Patents by Inventor Kazuhiko MASE

Kazuhiko MASE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • NON-EVAPORABLE GETTER COATED COMPONENT AND CHAMBER, MANUFACTURING METHOD AND MANUFACTURING APPARATUS
    Publication number: 20200149519
    Abstract: Provided are: a non-evaporable getter coated component and chamber including a non-evaporable getter material layer with a total storage capacity of carbon atoms, nitrogen atoms and oxygen atoms of 20 mol % or less and/or a noble metal layer with a total storage capacity of carbon atoms, nitrogen atoms and oxygen atoms of 20 mol % or less; a manufacturing method of a non-evaporable getter coated component and chamber, the method including a step of forming a non-evaporable getter material layer and/or a noble metal layer by coating a non-evaporable getter material and/or a noble metal by a vapor deposition method under low pressure; and a manufacturing apparatus of a NEG coated component and chamber including a NEG material filament and/or a noble metal filament and a current feedthrough.
    Type: Application
    Filed: November 28, 2017
    Publication date: May 14, 2020
    Applicant: Inter-University Research Institute Corporation High Energy Accelerator Research Organization
    Inventors: Kazuhiko MASE, Takashi KIKUCHI