Abstract: A laboratory test kit includes a development part 12 for developing thereon a test sample containing a virus, reagent portion 13 and a recognition portion 17. On the recognition portion 17, first and second specific antibodies both derived from a mouse are to be immobilized for specifically recognizing first and second antigen-determining sites respectively both possessed by the virus. The reagent portion 13 includes first and second labeled antibodies both derived from a mouse, which specifically recognize the first and second antigen-determining sites respectively both possessed by the virus and are labeled with a labeling substance. In each of the first and second labeled antibodies, at least one of an antigen site which is recognized by the HAMA or a sugar chain binding site recognized by an antibody which recognizes a sugar chain is defected or modified.

Abstract: A projection exposure apparatus comprising: a display device having a reflection-type or transmission-type display portion on which a predetermined image to be exposed is displayed; a stage for holding a substrate to be exposed; and a telecentric-type projection lens for projecting the predetermined image displayed on the display portion onto the surface of the substrate held on the stage.

Abstract: A surface examining method and a surface examining apparatus, in which a large-sized lens of an object-side telecentric optical system is not required and which can observe a surface to be examined in a wide region. A surface examining method for examining a surface of an object to be measured, by observing a light reflected from the object through an object-side telecentric optical system or an image-object-side telecentric optical system, comprises the steps of; arranging the object-side telecentric optical system or the image-object-side telecentric optical system so that an optical axis thereof is inclined with respect to a direction normal to the object to be measured, and observing the light reflected from the object to be measured.

Abstract: The present invention provides a light illuminating method, a surface examining method using the light illuminating method, and apparatuses for performing these methods. In the surface illuminating apparatus for illuminating an object with a light beam from a light source through a lens member for illumination, the lens member for illumination has a characteristics with respect to a longitudinal aberration caused by a spherical aberration in the light source side of the lens for illumination, that an amount of shift from a paraxial image surface to image formation points gradually increase or decrease, with an increase in height of light incidence into the lens; and the light source is set at a position in an outside of a group of the image formation points.

Abstract: A method enables measurement of the configuration of a pattern with irregularity in a wide surface region with a high accuracy and in a single operation. The surface inspecting method includes irradiating a measurement objective region with an illuminating light in an oblique direction thereto; forming an image of reflected light from the measurement objective region, the formed image of reflected light having points with luminance corresponding to the incident angle of the illuminating light at respective points on the measurement objective region picking up the formed image to collect luminance data of respective points in the measurement objective region; analyzing spatial frequencies of the luminance data with respect to positions in a desired direction to make a plurality of spatial frequency data; and extracting a desired frequency component from the plurality of spatial frequency data.

Abstract: The present invention enables measurement of the configuration of a pattern with irregularity in a wide surface region with a high accuracy and in a single operation by using an apparatus having relatively simple construction.

Abstract: There is provided an inspection apparatus which illuminates at least part of a sample with diffused light from a diffused light source and inspects the sample based on light reflected from the sample. An illuminating chamber is defined by a wall member. The wall member has an inner wall surface for reflecting diffused light from the diffused light source, a sample-inserting opening formed through the wall member for inserting the at least part of the sample into the illuminating chamber therethrough, and a sample-observing opening formed through the wall member for permitting light reflected from the at least part of the sample to be emitted out of the illuminating chamber. The sample is observed by the use of an object-side telecentric optical system having a lens system for collecting parallel light from the light emitted from the sample-observing opening, and an aperture stop arranged at or in the vicinity of a back focal point of the lens system.

Abstract: An optical inspecting apparatus illuminates a sample with at least one of a parallel light or a diffused light. Light reflected from the sample or light transmitted through the sample is focused by a telecentric optical system and an aperture stop arranged at a back focal plane in the image space of the telecentric optical system. The sample is viewed based on light thus obtained.

Abstract: The method comprises the steps of: irradiating an objective region to be measured with an illuminating light in an oblique direction thereto; forming an image of reflected light from the objective region by member of an object-side telecentric optical system or an image-object-side telecentric optical system, which has an optical axis coinciding with an incident direction of the illuminating light to the objective region and has a object-side angular aperture against a point on the objective region, which is set at a predetermined angle; picking up the formed image to collect luminance data of respective points in the objective region; and processing the luminance data to recognize bright and dark portions and thereby determining the presence or absence of an irregular portion and a shape of the irregular portion, in the objective region.

Abstract: There is provided an optical inspection apparatus including an illuminating block for emitting light and illuminating a sample with the emitted light, an observing optical system for forming an image from transmitted light or reflected light from the sample, and an observing block for observing the image. The observing optical system comprises an object side lens arranged on an object side close to the sample, an image side lens arranged on an image side remote from the sample, the object side lens and the image side lens being arranged such that the object side lens and the image side lens have focal points coincident to each other, forming a both-side telecentric optical system for acting on the transmitted light or the reflected light to form the image, an aperture arranged on the focal points or in the vicinity thereof, and a screen arranged on a back focal point of the image side lens or in the vicinity thereof for having the image of the sample being projected thereon.

Abstract: In an optical inspecting apparatus, first, a sample is illuminated with light. Then, an optical element causes light reflected from the sample or light transmitted through the sample to be focused, to thereby permit same to pass through an aperture stop arranged on a back focal plane or in its vicinity of the optical element. A telecenttic system converts the light having passed through the aperture stop into a parallel light. An image on the air formed by the telecentric system is viewed for inspection of the sample surface.

Abstract: An apparatus for inspecting the surface condition of an object comprises a light source, an optical element for directing irradiating light from the light source to an object and for converging the light reflected by the surface of the object at its back focal plane to form an image behind the back focal plane, and an observing apparatus for observing the image. An aperture stop is arranged at or near the back focal plane to cut off a scattered component of the reflected light. A half mirror having two planes forming a predetermined micro angle each other deflects the reflected light from the optical path of the irradiating light.

Abstract: An inspection apparatus has a light source for irradiating lights to a sample. An optical element comprising of an achromatic lens converges the lights transmitted through or reflected by the sample to thereby form an image behind the back focal plane. An aperture stop is arranged at or near the back focal plane tot eliminating the lights scattered or refracted by the sample. The image is observed with a camera tube arranged behind the back focal plane.