Abstract: A spin-coating device comprises; a turntable for concentrically supporting a substrate; a spindle motor for rotating the turntable about a central axis thereof and connected via a rotating shaft thereto; a supply mechanism for feeding and dripping a fluid coating material onto the substrate; and a holding mechanism for maintaining that the central axis of rotation of the turntable carrying the substrate is placed to be inclined at a predetermined angle with respect to a gravitational direction while the fluid coating material is dripped onto the rotating substrate.

Abstract: A plant diagnostic system is disclosed wherein a plant to be diagnosed is expressed as an auto regressive model. A correlation function with respect to a difference obtained on the basis of an estimated value based on the auto regressive model and a plant value of the plant to be diagnosed is calculated. There is additionally provided a time constant determination unit for determining a time constant at which a change of one plant value has the greatest influence on that plant value or other plant values by using a coefficient matrix of the auto regressive model. This enables calculation of the correlation function in consideration of the time constant of the plant to be diagnosed. In this manner, an identification of an abnormality or failure source which is in conformity with the characteristic of the plant to be diagnosed can be conducted.

Abstract: In a method and a system for diagnosing a thermal power plant system including a thermal power plant, provided with an automatic power plant control system performing PID control, and a direct digital control system utilizing a control model representing the combination of the plant and the automatic power plant control system and controlling the plant to conduct an optimum control, the automatic power plant control system and the direct digital control system conducting control complementarily: a plant diagnostic model formed of a mathematical model representing the combination of the plant, the automatic power plant control system, the control model and the direct digital control system, is provided and used to determine predicted values of the plant variables; difference between the predicted value of each of the plant variables and the actual value of the same plant variable is determined, and stored thereby to provide a time series of the differences which have been successively determined; whiteness ind