Patents by Inventor Kazuhiro Furuki

Kazuhiro Furuki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma probe device and plasma processing apparatus
    Patent number: 11164730
    Abstract: A plasma probe device includes an antenna unit installed at an opening formed in a wall of a processing chamber or a mounting table through a sealing member configured to seal between a vacuum space and an atmospheric space, an electrode connected to the antenna unit, and a dielectric support portion made of a dielectric material and configured to support the antenna unit from an outer peripheral side. A surface of the antenna unit which is exposed through the opening and separated from a facing surface of the wall or the mounting table facing the antenna unit by a width is depressed from a surface of the wall or the mounting table where the opening is formed, which faces a plasma generation space.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: November 2, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Taro Ikeda, Tomohito Komatsu, Yuki Osada, Hiroyuki Miyashita, Susumu Saito, Kazuhiro Furuki, Mikio Sato, Eiki Kamata
  • PLASMA PROBE DEVICE AND PLASMA PROCESSING APPARATUS
    Publication number: 20190074166
    Abstract: A plasma probe device includes an antenna unit installed at an opening formed in a wall of a processing chamber or a mounting table through a sealing member configured to seal between a vacuum space and an atmospheric space, an electrode connected to the antenna unit, and a dielectric support portion made of a dielectric material and configured to support the antenna unit from an outer peripheral side. A surface of the antenna unit which is exposed through the opening and separated from a facing surface of the wall or the mounting table facing the antenna unit by a width is depressed from a surface of the wall or the mounting table where the opening is formed, which faces a plasma generation space.
    Type: Application
    Filed: September 5, 2018
    Publication date: March 7, 2019
    Inventors: Taro IKEDA, Tomohito KOMATSU, Yuki OSADA, Hiroyuki MIYASHITA, Susumu SAITO, Kazuhiro FURUKI, Mikio SATO, Eiki KAMATA
  • Chamber block
    Patent number: D678228
    Type: Grant
    Filed: August 30, 2011
    Date of Patent: March 19, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Kouki Suzuki, Kazuhiro Furuki, Koichi Yamazaki