Abstract: Disclosed is a producing method of a semiconductor device produced by transferring a plurality of substrates into a processing chamber, supplying oxygen-containing gas and hydrogen-containing gas into the processing chamber to process the plurality of substrates by oxidation, and transferring the plurality of the oxidation-processed substrates out from the processing chamber, wherein in the oxidation-processing, the hydrogen-containing gas is supplied from a plurality of locations of a region which is in proximity to the inner wall of the processing chamber and which corresponds to a substrate arrangement region in which the plurality of substrates are arranged in the processing chamber.

Abstract: Provided is a substrate processing apparatus and a method of manufacturing a semiconductor device, which are hard to cause a defect in processing a substrate owing to that a pressure inside a process chamber is not kept constant, and which enable a better processing of a substrate.

Abstract: Disclosed is a method for manufacturing a semiconductor device which comprises a step for carrying a plurality of substrates (1) in a process chamber (4), a step for supplying an oxygen-containing gas from the upstream side of the substrates (1) carried in the process chamber (4), a step for supplying a hydrogen-containing gas from at least one location corresponding to a position within the region where substrates (1) are placed in the process chamber (4), a step for oxidizing the substrates (1) by reacting the oxygen-containing gas with the hydrogen-containing gas in the process chamber (4), and a step for carrying the thus-processed substrates (1) out of the process chamber (4).

Abstract: An object of this invention is to make it possible to suppress early-stage oxidation of a substrate surface prior to oxidation processing, and to remove a natural oxidation film. For this reason, a method is provided comprising the steps of loading a substrate into a processing chamber, supplying a hydrogen-containing gas and an oxygen-containing gas into the processing chamber, and subjecting a surface of the substrate to oxidation processing, and unloading the substrate subjected to oxidation processing from the processing chamber. In the oxidation processing step, the hydrogen-containing gas is introduced in advance into the processing chamber, with the pressure inside the processing chamber set at a pressure that is less than atmospheric pressure, and the oxygen-containing gas is then introduced in the state in which the introduction of the hydrogen-containing gas is continued.

Abstract: Disclosed is a method for manufacturing a semiconductor device which comprises a step for carrying a plurality of substrates (1) in a process chamber (4), a step for supplying an oxygen-containing gas from the upstream side of the substrates (1) carried in the process chamber (4), a step for supplying a hydrogen-containing gas from at least one location corresponding to a position within the region where substrates (1) are placed in the process chamber (4), a step for oxidizing the substrates (1) by reacting the oxygen-containing gas with the hydrogen-containing gas in the process chamber (4), and a step for carrying the thus-processed substrates (1) out of the process chmaber (4).

Abstract: In an image forming apparatus, a developing device operable with toner or single component type developer has a hard first developing roller and a soft second developing roller. Fine magnetic N-S poles are formed on the periphery of the first roller. The second roller conveys the toner, electrostatically transferred thereto from the first roller, to an image carrier. The device frees a toner image from deterioration due to toner particles charged to a polarity opposite to an expected polarity. The toner forms a uniform thin layer on the first roller and is uniformly charged. Toner for use with this type of developing device is also disclosed.

Abstract: In an electrophotographic image recording apparatus of the type using a single-ingredient type developer, i.e., toner, a latent image is electrostatically formed on a photoconductive drum or similar image carrier. A developing unit has a developing roller for conveying the toner deposited thereon, and an intermediate roller for conveying the toner transferred thereto from the developing roller and depositing it on the latent image to thereby produce a corresponding toner image. An image transfer unit transfers the toner image to a cut sheet. During the development of an area of the image carrier other than a latent image area, at least one of biases assigned to the developing roller and intermediate roller, respectively, is switched over to thereby form an electric field different in direction from an electric field assigned to the formation of the toner image between the two rollers. As a result, the toner existing on the intermediate roller is collected by the developing roller.

Abstract: In an electrophotographic image forming apparatus of the type using single-ingredient type high resistance toner, a developing roller or similar toner conveyor roller is covered with a dielectric layer which is comparatively thick at opposite end portions than at an intermediate portion. A conductive or semiconductive elastic layer underlies the dielectric layer. With the above configuration, the dielectric layer is prevented from coming off the roller. This, coupled with the fact that the elastic layer does not contact a photoconductive element, eliminates current leaks and thereby extends the life of the roller and photoconductive element.

Abstract: In an image forming apparatus, a developing device operable with toner or single component type developer has a hard first developing roller and a soft second developing roller. Fine magnetic N-S poles are formed on the periphery of the first roller. The second roller conveys the toner, electrostatically transferred thereto from the first roller, to an image carrier. The device frees a toner image from deterioration due to toner particles charged to a polarity opposite to an expected polarity. The toner forms a uniform thin layer on the first roller and is uniformly charged. Toner for use with this type of developing device is also disclosed.

Abstract: In an electrophotographic recording apparatus of the type using a single-ingredient type developer, i.e., toner, a developing device has a developing roller for conveying the toner deposited thereon, and an intermediate roller for conveying the toner transferred theretofrom the developing roller and depositing it on a latent image electrostatically formed on an image carrier to thereby produce a corresponding toner image. During the development of an area of the image carrier other than a latent image area, a bias assigned to the developing roller is switched over to thereby form an electric field different in direction from an electric field assigned to the formation of the toner image between the two rollers. Further, before the rotation of the image carrier is stopped, the bias assigned to the developing roller is again switched in order to form the electric field for the formation of the toner image between the rollers. As a result, a toner layer is formed on the intermediate roller.

Abstract: In an image forming apparatus using a corona discharge type charging device and a contact type image transferring device, a toner deposited on a photoconductive element in the form of a black stripe is prevented from being transferred to the image transferring device; otherwise, the toner would be transferred from the image transferring device to the rear of the following recording medium. Because the toner forming the black stripe is limited to the toner charged to a polarity opposite to an expected polarity, toner consumption ascribable to the stripe is reduced.

Abstract: In an image forming apparatus, a developing device operable with toner or single component type developer has a hard first developing roller and a soft second developing roller. Fine magnetic N-S poles are formed on the periphery of the first roller. The second roller conveys the toner, electrostatically transferred thereto from the first roller, to an image carrier. The device frees a toner image from deterioration due to toner particles charged to a polarity opposite to an expected polarity. The toner forms a uniform thin layer on the first roller and is uniformly charged. Toner for use with this type of developing device is also disclosed.

Abstract: An image forming apparatus including a developing device having various components with specific relationships between their lengths. There is an image bearing member such as a photoconductive drum or belt having a photosensitive layer. The photosensitive layer has a length A. A first toner transporting roller has two ends, the length between the two ends being defined as B. Additionally, there is a second toner transporting roller, disposed between and contacting both the image bearing member and the first toner transporting roller. The length of the second toner transporting roller being defined as C. The components of the image forming apparatus are constructed such the length of the second toner transporting roller is less than or equal to the lengths of both the first toner transporting roller and the photosensitive layer of the image bearing member. This means that the relationships A>C and B>C may exist. As an alternative, B is approximately equal to C with A being greater than both B and C.

Abstract: A developing apparatus is capable of providing stable charging ability for a developer and stable transfer ability for transferring the developer to a photoreceptor for electronic photography to prevent residual positive images and stain of texture which appear on a toner image. A first toner transfer roller 23 has a core supported to be rotatable and a sheet type insulation layer wound around the outer periphery of the core. The insulation layer is made of elastic rubber in which magnetic material having a specified particle size is uniformly dispersed and the magnetic material is formed with ferromagnetic substance such as magnet and magnetized in advance. The first toner transfer roller 23 attracts toner T by actuating magnetism on the insulation layer since the magnetic material added to the insulation layer is magnetized.

Abstract: In an image forming apparatus, a developing device has a first developer carrier for depositing a developer thereon, a regulating member for regulating the amount of the developer deposited on the first developer carrier, and a second developer carrier having an elastic surface, and contacting the first developer carrier while biting into it by a predetermined amount. The developer is provided with a preselected degree of fluidity. Hence, even when the same portion of the surface of the second developer carrier runs a plurality of times past a position where the two developer carriers contact each other without any developer being fed from the second developer carrier to an image carrier, the first developer carrier can surely strip the developer from the second developer carrier. As a result, a developer on which a predetermined amount of charge is deposited is transferred from the first developer carrier to the second developer carrier. This successfully protects images from defects.

Abstract: In an image forming apparatus, a developing device operable with toner or single component type developer has a hard first developing roller and a soft second developing roller. Fine magnetic N-S poles are formed on the periphery of the first roller. The second roller conveys the toner, electrostatically transferred thereto from the first roller, to an image carrier. The device frees a toner image from deterioration due to toner particles charged to a polarity opposite to an expected polarity. The toner forms a uniform thin layer on the first roller and is uniformly charged. Toner for use with this type of developing device is also disclosed.

Abstract: In an image forming apparatus, a developing device operable with toner or single component type developer has a hard first developing roller and a soft second developing roller. Fine magnetic N-S poles are formed on the periphery of the first roller. The second roller conveys the toner, electrostatically transferred thereto from the first roller, to an image carrier. The device frees a toner image from deterioration due to toner particles charged to a polarity opposite to an expected polarity. The toner forms a uniform thin layer on the first roller and is uniformly charged. Toner for use with this type of developing device is also disclosed.

Abstract: A developing device which includes a first toner transporting roller, a second toner transporting roller to which toner is transported from the first toner transporting roller and an image bearing member such as a photoconductive drum or belt. Seals are located between the circumferential ends of one of the toner transporting rollers and a bottom portion of a toner hopper. When the seals are between the bottom of toner hopper and the first toner transporting roller, the first toner transporting roller is longer than the second toner transporting roller and the circumferential portions of the first toner transporting roller which contact the seals do not contact the second toner transporting roller.

Abstract: In an electrophotographic image forming apparatus of the type using single-ingredient type high resistance toner, a developing roller or similar toner conveyor roller is covered with a dielectric layer which is comparatively thick at opposite end portions than at an intermediate portion. A conductive or semiconductive elastic layer underlies the dielectric layer. With the above configuration, the dielectric layer is prevented from coming off the roller. This, coupled with the tact that the elastic layer does not contact a photoconductive element, eliminates current leaks and thereby extends the life of the roller and photoconductive element.

Abstract: A xerographic image recording apparatus includes a photosensitive body moved along a circuitous path, an electric discharging unit for eliminating electric charges from the photosensitive body, a precharging unit for charging the photosensitive body electrically, an image writing unit for writing an image on the photosensitive body, an image developing unit for coating the photosensitive body by the toner to form a toner image on the photosensitive body; a recording sheet feeding unit for feeding a recording sheet along a sheet path, an image transfer unit for transferring the toner image onto a recording sheet, a cleaning unit for removing the toner remaining on the photosensitive body after the transfer of image on the recording sheet is completed, a toner supply tank for supplying the toner to the image developing unit, and a toner recovery tank for collecting the toner removed by the cleaning unit from the photosensitive body, wherein the toner supply tank and the toner recovery tank are assembled into a