Abstract: A stylus 20 is mounted directly on detector 32 and the detector 32 is mounted directly on a holder 10. Thus, an vibration-type contact detection sensor 1 is formed in a state in which the holder 10 and the stylus 20 are placed out of contact with each other and the stylus 20 and the detector 32 are placed in contact with each other. Therefore, attenuation of vibration and status change of the stylus 20 by the holder 10 can be circumvented and vibration and status change of the stylus 20 can be propagated directly to the detector 32, so that the detector 32 can detect vibration and status change of the stylus 20 with high sensitivity, and contact with a workpiece can be detected with high sensitivity.

Abstract: A stylus has a detection element support part 1E for supporting and fixing piezoelectric elements 21 to 24 and a rod 1D placed on the detection element support part 1E. The detection element support part 1E has a plurality of flange parts 1F each being regular polygonal in cross section orthogonal to the axis of the rod 1D. The displacement detection elements are attached to the sides of the flange parts 1F in a state in which they are inclined at a predetermined angle &agr; relative to the axis of the rod 1D. If a measured force in a torsion direction Q or in a bend direction P occurs on the rod 1D through a contact ball 1A, the measured force is transmitted along substantially the length direction of the piezoelectric elements 21 to 24.

Abstract: A surface configuration measuring method is provided, the surface configuration measuring method being characterized in having the steps of: moving a touch signal probe by a command velocity vector to touch a surface of the workpiece to be measured; scanning the surface of the workpiece to be measured, the touch signal probe being moved along the surface to be measured while controlling the distance relative to the surface to be measured so that detected amplitude value of a detection signal outputted by the detecting circuit becomes a predetermined reference value, thus outputting the detected amplitude value and corresponding measuring position; and calculating an estimated surface position based on the detected amplitude value and the measuring position estimated to be obtained when surface is scanned to keep the detected amplitude value constant.

Abstract: A movement control mechanism of contact-type vibrating probe is provided, where the contact-type vibrating probe can be used as a probe for profiling measurement and continuous measurement and configuration of a workpiece can be measured with high accuracy. The movement control mechanism for controlling movement of a support body (23) which moves a contact-type vibrating probe (100) having high detection accuracy includes a vibrator for vibrating the stylus in an axial direction, a detector (5) for detecting a vibration of the stylus by the vibrator, second vibrator for vibrating the stylus in a direction approximately parallel to an end surface of the workpiece, and a controller (31) for controlling movement of the support body (23) so that change in state quantity of a detection signal detected by the detector is constant.

Abstract: A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).

Abstract: A stylus structure (40) integrally incorporating a stylus (2), a vibrator (4), a detector (6), a first secondary magnetic circuit (12) and a second primary magnetic circuit (21), and a stylus support (30) integrally incorporating a first primary magnetic circuit (11) and a second secondary magnetic circuit (22) are mutually fittable, thereby achieving signal transmission by the respective magnetic circuits using no electrical contact.

Abstract: A stylus 20 is mounted directly on detector 32 and the detector 32 is mounted directly on a holder 10. Thus, an vibration-type contact detection sensor 1 is formed in a state in which the holder 10 and the stylus 20 are placed out of contact with each other and the stylus 20 and the detector 32 are placed in contact with each other. Therefore, attenuation of vibration and status change of the stylus 20 by the holder 10 can be circumvented and vibration and status change of the stylus 20 can be propagated directly to the detector 32, so that the detector 32 can detect vibration and status change of the stylus 20 with high sensitivity, and contact with a workpiece can be detected with high sensitivity.

Abstract: A stylus has a detection element support part 1E for supporting and fixing piezoelectric elements 21 to 24 and a rod 1D placed on the detection element support part 1E. The detection element support part 1E has a plurality of flange parts 1F each being regular polygonal in cross section orthogonal to the axis of the rod 1D. The displacement detection elements are attached to the sides of the flange parts 1F in a state in which they are inclined at a predetermined angle &agr; relative to the axis of the rod 1D. If a measured force in a torsion direction Q or in a bend direction P occurs on the rod 1D through a contact ball 1A, the measured force is transmitted along substantially the length direction of the piezoelectric elements 21 to 24.

Abstract: In a touch signal probe (10) having a stylus holder (11), a vibrator (12) supported by the stylus holder (11) and has a contact portion (12A) to contact to a workpiece at a distal end thereof, a vibrating means (13A) for vibrating the vibrator (12) in an axial direction resonantly, and a detecting means (13B) for detecting the contact by a change in the vibration of the vibrator (12) caused by the contact to the workpiece is provided. The vibrator (12) is supported by the stylus holder (11) at two support points (A) and (B) positioned with a node of vibration of the vibrator (12) therebetween. Since the vibrating means (13A) and the detecting means (13B) are disposed spanning over the two support points, the node of vibration can be formed between the support points A and B and the size of the touch signal probe (10) can be easily reduced.

Abstract: A contact location detecting mechanism (1) of a touch signal probe (10) includes a rotary motion generator (30) for scanningly moving a stylus (102) on a plane (A), a phase value detector (50) for detecting a phase value (&thgr;) indicating a rotation position of the scanning rotary motion, and a contact location detector (70)for detecting a contact location of a contact portion (102A) based on a detection signal value (V) detected by the detector (103B) and the phase value (&thgr;). Since the contact location of the contact portion (102A) can be detected by the contact location detector (70), the touch signal probe (10) can be used for a profiling measurement and continuous measurement of a workpiece.

Abstract: A method for manufacturing a honeycomb structure having slits, which permits accurate forming of fine slits to cut or grind a targeted cell array alone and moreover is suitable for application to mass production, is to be provided. It is a method for manufacturing a honeycomb structure having slits and a plurality of arrays of numerous cells aligned in parallel; the slits communicating with external space and being formed along the arrays. Slits 5 are formed by protruding a slit forming member 4 toward a molded article 3 during the step of extruding the honeycomb structure.

Abstract: A touch probe which includes a fixed member, a movable member, a stylus, a bias means, and a reseat position system which permits the fixed member and the movable member to make contact with each other at pairs of contact points at positions which are spaced from one another. In the reseat position system, piezoelectric elements are provided which cause the fixed member and the movable member to move relatively in directions constrained by said pairs of contact points after a force applied to the movable member is removed. This realizes a touch probe which can secure high position reproducibility for a long period of time even if frictional forces act between the fixed member and the movable member.