Abstract: An information recording apparatus for recording tracks includes: a rotation drive section (RDS) that supports and rotates a master disk with a resist layer; an exposure beam emitting section (EBES) deflectably applying an exposure beam to the disk to form a spot thereon; a relative movement drive section (RMDS) translating the RDS relatively to the spot in a radial direction of the disk; an emission controller supplying the EBES with an instruction for modulating an intensity of the exposure beam according to data to be recorded; and a movement controller supplying the RMDS with an instruction for moving the RDS with the rotating disk by a predetermined moving amount for each disk rotation.

Abstract: An information recording apparatus for recording tracks includes: a rotation drive section (RDS) that supports and rotates a master disk with a resist layer; an exposure beam emitting section (EBES) deflectably applying an exposure beam to the disk to form a spot thereon; a relative movement drive section (RMDS) translating the RDS relatively to the spot in a radial direction of the disk; an emission controller supplying the EBES with an instruction for modulating an intensity of the exposure beam according to data to be recorded; and a movement controller supplying the RMDS with an instruction for moving the RDS with the rotating disk by a predetermined moving amount for each disk rotation.

Abstract: An information recording apparatus for recording tracks includes: a rotation drive section (RDS) that supports and rotates a master disk with a resist layer; an exposure beam emitting section (EBES) deflectably applying an exposure beam to the disk to form a spot thereon; a relative movement drive section (RMDS) translating the RDS relatively to the spot in a radial direction of the disk; an emission controller supplying the EBES with an instruction for modulating an intensity of the exposure beam according to data to be recorded; and a movement controller supplying the RMDS with an instruction for moving the RDS with the rotating disk by a predetermined moving amount for each disk rotation.

Abstract: A master disc manufacturing apparatus includes an electron-beam emitting portion for emitting an electron beam, an electron-beam converging portion for converging an electron beam, a retarding voltage applying portion for applying a substrate with a negative potential having a magnitude of decelerating the electron beam, and a vacuum atmosphere producing portion for evacuating a chamber to produce a vacuum atmosphere therein.

Abstract: An apparatus of manufacturing a master by irradiating an electron beam on a substrate mounted on a turntable includes a rotation drive section for rotating the turntable; first and second correction-signal generating sections for respectively detecting first and second asynchronous components of rotational fluctuation of the turntable in a predetermined direction and in a direction perpendicular to the predetermined direction to generate first and second correction signals; and a deflection control section for controlling the electron beam deflection on the basis of the first and second correction signals.

Abstract: An information recording apparatus for recording tracks includes: a rotation drive section (RDS) that supports and rotates a master disk with a resist layer; an exposure beam emitting section (EBES) deflectably applying an exposure beam to the disk to form a spot thereon; a relative movement drive section (RMDS) translating the RDS relatively to the spot in a radial direction of the disk; an emission controller supplying the EBES with an instruction for modulating an intensity of the exposure beam according to data to be recorded; and a movement controller supplying the RMDS with an instruction for moving the RDS with the rotating disk by a predetermined moving amount for each disk rotation.

Abstract: A master disc manufacturing apparatus includes an electron-beam emitting portion for emitting an electron beam, an electron-beam converging portion for converging an electron beam, a retarding voltage applying portion for applying a substrate with a negative potential having a magnitude of decelerating the electron beam, and a vacuum atmosphere producing portion for evacuating a chamber to produce a vacuum atmosphere therein.

Abstract: A spin-coating device comprises; a turntable for concentrically supporting a substrate; a spindle motor for rotating the turntable about a central axis thereof and connected via a rotating shaft thereto; a supply mechanism for feeding and dripping a fluid coating material onto the substrate; and a holding mechanism for maintaining that the central axis of rotation of the turntable carrying the substrate is placed to be inclined at a predetermined angle with respect to a gravitational direction while the fluid coating material is dripped onto the rotating substrate.

Abstract: A fluid supplying and processing device has a plurality of fluid guide pipes having distal ends opening above a workpiece such as a disc base. The open ends of the fluid guide pipes discharge respective different processing fluids supplied from respective fluid sources toward the workpiece for thereby processing the workpiece, such as to form a photoresist pattern on the surface of the disc base. At least one of the fluid guide pipes has at least a distal end portion inserted in another of the fluid guide pipes. The outer side surface of the distal end portion of said one fluid guide pipe is cleaned by a fluid flowing through the other surrounding fluid guide pipe.

Abstract: A flow processing system for processing disc-shaped articles such as discs to be used to produce video or audio disc masters, whereby a plurality of processing units for performing respectively different processing operations are combined into a single system in which each disc is moved only horizontally and in a continuously rotating condition, both during processing and while being moved between the processing units. In addition, the supporting structure of the processing units is implemented such as to produce no disturbances in a horizontally directed dust-excluding flow of air, to ensure maximum prevention of adherence of dust particles to the disc surfaces.

Abstract: An apparatus for drying optical disks heats a disk from the underside, and optionally blows clean air between the heater and the disk being dried in order to prevent contaminants from landing on the disk. Heat control is provided such that a surface temperature of the disk during drying is maintained uniform, preventing brittleness. The apparatus preheats the heater, placing the disk in a standby position during warm-up. The apparatus then moves the disk over the heater, and monitors the temperature of the disk, removing the disk back to the standby position when the disk reaches a predetermined temperature. In order to provide uniform heating, a radiant heat controlling plate having a suitably-shaped opening portion may be provided. Additionally, temperature distribution throughout the disk may be achieved as desired, in accordance with the heat control performed, and/or in accordance with the shape of the opening portion of the radiant heat controlling plate.

Abstract: An apparatus for detecting faults on the surface of a resist master disc and for measuring the thickness of the resist coating layer includes a single light source for generating a laser beam for inspection of the master disc, a first separator for separating the laser beam into a first laser beam which is used for the detection of faults, and a second laser beam which is used to measure the thickness of the resist coating layer. The second laser beam is further separated into two laser beams one of which is irradiated on the surface of the resist coated master disc at a given angle of incidence.

Abstract: A flow processing system for processing disc-shaped articles such as discs to be used to produce video or audio disc masters, whereby a plurality of processing units for performing respectively different processing operations are combined into a single system in which each disc is moved only horizontally and in a continuously rotating condition, both during processing and while being moved between the processing units. In addition, the supporting structure of the processing units is implemented such as to produce no disturbances in a horizontally directed dust-excluding flow of air, to ensure maximum prevention of adherence of dust particles to the disc surfaces.

Abstract: A support structure for an electromechanical transducer assembly including an optical unit and drive means for driving the optical unit in at least two directions consisting of a first direction and a second direction perpendicular to the first direction, comprising stationary structure means, movable structure means movable in the two directions from and to a predetermined position with respect to the stationary structure means, the optical unit being movable with the movable structure means, and at least two spring elements each constituted by an endless band of an elastic or viscoelastic material, each of the spring elements being interposed between the stationary and movable structure means and having a center axis in a third direction perpendicular to both of the first and second directions, each of the spring elements being deformed under compression into a generally oval configuration between the stationary and movable structure means.

Abstract: A device for detecting non-recorded portions on a magnetic tape including a circuit for preventing malfunctions in the detecting device. The output from a playback head of a tape recorder is amplified then passed through a malfunction preventing circuit which passes the signal if its amplitude is above a preset level for at least a predetermined period of time. The output signal from the malfunction preventing circuit is waveform shaped then rectified and passed through a charge/discharge circuit to a solenoid energizing circuit. The malfunction preventing circuit includes a variable impedance element such as a field effect transistor coupled between an output terminal of the circuit and ground with the impedance of the element varied in accordance with the magnitude of the input signal with a delay added.