Abstract: Described herein is a technique capable of efficiently removing a foreign substance in a reaction tube. According to one aspect of the technique, there is provided a substrate processing apparatus including: a reaction tube in which a substrate is processed; and a substrate retainer including a plurality of support columns configured to support the substrate, wherein at least one among the plurality of the support columns includes: a hollow portion through which an inert gas is supplied; and a gas supply port through which the inert gas is supplied toward an inner wall of the reaction tube.

Abstract: A novel display panel that is highly convenient, useful, or reliable is provided. The display panel includes a display region, a first support, and a second support, the display region includes a first region, a second region, and a third region, the first region and the second region each have a belt-like shape extending in one direction, and the third region is sandwiched between the first region and the second region. The first support overlaps with the first region and is less likely to be warped than the third region, and the second support overlaps with the second region and is less likely to be warped than the third region. The second support can pivot on an axis extending in the one direction with respect to the first support.

Abstract: Provided is a high-strength hot-rolled coated steel sheet having a TS of 980 MPa or more, excellent bulging formability and stretch flange formability, and excellent coatability. The high-strength hot-rolled coated steel sheet includes a steel sheet having a chemical composition containing, by mass %, C: 0.03% to 0.09%, Si: 0.01% to 1.60%, Mn: 2.20% to 3.60%, P: 0.100% or less, S: 0.0100% or less, Ti: 0.05% to 0.18%, B: 0.0005% to 0.0050%, Al: 0.005% to 0.40%, N: 0.010% or less, and a balance of Fe and inevitable impurities, in which a CSM value expressed by the equation 33.8[% C][% Mn]+12.4[% Si]/[% Mn] is 3.3 to 12.0, and a steel microstructure containing bainite in an amount of 85% or more in terms of area fraction and martensite in an amount of 2.0% or more and 15.0% or less in terms of area fraction and includes a coating layer or an alloyed coating layer on a surface of the steel sheet.

Abstract: There are provided a high-strength hot-rolled steel sheet having a tensile strength of 980 MPa or more and a production method therefor. The high-strength hot-rolled steel sheet has a predetermined component composition and a microstructure containing 75.0% or more by area and less than 97.0% by area of a primary phase composed of an upper bainite phase, the primary phase having an average grain size of 12.0 ?m or less, and more than 3.0% by area and 25.0% or less by area of a secondary phase that is a structure composed of one or two of a lower bainite phase and/or a tempered martensite phase, and a martensite phase, in which the number density of grains of the secondary phase having an equivalent circular diameter of 0.5 ?m or more is 150,000 grains/mm2 or less, and the steel sheet has an arithmetic mean surface roughness of 2.00 ?m or less.

Abstract: A high-strength hot-rolled steel sheet that has excellent punching workability and hole expandability, and a method for manufacturing the same. The hot-rolled steel sheet has a tensile strength of 980 MPa or more. The hot-rolled steel sheet has a chemical composition containing C, Si, Mn, P, S, Al, N, Ti, Cr, and B, and has a microstructure including a bainite phase having an area ratio of 85% or more as a main phase, and a martensite phase or martensite-austenite constituent having an area ratio of 15% or less as a second phase, the balance being a ferrite phase. The second phase has an average grain diameter of 3.0 ?m or less, prior-austenite grains have an average aspect ratio of 1.3 or more and 5.0 or less, and recrystallized prior-austenite grains have an area ratio of 15% or less relative to non-recrystallized prior-austenite grains.

Abstract: Provided are a high-strength hot-rolled steel sheet and a method for manufacturing the steel sheet. The steel sheet includes C: 0.060% or more and 0.140% or less, Si: 1.00% or less, Mn: 1.30% or more and 2.50% or less, P: 0.030% or less, S: 0.0050% or less, Al: 0.070% or less, N: 0.010% or less, Ti: 0.060% or more and 0.140% or less, Cr: 0.10% or more and 0.50% or less, B: 0.0002% or more and 0.0020% or less, and the balance being Fe and inevitable impurities, in which the relationship 5.0?18C+Mn+1.3Cr+1500B?6.0 is obtained. The microstructure includes a bainite phase in an amount of more than 90% one, two, or all of a ferrite phase, a martensite phase, and a retained austenite phase in an amount of less than 10%.

Abstract: Provided is a high-strength hot-rolled coated steel sheet with excellent formability, A high-strength hot-rolled coated steel sheet has a constituent composition containing, in a mass percent, C: 0.03% to 0.15%, Si: 0.4% or less, Mn: 1.2% to 1.9%, Ti: 0.05% to 0.25%, B: 0.0005% to 0.0050%, P: 0.03% or less, S: 0.005% or less, Al: 0.005% to 0.4%, and N: 0.01% or less, the balance being Fe and incidental impurities. The total area fraction of one or more of ferrite and tempered bainite is 90% or more. The steel sheet has a structure in which the volume fraction of Ti carbides having particle sizes of 20 nm or less is 0.05 vol % or more.

Abstract: The high-strength hot-rolled coated steel sheet includes a steel sheet having a chemical composition containing, by mass %, C: 0.03% to 0.09%, Si: 0.01% to 1.60%, Mn: 2.20% to 3.60%, P: 0.100% or less, S: 0.0100% or less, Ti: 0.05% to 0.18%, B: 0.0005% to 0.0050%, Al: 0.005% to 0.40%, N: 0.010% or less, and a balance of Fe and inevitable impurities, in which a CSM value expressed by the equation 33.8[% C][% Mn]+12.4[% Si]/[% Mn] is 3.3 to 12.0, and a steel microstructure containing bainite in an amount of 85% or more in terms of area fraction and martensite in an amount of 2.0% or more and 15.0% or less in terms of area fraction and includes a coating layer or an alloyed coating layer on a surface of the steel sheet.

Abstract: Described herein is a technique capable of efficiently removing a foreign substance in a reaction tube. According to one aspect of the technique, there is provided a substrate processing apparatus including: a reaction tube in which a substrate is processed; and a substrate retainer including a plurality of support columns configured to support the substrate, wherein at least one among the plurality of the support columns includes: a hollow portion through which an inert gas is supplied; and a gas supply port through which the inert gas is supplied toward an inner wall of the reaction tube.

Abstract: Provided is a high-strength hot rolled steel sheet that has excellent stretch flange formability, bendability, and low-temperature toughness while maintaining high strength of a tensile strength TS of 1180 MPa or more, and a method for manufacturing the high-strength hot rolled steel sheet. The high-strength hot rolled steel sheet includes a specific chemical composition, and a steel structure in which a lower bainite phase and/or a tempered martensite phase at 90% or more in terms of a total area fraction is contained as a dominant phase, an average grain size of the dominant phase is 10.0 ?m or less, and an amount of Fe in Fe-based precipitates is 0.70% or less in mass %, in which an arithmetic average roughness (Ra) of a surface is 2.50 ?m or less, and a tensile strength TS is 1180 MPa or more.

Abstract: Provided is a high-strength hot-rolled coated steel sheet with excellent formability, A high-strength hot-rolled coated steel sheet has a constituent composition containing, in a mass percent, C: 0.03% to 0.15%, Si: 0.4% or less, Mn: 1.2% to 1.9%, Ti: 0.05% to 0.25%, B: 0.0005% to 0.0050%, P: 0.03% or less, S: 0.005% or less, Al: 0.005% to 0.4%, and N: 0.01% or less, the balance being Fe and incidental impurities. The total area fraction of one or more of ferrite and tempered bainite is 90% or more. The steel sheet has a structure in which the volume fraction of Ti carbides having particle sizes of 20 nm or less is 0.05 vol % or more.

Abstract: According to one aspect of the technique, there is provided a substrate processing apparatus including: a process chamber in which a substrate is processed; a first gas supply system configured to supply a first gas onto the substrate in the process chamber and including a plurality of tanks configured to store the first gas, wherein the first gas is heated in the plurality of the tanks; and a controller configured to control the first gas supply system such that the first gas is supplied onto the substrate in the process chamber while switching among the plurality of the tanks.

Abstract: There is provided a technique that includes: process chamber processing substrate; gas supply system supplying precursor gas into the process chamber; exhaust pipe connected to vacuum pump and evacuating inside of the process chamber; gas concentration sensor configured to measure concentration of the precursor gas passing through the exhaust pipe at front stage of the vacuum pump; a pressure sensor measuring pressure in the exhaust pipe at rear stage of the vacuum pump; dilution gas supply system supplying dilution gas into the vacuum pump or the exhaust pipe at the front stage; and a controller controlling the dilution gas supply system to supply the dilution gas into the vacuum pump or the exhaust pipe at the front stage at low rate corresponding to the measured concentration of the precursor gas and the measured pressure in the exhaust pipe at the rear stage.

Abstract: There is provided a technique that includes: a reaction tube configured to process a plurality of substrates; a substrate support configured to support the plurality of substrates stacked in multiple stages; a buffer chamber that is at least located at a position of height from a lowermost substrate to an uppermost substrate supported by the substrate support, and is installed along an inner wall of the reaction tube; and an electrode for plasma generation that is inserted from a lower portion of the buffer chamber into an upper portion of the buffer chamber through a side surface of the reaction tube, the electrode being configured to activate the processing gas by plasma inside the buffer chamber thereby applying high-frequency power to the electrode by a power supply.

Abstract: There are provided a high-strength hot-rolled steel sheet having a tensile strength of 980 MPa or more and a production method therefor. The high-strength hot-rolled steel sheet has a predetermined component composition and a microstructure containing 75.0% or more by area and less than 97.0% by area of a primary phase composed of an upper bainite phase, the primary phase having an average grain size of 12.0 ?m or less, and more than 3.0% by area and 25.0% or less by area of a secondary phase that is a structure composed of one or two of a lower bainite phase and/or a tempered martensite phase, and a martensite phase, in which the number density of grains of the secondary phase having an equivalent circular diameter of 0.5 ?m or more is 150,000 grains/mm2 or less, and the steel sheet has an arithmetic mean surface roughness of 2.00 ?m or less.

Abstract: A steel slab having a composition containing C: more than 0.07% and 0.2% or less, Si: 2.0% or less, Mn: 1.0% to 3.0%, Al: 0.1% or less, Ti: 0.05% to 0.3%, and V: 0.05% to 0.3% on a mass percent basis is heated to 1100° C. or more and is subjected to rough rolling and finish rolling. In the finish rolling, the total rolling reduction of two final passes is 30% or more, and the finish rolling temperature ranges from (Ar3 transformation temperature) to (Ar3 transformation temperature+120° C.). Cooling is started within 2 seconds after the finish rolling. Coiling is performed at an average cooling rate of 40° C./s or more at a coiling temperature in the range of 300° C. to 500° C. The resulting high-strength hot-rolled steel sheet has a microstructure in which a bainite phase constitutes more than 90% by volume, the average lath interval of bainite is 0.

Abstract: A high-strength hot-rolled steel sheet that has excellent punching workability and hole expandability, and a method for manufacturing the same. The hot-rolled steel sheet has a tensile strength of 980 MPa or more. The hot-rolled steel sheet has a chemical composition containing C, Si, Mn, P, S, Al, N, Ti, Cr, and B, and has a microstructure including a bainite phase having an area ratio of 85% or more as a main phase, and a martensite phase or martensite-austenite constituent having an area ratio of 15% or less as a second phase, the balance being a ferrite phase. The second phase has an average grain diameter of 3.0 ?m or less, prior-austenite grains have an average aspect ratio of 1.3 or more and 5.0 or less, and recrystallized prior-austenite grains have an area ratio of 15% or less relative to non-recrystallized prior-austenite grains.

Abstract: A polylactic acid formed body including a polylactic acid base material (1) and a hydrocarbon film (3) vapor-deposited on the surface of the base material by a plasma CVD method. The polylactic acid base material (1) exhibits a sharp X-ray diffraction peak in which a half-width of peak appearing in the 10°-25° wide angle X-ray measurement is not more than 1.22°, and the hydrocarbon film (3) is vapor-deposited on the surface of the polylactic acid base material (1), and includes two layers of a high CH2 layer (3a) having a ratio of CH2 per the total of CH, CH2 and CH3 of not less than 40% and a low CH2 layer (3b) formed on the high CH2 layer (3a) and having a ratio of CH2 per the total of CH, CH2 and CH3 of not more than 35%.

Abstract: A high-strength hot rolled steel sheet with excellent bendability and low-temperature toughness includes a chemical composition including, in mass %, C: 0.08 to 0.25%, Si: 0.01 to 1.0%, Mn: 0.8 to 2.1%, P: not more than 0.025%, S: not more than 0.005% and Al: 0.005 to 0.10%, the balance including Fe and inevitable impurities, and a microstructure having a bainite phase and/or a tempered martensite phase as a main phase, the average grain diameter of prior austenite grains being not more than 20 ?m as measured with respect to a cross section parallel to a rolling direction and not more than 15 ?m as measured with respect to a cross section perpendicular to the rolling direction.

Abstract: A steel slab having a composition containing C: more than 0.07% and 0.2% or less, Si: 2.0% or less, Mn: 1.0% to 3.0%, Al: 0.1% or less, Ti: 0.05% to 0.3%, and V: 0.05% to 0.3% on a mass percent basis is heated to 1100° C. or more and is subjected to rough rolling and finish rolling. In the finish rolling, the total rolling reduction of two final passes is 30% or more, and the finish rolling temperature ranges from (Ar3 transformation temperature) to (Ar3 transformation temperature+120° C.). Cooling is started within 2 seconds after the finish rolling. Coiling is performed at an average cooling rate of 40° C./s or more at a coiling temperature in the range of 300° C. to 500° C. The resulting high-strength hot-rolled steel sheet has a microstructure in which a bainite phase constitutes more than 90% by volume, the average lath interval of bainite is 0.