Patents by Inventor Kay MITTLER

Kay MITTLER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220390840
    Abstract: A light-enhanced wafer processing system disclosed herein which includes a rotatable chuck configured to support and selectively rotate at least one wafer, at least one dispenser body configured to selectively flow at least one photolytic material onto a surface of the wafer, and at least one optical radiation source may be configured to provide optical radiation to at least a portion of the wafer having photolytic material applied thereto, wherein the optical radiation is configured to result in the formation of optically-induced radicals having enhanced reactivity with at least one material applied to the wafer.
    Type: Application
    Filed: June 1, 2022
    Publication date: December 8, 2022
    Inventors: Jens Fittkau, Christiane Le Tiec, Curt Rettig, Dirk Nolte, Kay Mittler, Carsten Becher
  • Publication number: 20210066881
    Abstract: The present application is directed to various architectures of a laser oscillator which include an optical element, reflective, refractive, or diffractive injection device for injection seeding and/or locking a laser oscillator.
    Type: Application
    Filed: December 20, 2018
    Publication date: March 4, 2021
    Applicant: NEWPORT CORPORATION
    Inventor: Kay Mittler
  • Patent number: 10451954
    Abstract: Systems and methods for shifting a position of one or more optical elements are disclosed. In an embodiment, a system may include a housing having a chamber formed therein, at least one non-linear crystal disposed in the chamber, the non-linear crystal configured to receive at least one incident signal and to convert a wavelength of at least a portion of the incident signal, and at least one shape memory alloy element disposed such that thermal or electrical energy applied to the shape memory alloy causes movement of the non-linear crystal.
    Type: Grant
    Filed: March 21, 2019
    Date of Patent: October 22, 2019
    Assignee: NEWPORT CORPORATION
    Inventors: Kay Mittler, Olaf Spieweg, Dennis Grunow
  • Patent number: 10416531
    Abstract: Systems and methods for shifting a position of one or more optical elements are disclosed. In an embodiment, a system may include a housing having a chamber formed therein, at least one non-linear crystal disposed in the chamber, the non-linear crystal configured to receive at least one incident signal and to convert a wavelength of at least a portion of the incident signal, and at least one shape memory alloy element disposed such that thermal or electrical energy applied to the shape memory alloy causes movement of the non-linear crystal.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: September 17, 2019
    Assignee: Newport Corporation
    Inventors: Kay Mittler, Olaf Spieweg, Dennis Grunow
  • Publication number: 20190004395
    Abstract: Systems and methods for shifting a position of one or more optical elements are disclosed. In embodiment, a system may include a housing having a chamber formed therein, at least one non-linear crystal disposed in the chamber, the non-linear crystal configured to receive at least one incident signal and to convert a wavelength of at least a portion of the incident signal, and at least one shape memory alloy element disposed such that thermal or electrical energy applied to the shape memory alloy causes movement of the non-linear crystal.
    Type: Application
    Filed: December 30, 2015
    Publication date: January 3, 2019
    Inventors: Kay MITTLER, Olaf SPIEWEG, Dennis GRUNOW