be operated as a server can be appropriately selected; a measuring unit (22) of each of the game machines (12) measures a time required to exchange predetermined data between the game machine (12) and another game machine (12) of the game machines (12); and a server determining unit (28) determines at least one of the game machines (12) as the game machine (12) to be operated as the server according to the results of the measurement by the measuring units (22) of the game machines (12).

Abstract: To provide a network game system capable of switching a server-client machine, while avoiding deterioration in the excitement of a game. A network game system (10) causes each of a plurality of game machines (12) to operate as a client and at least one of the plurality of game machines (12) to operate as a server. In the where a switching determination time arrives, a switching determination unit (52) determines whether or not to switch the game machine (12) operating as a server from the game machine (12) currently operating as the server to another game machine (12) of the plurality of game machines (12), based on the play evaluation value corresponding to each of at least one of the game machines (12).

Abstract: Provided is a network game system for providing a game played by players of game machines by operating at least one of the game machines as a server, in which: the game machine to be operated as a server can be appropriately selected; a measuring unit (22) of each of the game machines (12) measures a time required to exchange predetermined data between the game machine (12) and another game machine (12) of the game machines (12); and a server determining unit (28) determines at least one of the game machines (12) as the game machine (12) to be operated as the server according to the results of the measurement by the measuring units (22) of the game machines (12).

Abstract: To provide a network game system for switching a server-client machine without deteriorating the excitement of a game. A network game system (10) causes each of a plurality of game machines (12) to operate as a client and at least one of the plurality of game machines (12) to also operate as a server, thereby providing a game to be played by the players of the plurality of game machines (12). A game play evaluation value calculation unit (40) calculates a play evaluation value corresponding to each of the plurality of game machines (12) during a game. In the case where a predetermined switching determination time arrives during the game, a server switching unit (52) switches the game machine (12) operating as the server from the game machine (12) currently operating as the server to another game machine (12) of the plurality of game machines (12), based on the evaluation value calculated by the play evaluation value calculation unit (40).

Abstract: To provide a network game system capable of switching a server-client machine, while avoiding deterioration in the excitement of a game. A network game system (10) causes each of a plurality of game machines (12) to operate as a client and at least one of the plurality of game machines (12) to operate as a server. In the where a switching determination time arrives, a switching determination unit (52) determines whether or not to switch the game machine (12) operating as a server from the game machine (12) currently operating as the server to another game machine (12) of the plurality of game machines (12), based on the play evaluation value corresponding to each of at least one of the game machines (12).

Abstract: An exhaust apparatus for a differential exhaust mechanism having a labyrinth seal and a plurality of vacuum pockets includes a differential exhaust system for evacuating the vacuum pockets and an exhaust system for evacuating a chamber of exhaust gas. The differential exhaust system and the exhaust system are connected by control valves that can be opened and closed, enabling communication between the vacuum pockets and the interior of the chamber to be opened and closed (or connected and disconnected) as well. The valves are opened when a vacuum is being formed inside the chamber or when a malfunction occurs in the exhaust system, thus connecting the vacuum pockets and the chamber and preventing excessive pressure from building up on the hydrostatic bearing.

Abstract: An exhaust apparatus for a differential exhaust mechanism having a labyrinth seal and a plurality of vacuum pockets includes a differential exhaust system for evacuating the vacuum pockets and an exhaust system for evacuating a chamber of exhaust gas. The differential exhaust system and the exhaust system are connected by control valves that can be opened and closed, enabling communication between the vacuum pockets and the interior of the chamber to be opened and closed (or connected and disconnected) as well. The valves are opened when a vacuum is being formed inside the chamber or when a malfunction occurs in the exhaust system, thus connecting the vacuum pockets and the chamber and preventing excessive pressure from building up on the hydrostatic bearing.

Abstract: A diffraction grating shaped reference pattern having the same grating pitch as diffraction grating shaped alignment pattern formed on a wafer is irradiated by alignment light, and the diffracted light signal obtained from the reference pattern is stored in a memory. The diffraction grating shaped alignment pattern formed on the wafer is irradiated by the alignment light, and the diffracted light signal from the alignment pattern is corrected based on the diffracted light signal stored in the memory.