Patents by Inventor Kazuhito Honda

Kazuhito Honda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam apparatus and method of controlling same
    Patent number: 6452174
    Abstract: An FIB apparatus (101) includes a probe (2) grounded through an ammeter (12). An FIB (1B) is directed to impinge upon a sample (5) while a driver (22) is controlled to gradually decrease a distance between the probe (2) and the sample (5). With the probe (2) in non-contacting relationship with the sample (5), current generated in the sample (5) by the FIB (1B) impingement flows inwardly of the sample (5). With the probe (2) in contacting relationship with the sample (5), on the other hand, the current generated in the sample (5) flows toward the probe (2). Thus, current flowing through the probe (2) increases when contact is made between the probe (2) and the sample (5). The contact between the probe (2) and the sample (5) is detected based on the amount of change in the current flowing through the probe (2) which is monitored by the ammeter (12).
    Type: Grant
    Filed: April 27, 2000
    Date of Patent: September 17, 2002
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yukinori Hirose, Kazuhito Honda